GB8429621D0 - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- GB8429621D0 GB8429621D0 GB848429621A GB8429621A GB8429621D0 GB 8429621 D0 GB8429621 D0 GB 8429621D0 GB 848429621 A GB848429621 A GB 848429621A GB 8429621 A GB8429621 A GB 8429621A GB 8429621 D0 GB8429621 D0 GB 8429621D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- semiconductor device
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23427683A JPS60126871A (en) | 1983-12-14 | 1983-12-14 | Semiconductor pressure-sensitive device and manufacture thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
GB8429621D0 true GB8429621D0 (en) | 1985-01-03 |
GB2151398A GB2151398A (en) | 1985-07-17 |
Family
ID=16968428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB08429621A Withdrawn GB2151398A (en) | 1983-12-14 | 1984-11-23 | A semiconductor pressure sensor and a method of manufacture thereof |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS60126871A (en) |
GB (1) | GB2151398A (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2207804B (en) * | 1987-08-06 | 1990-08-15 | Stc Plc | Pressure sensor and manufacturing process therefor |
US5354695A (en) * | 1992-04-08 | 1994-10-11 | Leedy Glenn J | Membrane dielectric isolation IC fabrication |
JPH01315172A (en) * | 1988-06-15 | 1989-12-20 | Komatsu Ltd | Stress converting element and its manufacture |
US5245504A (en) * | 1989-02-28 | 1993-09-14 | United Technologies Corporation | Methodology for manufacturing hinged diaphragms for semiconductor sensors |
US5225377A (en) * | 1991-05-03 | 1993-07-06 | Honeywell Inc. | Method for micromachining semiconductor material |
JP3261544B2 (en) * | 1991-10-03 | 2002-03-04 | キヤノン株式会社 | Method for manufacturing cantilever drive mechanism, method for manufacturing probe drive mechanism, cantilever drive mechanism, probe drive mechanism, multi-probe drive mechanism using same, scanning tunneling microscope, information processing apparatus |
DE4309917A1 (en) * | 1992-03-30 | 1993-10-07 | Awa Microelectronics | Process for the production of silicon microstructures and silicon microstructure |
AU660358B2 (en) * | 1992-03-30 | 1995-06-22 | Awa Microelectronics Pty Limited | Silicon transducer |
DE4309207C2 (en) * | 1993-03-22 | 1996-07-11 | Texas Instruments Deutschland | Semiconductor device with a piezoresistive pressure sensor |
EP0672899B1 (en) * | 1994-03-18 | 1999-10-06 | The Foxboro Company | Semiconductor pressure sensor with single-crystal silicon diaphragm and single-crystal gage elements and fabrication method therefor |
US6551857B2 (en) | 1997-04-04 | 2003-04-22 | Elm Technology Corporation | Three dimensional structure integrated circuits |
DE102017108582A1 (en) | 2017-04-21 | 2018-10-25 | Epcos Ag | Sheet resistance and thin film sensor |
-
1983
- 1983-12-14 JP JP23427683A patent/JPS60126871A/en active Pending
-
1984
- 1984-11-23 GB GB08429621A patent/GB2151398A/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
GB2151398A (en) | 1985-07-17 |
JPS60126871A (en) | 1985-07-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |