GB8412729D0 - Automated cassette transport system - Google Patents

Automated cassette transport system

Info

Publication number
GB8412729D0
GB8412729D0 GB848412729A GB8412729A GB8412729D0 GB 8412729 D0 GB8412729 D0 GB 8412729D0 GB 848412729 A GB848412729 A GB 848412729A GB 8412729 A GB8412729 A GB 8412729A GB 8412729 D0 GB8412729 D0 GB 8412729D0
Authority
GB
United Kingdom
Prior art keywords
transport system
cassette transport
automated cassette
automated
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB848412729A
Other versions
GB2141680A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of GB8412729D0 publication Critical patent/GB8412729D0/en
Publication of GB2141680A publication Critical patent/GB2141680A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Centrifugal Separators (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
GB08412729A 1983-05-20 1984-05-18 Automated cassette rail transport system operating under clean air conditions Withdrawn GB2141680A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US49676983A 1983-05-20 1983-05-20

Publications (2)

Publication Number Publication Date
GB8412729D0 true GB8412729D0 (en) 1984-06-27
GB2141680A GB2141680A (en) 1985-01-03

Family

ID=23974057

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08412729A Withdrawn GB2141680A (en) 1983-05-20 1984-05-18 Automated cassette rail transport system operating under clean air conditions

Country Status (4)

Country Link
JP (1) JPS59225597A (en)
DE (1) DE3418243A1 (en)
FR (1) FR2546328A1 (en)
GB (1) GB2141680A (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT8420722V0 (en) * 1984-02-03 1984-02-03 Francesco Canziani TROLLEY IN PARTICULAR FOR SORTING MACHINES WITH INDEPENDENT OPERATING PLATE.
IT8520636V0 (en) * 1985-01-29 1985-01-29 Canziani Francesco CART IN PARTICULAR FOR SORTING MACHINES WITH TIPPING PLATES.
US4750857A (en) * 1986-05-05 1988-06-14 The Perkin-Elmer Corporation Wafer cassette transfer mechanism
DE3637880C2 (en) * 1986-11-06 1994-09-01 Meissner & Wurst Transportable container for handling semiconductor elements during their manufacture as well as methods for the particle-free delivery of products
DE3826925A1 (en) * 1988-08-09 1990-02-15 Daldrop & Dr Ing Huber Gmbh & Installation for handling and treating contamination-sensitive objects, such as semiconductor parts (wafers) or similar products
DE3908329A1 (en) * 1989-03-10 1990-09-20 Siemens Ag Production apparatus in clean-room technology
US5713791A (en) * 1995-04-06 1998-02-03 Motorola, Inc. Modular cleanroom conduit and method for its use
JPH11111809A (en) * 1997-10-07 1999-04-23 Innotech Corp Conveying device
DE19913628A1 (en) * 1999-03-25 2000-10-05 Siemens Ag Plant for the production of semiconductor products
DE10104555B4 (en) * 2001-02-01 2007-11-08 Krauss Maffei Gmbh Storage device for use in clean environments
DE102018130807A1 (en) * 2018-12-04 2020-06-04 Homag Gmbh Means of transport, transport system and processing machine

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE793856A (en) * 1972-01-14 1973-05-02 Ingold & Co Hans THREE-DIMENSIONAL TRANSPORTATION INSTALLATION
JPS5699127A (en) * 1979-12-29 1981-08-10 Electroplating Eng Of Japan Co Automatic plating device

Also Published As

Publication number Publication date
DE3418243A1 (en) 1984-11-22
GB2141680A (en) 1985-01-03
FR2546328A1 (en) 1984-11-23
JPS59225597A (en) 1984-12-18

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)