GB2133757B - A frictionless transport system - Google Patents

A frictionless transport system

Info

Publication number
GB2133757B
GB2133757B GB08400966A GB8400966A GB2133757B GB 2133757 B GB2133757 B GB 2133757B GB 08400966 A GB08400966 A GB 08400966A GB 8400966 A GB8400966 A GB 8400966A GB 2133757 B GB2133757 B GB 2133757B
Authority
GB
United Kingdom
Prior art keywords
transport system
frictionless transport
frictionless
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08400966A
Other versions
GB8400966D0 (en
GB2133757A (en
Inventor
Alan Clayton Havassy
James Lawrence Lloyd
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of GB8400966D0 publication Critical patent/GB8400966D0/en
Publication of GB2133757A publication Critical patent/GB2133757A/en
Application granted granted Critical
Publication of GB2133757B publication Critical patent/GB2133757B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
GB08400966A 1983-01-14 1984-01-13 A frictionless transport system Expired GB2133757B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US45798283A 1983-01-14 1983-01-14

Publications (3)

Publication Number Publication Date
GB8400966D0 GB8400966D0 (en) 1984-02-15
GB2133757A GB2133757A (en) 1984-08-01
GB2133757B true GB2133757B (en) 1987-01-14

Family

ID=23818865

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08400966A Expired GB2133757B (en) 1983-01-14 1984-01-13 A frictionless transport system

Country Status (2)

Country Link
JP (1) JPS59138524A (en)
GB (1) GB2133757B (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102171807A (en) * 2008-08-13 2011-08-31 Ers电子有限公司 Method and apparatus for thermally processing plastic discs, in particular mould wafers
CN102807098A (en) * 2011-06-02 2012-12-05 江苏永钢集团有限公司 Automatic iron-nail feeding device
US10654660B2 (en) 2018-01-31 2020-05-19 Laitram, L.L.C. Hygienic magnetic tray and conveyor
US10807803B2 (en) 2018-01-31 2020-10-20 Laitram, L.L.C. Hygienic low-friction magnetic tray and conveyor
US10843880B2 (en) 2016-10-05 2020-11-24 Laitram, L.L.C. Linear-motor conveyor system
US10968055B2 (en) 2017-09-13 2021-04-06 Laitram, L.L.C. Monorail tray conveyor with passive guide rails
US11401119B2 (en) 2017-06-19 2022-08-02 Laitram, L.L.C. Monorail tray conveyor

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4662282A (en) * 1985-03-13 1987-05-05 Hitachi Kiden Kogyo Kabushiki Kaisha Switching device for pneumatic conveyance linear motor actuated
FR2632618A1 (en) * 1988-06-08 1989-12-15 Commissariat Energie Atomique AIR CUSHION TRANSPORT DEVICE WITH MAGNETIC GUIDE
JPH1159901A (en) * 1997-08-11 1999-03-02 Murata Mach Ltd Carrier moving device
US6397990B1 (en) * 1998-10-20 2002-06-04 Pri Automation, Inc. Materials transport system having inductive power transfer
CH714282B1 (en) * 2000-07-06 2019-04-30 Murata Machinery Ltd Storage system with conveyor elements.
US6752585B2 (en) 2001-06-13 2004-06-22 Applied Materials Inc Method and apparatus for transferring a semiconductor substrate
WO2004076320A1 (en) 2003-02-25 2004-09-10 Technische Universität München Device for contactlessly conveying and positioning components
DE102005007051A1 (en) * 2004-11-05 2006-05-11 Schumag Ag Device and method for separating or processing rod or tube-like material
IT1398600B1 (en) * 2009-02-16 2013-03-08 Sacmi TRANSPORT SYSTEM OF TRAYS OR SIMILAR
US9611107B2 (en) 2014-12-08 2017-04-04 Rockwell Automation Technologies, Inc. Linear drive transport system and method
CN107310944B (en) * 2017-06-14 2019-04-12 沈路平 A kind of transmission device
DE102018211839A1 (en) 2018-07-17 2020-01-23 Bausch + Ströbel Maschinenfabrik Ilshofen GmbH + Co. KG transport system
DE102020100669A1 (en) * 2020-01-14 2021-07-15 Beckhoff Automation Gmbh Linear transport system as well as motor module and guide rail for such a linear transport system
CN114013212B (en) * 2021-10-25 2023-11-10 西南科技大学 Magnetic force constraint sliding plate pair

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3385228A (en) * 1965-04-16 1968-05-28 Skinner Prec Ind Inc Transportation system
GB1267192A (en) * 1968-01-12 1972-03-15
DE2027117B2 (en) * 1970-06-03 1971-12-16 Messerschmitt Bolkow Blohm GmbH, 8000 München GUIDE MAGNETS FOR VEHICLES ON A SUSPENSION WAY
DE2060970A1 (en) * 1970-12-11 1972-06-29 Messerschmitt Boelkow Blohm Magnetic guide for vehicles on a rail-bound train
GB1399459A (en) * 1971-07-15 1975-07-02 Tracked Hovercraft Ltd Transportation systems
DE2202275A1 (en) * 1972-01-18 1973-07-26 Krauss Maffei Ag SUPPORT AND / OR GUIDE DEVICE FOR A LIFTING VEHICLE TRANSPORT SYSTEM
GB1371143A (en) * 1972-01-24 1974-10-23 Tracked Hovercraft Ltd Ground transportation systems and tracks and vehicles therefor
US3861321A (en) * 1972-12-27 1975-01-21 Ltv Aerospace Corp Transportation system and vehicles for the system

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102171807A (en) * 2008-08-13 2011-08-31 Ers电子有限公司 Method and apparatus for thermally processing plastic discs, in particular mould wafers
CN102807098A (en) * 2011-06-02 2012-12-05 江苏永钢集团有限公司 Automatic iron-nail feeding device
CN102807098B (en) * 2011-06-02 2015-07-22 江苏永钢集团有限公司 Automatic iron-nail feeding device
US10843880B2 (en) 2016-10-05 2020-11-24 Laitram, L.L.C. Linear-motor conveyor system
US11198568B2 (en) 2016-10-05 2021-12-14 Laitram, L.L.C. Linear-motor conveyor system
US11401119B2 (en) 2017-06-19 2022-08-02 Laitram, L.L.C. Monorail tray conveyor
US10968055B2 (en) 2017-09-13 2021-04-06 Laitram, L.L.C. Monorail tray conveyor with passive guide rails
US10654660B2 (en) 2018-01-31 2020-05-19 Laitram, L.L.C. Hygienic magnetic tray and conveyor
US10807803B2 (en) 2018-01-31 2020-10-20 Laitram, L.L.C. Hygienic low-friction magnetic tray and conveyor

Also Published As

Publication number Publication date
GB8400966D0 (en) 1984-02-15
JPS59138524A (en) 1984-08-09
GB2133757A (en) 1984-08-01

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee