DE3418243A1 - automated kassettenfoerderanlage - Google Patents

automated kassettenfoerderanlage

Info

Publication number
DE3418243A1
DE3418243A1 DE19843418243 DE3418243A DE3418243A1 DE 3418243 A1 DE3418243 A1 DE 3418243A1 DE 19843418243 DE19843418243 DE 19843418243 DE 3418243 A DE3418243 A DE 3418243A DE 3418243 A1 DE3418243 A1 DE 3418243A1
Authority
DE
Grant status
Application
Patent type
Prior art keywords
kassettenfoerderanlage
automated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19843418243
Other languages
German (de)
Inventor
Stanley Kent Gardner
Frederick Thomas Turner
Martin Albert Hutchinson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Medical Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715Changing the direction of the conveying path
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773Conveying cassettes, containers or carriers
DE19843418243 1983-05-20 1984-05-16 automated kassettenfoerderanlage Withdrawn DE3418243A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US49676983 true 1983-05-20 1983-05-20

Publications (1)

Publication Number Publication Date
DE3418243A1 true true DE3418243A1 (en) 1984-11-22

Family

ID=23974057

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19843418243 Withdrawn DE3418243A1 (en) 1983-05-20 1984-05-16 automated kassettenfoerderanlage

Country Status (4)

Country Link
JP (1) JPS59225597A (en)
DE (1) DE3418243A1 (en)
FR (1) FR2546328A1 (en)
GB (1) GB8412729D0 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0244772A1 (en) * 1986-05-05 1987-11-11 The Perkin-Elmer Corporation Wafer cassette transfer mechanismand method
DE3637880A1 (en) * 1986-11-06 1988-05-19 Meissner & Wurst Container for handling of semiconductor elements and methods for particle-free by reproducing
DE3826925A1 (en) * 1988-08-09 1990-02-15 Daldrop & Dr Ing Huber Gmbh & Installation for handling and treating contamination-sensitive objects, such as semiconductor parts (wafers) or similar products
DE3908329A1 (en) * 1989-03-10 1990-09-20 Siemens Ag Production apparatus in clean-room technology
DE19913628A1 (en) * 1999-03-25 2000-10-05 Siemens Ag Plant for the production of semiconductor products
DE10104555A1 (en) * 2001-02-01 2002-08-08 Krauss Maffei Kunststofftech Storage device for use in clean environments,

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8500269A (en) * 1984-02-03 1985-09-02 Francesco Canziani Wagon for, in particular sorting machine with independently controlled tilting plate.
DE3516229C2 (en) * 1985-01-29 1994-06-09 Francesco Canziani guided on rails carriage for a sorting device
US5713791A (en) * 1995-04-06 1998-02-03 Motorola, Inc. Modular cleanroom conduit and method for its use
JPH11111809A (en) * 1997-10-07 1999-04-23 Innotech Corp Conveying device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE793856A (en) * 1972-01-14 1973-05-02 Ingold & Co Hans three-dimensional transport device
JPS5699127A (en) * 1979-12-29 1981-08-10 Electroplating Eng Of Japan Co Automatic plating device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0244772A1 (en) * 1986-05-05 1987-11-11 The Perkin-Elmer Corporation Wafer cassette transfer mechanismand method
DE3637880A1 (en) * 1986-11-06 1988-05-19 Meissner & Wurst Container for handling of semiconductor elements and methods for particle-free by reproducing
DE3826925A1 (en) * 1988-08-09 1990-02-15 Daldrop & Dr Ing Huber Gmbh & Installation for handling and treating contamination-sensitive objects, such as semiconductor parts (wafers) or similar products
DE3908329A1 (en) * 1989-03-10 1990-09-20 Siemens Ag Production apparatus in clean-room technology
DE19913628A1 (en) * 1999-03-25 2000-10-05 Siemens Ag Plant for the production of semiconductor products
DE10104555A1 (en) * 2001-02-01 2002-08-08 Krauss Maffei Kunststofftech Storage device for use in clean environments,
DE10104555B4 (en) * 2001-02-01 2007-11-08 Krauss Maffei Gmbh Storage device for use in clean environments,

Also Published As

Publication number Publication date Type
GB8412729D0 (en) 1984-06-27 grant
FR2546328A1 (en) 1984-11-23 application
JPS59225597A (en) 1984-12-18 application
GB2141680A (en) 1985-01-03 application

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Legal Events

Date Code Title Description
8130 Withdrawal