DE3418243A1 - automated kassettenfoerderanlage - Google Patents

automated kassettenfoerderanlage

Info

Publication number
DE3418243A1
DE3418243A1 DE19843418243 DE3418243A DE3418243A1 DE 3418243 A1 DE3418243 A1 DE 3418243A1 DE 19843418243 DE19843418243 DE 19843418243 DE 3418243 A DE3418243 A DE 3418243A DE 3418243 A1 DE3418243 A1 DE 3418243A1
Authority
DE
Germany
Prior art keywords
kassettenfoerderanlage
automated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19843418243
Other languages
German (de)
Inventor
Stanley Kent Gardner
Frederick Thomas Turner
Martin Albert Hutchinson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Medical Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US49676983A priority Critical
Application filed by Varian Medical Systems Inc filed Critical Varian Medical Systems Inc
Publication of DE3418243A1 publication Critical patent/DE3418243A1/en
Application status is Withdrawn legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715Changing the direction of the conveying path
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773Conveying cassettes, containers or carriers
DE19843418243 1983-05-20 1984-05-16 automated kassettenfoerderanlage Withdrawn DE3418243A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US49676983A true 1983-05-20 1983-05-20

Publications (1)

Publication Number Publication Date
DE3418243A1 true DE3418243A1 (en) 1984-11-22

Family

ID=23974057

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19843418243 Withdrawn DE3418243A1 (en) 1983-05-20 1984-05-16 automated kassettenfoerderanlage

Country Status (4)

Country Link
JP (1) JPS59225597A (en)
DE (1) DE3418243A1 (en)
FR (1) FR2546328A1 (en)
GB (1) GB2141680A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0244772A1 (en) * 1986-05-05 1987-11-11 The Perkin-Elmer Corporation Wafer cassette transfer mechanismand method
DE3637880A1 (en) * 1986-11-06 1988-05-19 Meissner & Wurst Container for handling of semiconductor elements and methods for particle-free by reproducing
DE3826925A1 (en) * 1988-08-09 1990-02-15 Daldrop & Dr Ing Huber Gmbh & Installation for handling and treating contamination-sensitive objects, such as semiconductor parts (wafers) or similar products
DE3908329A1 (en) * 1989-03-10 1990-09-20 Siemens Ag Production apparatus in clean-room technology
DE19913628A1 (en) * 1999-03-25 2000-10-05 Siemens Ag Plant for the production of semiconductor products
DE10104555A1 (en) * 2001-02-01 2002-08-08 Krauss Maffei Kunststofftech Storage device for use in clean environments,

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT8420722V0 (en) * 1984-02-03 1984-02-03 Francesco Canziani Shopping in particular sorters dump plate to self-drive.
IT8520636V0 (en) * 1985-01-29 1985-01-29 Canziani Francesco Shopping especially for sorters in folding plates.
US5713791A (en) * 1995-04-06 1998-02-03 Motorola, Inc. Modular cleanroom conduit and method for its use
JPH11111809A (en) * 1997-10-07 1999-04-23 Innotech Corp Conveying device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE793856A (en) * 1972-01-14 1973-05-02 Ingold & Co Hans three-dimensional transport device
JPS5699127A (en) * 1979-12-29 1981-08-10 Electroplating Eng Of Japan Co Automatic plating device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0244772A1 (en) * 1986-05-05 1987-11-11 The Perkin-Elmer Corporation Wafer cassette transfer mechanismand method
DE3637880A1 (en) * 1986-11-06 1988-05-19 Meissner & Wurst Container for handling of semiconductor elements and methods for particle-free by reproducing
DE3826925A1 (en) * 1988-08-09 1990-02-15 Daldrop & Dr Ing Huber Gmbh & Installation for handling and treating contamination-sensitive objects, such as semiconductor parts (wafers) or similar products
DE3908329A1 (en) * 1989-03-10 1990-09-20 Siemens Ag Production apparatus in clean-room technology
DE19913628A1 (en) * 1999-03-25 2000-10-05 Siemens Ag Plant for the production of semiconductor products
DE10104555A1 (en) * 2001-02-01 2002-08-08 Krauss Maffei Kunststofftech Storage device for use in clean environments,
DE10104555B4 (en) * 2001-02-01 2007-11-08 Krauss Maffei Gmbh Storage device for use in clean environments,

Also Published As

Publication number Publication date
GB8412729D0 (en) 1984-06-27
FR2546328A1 (en) 1984-11-23
JPS59225597A (en) 1984-12-18
GB2141680A (en) 1985-01-03

Similar Documents

Publication Publication Date Title
DE3312118C1 (en) Ruecksitzanordnung
DE3304349A1 (en) Flaechenfilter
ATA46385A (en) Wimperntuscheaufbringer
DD222433A5 (en) Fluessigkeitskristallanzeige
DE3302828A1 (en) Empfangsgeraet
DE3309398A1 (en) Walzenfixiervorrichtung
DE3311579A1 (en) Waermetauscher
DE3307420A1 (en) Textilausruestungsmittel
DE3314419A1 (en) Oberfraese
DE3486439T2 (en) Dimensionsrückstellbarer object
AT377664B (en) earpads
NO843766A (en) Multiple traukar automated vaeskehaandteringsanordning
DE3306659A1 (en) Wirkkoerpereinheit
DD223566A5 (en) Farbbildroehre
ATA273284A (en) Farbfernsehwiedergabegeraet
AT381270B (en) Workpiece-manipulator
DD236671A5 (en) Nahrungsmittelaromatisierungskapseln
AT386453B (en) Moebelscharnier
ATA113484A (en) Fluessigwaschmittel
DD215448A5 (en) Maehdraescher
DD214405A5 (en) Dampfbuegelvorrichtung
ATA903584A (en) Schneeraeumgeraet
AT381994B (en) Kunststoffspreizduebel
DE3301873A1 (en) Flugkoerper
DE3312001A1 (en) Eisenbahngueterwagen

Legal Events

Date Code Title Description
8130 Withdrawal