GB8333210D0 - Robot - Google Patents
RobotInfo
- Publication number
- GB8333210D0 GB8333210D0 GB838333210A GB8333210A GB8333210D0 GB 8333210 D0 GB8333210 D0 GB 8333210D0 GB 838333210 A GB838333210 A GB 838333210A GB 8333210 A GB8333210 A GB 8333210A GB 8333210 D0 GB8333210 D0 GB 8333210D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- robot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US48793283A | 1983-04-25 | 1983-04-25 |
Publications (3)
Publication Number | Publication Date |
---|---|
GB8333210D0 true GB8333210D0 (en) | 1984-01-18 |
GB2138775A GB2138775A (en) | 1984-10-31 |
GB2138775B GB2138775B (en) | 1987-02-04 |
Family
ID=23937711
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB08333210A Expired GB2138775B (en) | 1983-04-25 | 1983-12-13 | Transferring e.g. semi-conductor wafers between carriers |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2138775B (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4568234A (en) * | 1983-05-23 | 1986-02-04 | Asq Boats, Inc. | Wafer transfer apparatus |
US4611966A (en) * | 1984-05-30 | 1986-09-16 | Johnson Lester R | Apparatus for transferring semiconductor wafers |
US4806057A (en) * | 1986-04-22 | 1989-02-21 | Motion Manufacturing, Inc. | Automatic wafer loading method and apparatus |
JPS636857A (en) * | 1986-06-26 | 1988-01-12 | Fujitsu Ltd | Wafer transfer device |
US5246528A (en) * | 1991-05-31 | 1993-09-21 | Shin-Etsu Handotai Co., Ltd. | Automatic wafer etching method and apparatus |
US5810549A (en) * | 1996-04-17 | 1998-09-22 | Applied Materials, Inc. | Independent linear dual-blade robot and method for transferring wafers |
US6890796B1 (en) | 1997-07-16 | 2005-05-10 | Oki Electric Industry Co., Ltd. | Method of manufacturing a semiconductor package having semiconductor decice mounted thereon and elongate opening through which electodes and patterns are connected |
JPH1140694A (en) | 1997-07-16 | 1999-02-12 | Oki Electric Ind Co Ltd | Semiconductor package, and semiconductor device and their manufacture |
-
1983
- 1983-12-13 GB GB08333210A patent/GB2138775B/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB2138775A (en) | 1984-10-31 |
GB2138775B (en) | 1987-02-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |