GB774270A - Method of producing bodies of metals or matalloids - Google Patents

Method of producing bodies of metals or matalloids

Info

Publication number
GB774270A
GB774270A GB35016/53A GB3501653A GB774270A GB 774270 A GB774270 A GB 774270A GB 35016/53 A GB35016/53 A GB 35016/53A GB 3501653 A GB3501653 A GB 3501653A GB 774270 A GB774270 A GB 774270A
Authority
GB
United Kingdom
Prior art keywords
molten
rod
silicon
germanium
matrix
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB35016/53A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of GB774270A publication Critical patent/GB774270A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/04Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/02Silicon
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B35/00Boron; Compounds thereof
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22BPRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B9/00General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
    • C22B9/02Refining by liquating, filtering, centrifuging, distilling, or supersonic wave action including acoustic waves
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/04Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method adding crystallising materials or reactants forming it in situ to the melt
    • C30B11/08Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method adding crystallising materials or reactants forming it in situ to the melt every component of the crystal composition being added during the crystallisation
    • C30B11/10Solid or liquid components, e.g. Verneuil method
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16Heating of the molten zone
    • C30B13/20Heating of the molten zone by induction, e.g. hot wire technique
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00Furnaces of a kind not covered by any preceding group
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/02Induction heating
    • H05B6/22Furnaces without an endless core
    • H05B6/30Arrangements for remelting or zone melting
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/20Recycling
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Acoustics & Sound (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electromagnetism (AREA)
  • General Engineering & Computer Science (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Silicon Compounds (AREA)

Abstract

In a method of producing a body of controlled purity of material consisting of a metal or a metalloid or a mixture thereof, a molten portion of such dimension that it is sustained solely by surface tension is formed on a solid matrix of the material and frozen progressively at its interface with the matrix whilst maintaining the <PICT:0774270/III/1> <PICT:0774270/III/2> size of the molten portion substantially constant by the addition of further material, which may be in the form of molten droplets or obtained by decomposing a gaseous compound or, as shown in Fig. 1 obtained by melting more solid from a rod 11 of the material by moving a molten zone 30 progressively upwards through the rod. Helium or other inert or reducing gas is passed through the chamber 16 by tubes 29 and 291, and the molten zone 30 set up at the bottom of the rod 11 and moved slowly upwards by raising the graphite heater 25 in the field of induction coil 24 by means of a rack and pinion 35, the impurities being carried to the top of the rod. Alternative apparatus effects the freezing from the molten zone by moving the rod of material slowly downwards through a fixed induction heater, while fresh material in the form of molten droplets is added to the liquid zone. Small amounts of acceptor or donor impurities may be added with silicon or germanium to form a rod of semiconductor having successive N and P type zones, and by starting with a single crystal as matrix a long single crystal may be obtained. As shown in Fig. 5, a reduction of a gaseous compound, e.g. silicon or germanium tetrachloride, by hydrogen in the reaction chamber 110 causes the semiconductor to fall on to the matrix 112 and form a molten zone there on. Hydrogen from source 126 is purified and dried at 136 and 137 and is supplied direct to the reaction chamber via valve 133 and also through retorts 114, one of which contains the semiconductor compound and the other or others compounds such as hydrides or halides of significant impurity elements e.g. members of groups 3 and 4 in the case of germanium and silicon, where it is saturated with these compounds, the retorts 114 being each associated with condensers 121 maintained at the required temperatures by heaters 118 and thermostats 120. The reduction is effected by raising the temperature in the chamber 110 to 1000-1100 DEG C. for germanium or 1100-1600 DEG C. for silicon. Alternatively the gas mixtures may be decomposed by passing them through hollow bores in electrodes to an electric arc, a transverse jet of hydrogen being used to control the arc position in order to produce a molten zone of the required dimensions on the matrix. In addition to the production, refining and growing of single crystals of silicon and germanium, the invention may be applied to other metalloids such as boron, gray tin. selenium and tellurium, and to the redistribution of impurities and growth of single crystals of copper and iron, and other metals. Redistribution of impurities may be effected by the multiple-pass processes and reverse-pass processes described in Specification 769,673. The growth of single crystals from a seed crystal is preferably effected at growth rates of 1/32 "-\ba1/4 " per minute, and in the case of growth by adding molten droplets to the molten zone the crystal may be rotated to obtain more uniform growth. Specification 723,179 also is referred to.
GB35016/53A 1952-12-17 1953-12-16 Method of producing bodies of metals or matalloids Expired GB774270A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US333693XA 1952-12-17 1952-12-17

Publications (1)

Publication Number Publication Date
GB774270A true GB774270A (en) 1957-05-08

Family

ID=21870028

Family Applications (1)

Application Number Title Priority Date Filing Date
GB35016/53A Expired GB774270A (en) 1952-12-17 1953-12-16 Method of producing bodies of metals or matalloids

Country Status (6)

Country Link
BE (1) BE525102A (en)
CH (1) CH333693A (en)
DE (1) DE1014332B (en)
FR (1) FR1087946A (en)
GB (1) GB774270A (en)
NL (1) NL89230C (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3053639A (en) * 1959-02-11 1962-09-11 Union Carbide Corp Method and apparatus for growing crystals
US3086850A (en) * 1959-06-17 1963-04-23 Itt Method and means for growing and treating crystals
US3093456A (en) * 1958-09-02 1963-06-11 Texas Instruments Inc Method for recovery and reuse of quartz containers
US3115469A (en) * 1959-06-22 1963-12-24 Monsanto Chemicals Production of single crystals of ferrites
US3156533A (en) * 1960-07-26 1964-11-10 Imber Oscar Crystal growth apparatus
US3185551A (en) * 1959-06-05 1965-05-25 Ind De Pierres Scient Hrand Dj Process for manufacturing a tubular body made of synthetic material, and installation for carrying out this process
US3191924A (en) * 1959-12-31 1965-06-29 Siemens Ag Device for mounting semiconductor rods in apparatus for crucible-free zone melting
US3205046A (en) * 1959-06-05 1965-09-07 Ind De Pierres Scient Hrand Dj Rotary arbor for making synthetic stone
US3224844A (en) * 1961-03-01 1965-12-21 Philips Corp Zone-melting method for metal compounds
US3245761A (en) * 1962-10-11 1966-04-12 Norton Co Apparatus for making magnesium oxide crystals
US3314769A (en) * 1963-05-08 1967-04-18 Union Carbide Corp Arc process and apparatus for growing crystals
US4379733A (en) * 1981-10-02 1983-04-12 Hughes Aircraft Company Bicameral mode crystal growth apparatus and process
CN115198356A (en) * 2022-07-15 2022-10-18 郑州大学 Large-size metal single crystal with specific orientation and preparation method thereof

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1061527B (en) * 1953-02-14 1959-07-16 Siemens Ag Process for zone-wise remelting of rods and other elongated workpieces
NL258754A (en) * 1954-05-18 1900-01-01
US2964396A (en) * 1954-05-24 1960-12-13 Siemens Ag Producing semiconductor substances of highest purity
DE1017795B (en) * 1954-05-25 1957-10-17 Siemens Ag Process for the production of the purest crystalline substances, preferably semiconductor substances
DE1253235B (en) * 1954-05-25 1967-11-02 Siemens Ag Process for producing rod-shaped semiconductor crystals
DE1179382B (en) * 1954-06-30 1964-10-08 Siemens Ag Process for producing an extremely pure, rod-shaped semiconductor crystal for the production of electrical semiconductor components such as directional conductors, transistors, etc.
DE1201073B (en) * 1954-07-30 1965-09-16 Siemens Ag Process for producing a semiconducting alloy
NL203438A (en) * 1955-01-14
FR109723A (en) * 1955-01-14
DE1196046B (en) * 1955-03-28 1965-07-01 Siemens Ag Process for producing a highly pure, crystalline rod from a conductive or semiconductive element
DE1141255B (en) * 1958-03-05 1962-12-20 Siemens Ag Process for producing highly purified single-crystalline semiconductor rods
US2835614A (en) * 1955-11-30 1958-05-20 Raulaud Corp Method of manufacturing crystalline material
DE1063870B (en) * 1956-06-28 1959-08-20 Gustav Weissenberg Method and device for crucible-free growing of single crystals from high-purity silicon or germanium
DE1136308B (en) * 1956-10-17 1962-09-13 Siemens Ag Process for the production of crystal rods from highly pure semiconducting materials
DE1181668B (en) * 1956-10-17 1964-11-19 Siemens Ag Method for producing high-purity, rod-shaped semiconductor crystals by depositing the semiconductor from a gaseous compound of the semiconductor by means of an electrical gas discharge
BE562704A (en) * 1956-11-28
DE1207922B (en) * 1957-04-30 1965-12-30 Standard Elektrik Lorenz Ag Process for producing high-purity semiconductor substances, in particular silicon
DE1169683B (en) * 1957-05-31 1964-05-06 Siemens Ag Method for crucible-free zone melting of a semiconductor rod
DE1076623B (en) * 1957-11-15 1960-03-03 Siemens Ag Device for crucible-free zone drawing of rod-shaped semiconductor material
DE1092576B (en) * 1957-11-15 1960-11-10 Siemens Ag Power supply for the movable heating coil of a crucible-free zone pulling device inside a vessel
NL234451A (en) * 1957-12-27
NL235481A (en) * 1958-02-19
NL237618A (en) * 1958-04-03
BE581195A (en) * 1958-07-30
DE1216040B (en) * 1958-09-12 1966-05-05 Eternit Sa Female connector for smooth insert pipes
NL250835A (en) * 1959-04-30
DE1128412B (en) * 1959-12-17 1962-04-26 Metallgesellschaft Ag Process for the production of hyperpure silicon by the thermal decomposition of gaseous silicon compounds
NL133150C (en) * 1959-12-23
NL262164A (en) * 1960-03-11
DE1216257B (en) * 1960-08-18 1966-05-12 Kempten Elektroschmelz Gmbh Process for the production of single crystals
US3232745A (en) * 1960-12-05 1966-02-01 Siemens Ag Producing rod-shaped semiconductor crystals
NL275885A (en) * 1961-03-14
FR1315934A (en) * 1961-12-15 1963-01-25 Radiotechnique Horizontal apparatus for purification and extraction of semiconductor crystals
DE1182207B (en) * 1962-07-20 1964-11-26 Siemens Ag Method for producing a low-dislocation semiconductor single crystal by crucible-free zone melting
DE1284942B (en) * 1964-06-30 1968-12-12 Halbleiterwerk Frankfurt Oder Device for the thermal treatment of crystals and melts, in particular made of semiconductor material
CN113337725A (en) * 2021-06-29 2021-09-03 红河学院 Method for enriching germanium from smelting slag

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3093456A (en) * 1958-09-02 1963-06-11 Texas Instruments Inc Method for recovery and reuse of quartz containers
US3053639A (en) * 1959-02-11 1962-09-11 Union Carbide Corp Method and apparatus for growing crystals
US3205046A (en) * 1959-06-05 1965-09-07 Ind De Pierres Scient Hrand Dj Rotary arbor for making synthetic stone
US3185551A (en) * 1959-06-05 1965-05-25 Ind De Pierres Scient Hrand Dj Process for manufacturing a tubular body made of synthetic material, and installation for carrying out this process
US3086850A (en) * 1959-06-17 1963-04-23 Itt Method and means for growing and treating crystals
US3115469A (en) * 1959-06-22 1963-12-24 Monsanto Chemicals Production of single crystals of ferrites
US3191924A (en) * 1959-12-31 1965-06-29 Siemens Ag Device for mounting semiconductor rods in apparatus for crucible-free zone melting
US3156533A (en) * 1960-07-26 1964-11-10 Imber Oscar Crystal growth apparatus
US3224844A (en) * 1961-03-01 1965-12-21 Philips Corp Zone-melting method for metal compounds
US3245761A (en) * 1962-10-11 1966-04-12 Norton Co Apparatus for making magnesium oxide crystals
US3314769A (en) * 1963-05-08 1967-04-18 Union Carbide Corp Arc process and apparatus for growing crystals
US4379733A (en) * 1981-10-02 1983-04-12 Hughes Aircraft Company Bicameral mode crystal growth apparatus and process
CN115198356A (en) * 2022-07-15 2022-10-18 郑州大学 Large-size metal single crystal with specific orientation and preparation method thereof

Also Published As

Publication number Publication date
NL89230C (en) 1900-01-01
BE525102A (en) 1900-01-01
CH333693A (en) 1958-10-31
FR1087946A (en) 1955-03-01
DE1014332B (en) 1957-08-22

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