GB701110A - An optical system for use in the examination of opaque objects by interferometry - Google Patents

An optical system for use in the examination of opaque objects by interferometry

Info

Publication number
GB701110A
GB701110A GB2869350A GB2869350A GB701110A GB 701110 A GB701110 A GB 701110A GB 2869350 A GB2869350 A GB 2869350A GB 2869350 A GB2869350 A GB 2869350A GB 701110 A GB701110 A GB 701110A
Authority
GB
United Kingdom
Prior art keywords
reflected
reflecting
plate
reflecting surface
focused
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2869350A
Inventor
James Dyson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Associated Electrical Industries Ltd
Original Assignee
Associated Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Associated Electrical Industries Ltd filed Critical Associated Electrical Industries Ltd
Priority to GB2869350A priority Critical patent/GB701110A/en
Publication of GB701110A publication Critical patent/GB701110A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02041Interferometers characterised by particular imaging or detection techniques
    • G01B9/02042Confocal imaging
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056Passive reduction of errors
    • G01B9/02057Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microscoopes, Condenser (AREA)
  • Lenses (AREA)

Abstract

701,110. Microscopes. ASSOCIATED ELECTRICAL INDUSTRIES, Ltd. Nov. 16, 1951 [Nov. 23, 1950; Feb. 9, 1951], Nos. 28693/50 and 3242/51. Class 97(1) A system for use between a microscope objective and the object comprises an axial alignment from the objective or plane surface totally reflecting towards the object, a plane semi-reflecting surface and a curved reflecting surface with a central aperture, an illuminating beam being reflected by the curved surface to the semi-reflecting surface by which it is divided into two portions, a reflected portion which passes through the said central aperture and is reflected by the object to be combined with the second transmitted portion reflected back by the totally reflecting plane surface, interference effects being visible in the combined beams. As shown in Fig. 1 accompanying first Provisional Specification the system comprises a plane-parallel glass plate 1 having a semi-reflecting surface 2 and a fully reflecting area 3 on the other surface. A glass plate 6, placed upon the plate 1 with an oil layer intervening has a small mirror 7 reflecting a divergent beam 8 on to the fully reflecting curved surface of a plano-convex lens 4 cemented to the plate 2 and connected by an oil layer to the opaque object 5. This light is reflected upwardly by the reflecting surface of the lens and part is focused thereby on the reflecting area 3 while part is reflected by the semi-reflecting surface 2 to be focused upon the object through a central aperture in the reflecting surface of the lens 4. Light reflected from the area 3 is again partly reflected by the surface 2 to form a beam which can interfere with that reflected by the object 5. These beams are diverted upwardly to a transparent plate 9 to be reflected downwardly by a spherical reflecting surface 10 thereof on to a further semi-transparent reflecting surface 11 whence they are again reflected to form an image of the object at a central aperture on the reflecting surface 10 which image is viewed by means of the microscope objective 12. The interfering effects may be varied by changing the spacing of the object and plate 1. In a modification the plate 6 is omitted and the plate 1 has a side edge in, the shape of the frustum of a sphere through which a convergent beam of light is diverted to be reflected upwardly on to the semireflecting surface 2 by a convex mirror carried by a plate located between the plate 1 and the object 5 and having a central aperture through which the latter is illuminated. Further where an objective having a long working distance is employed the plate 9 may be omitted. In the modification shown in the drawing accompanying the complete Specification the semi-reflecting surface 2 is located between two glass members 1, 4 each having a fully reflecting curved surface, the reflecting surface 17 of member 1 having a plane central area carrying the total reflecting area 3 and having' a glass block 19 cemented thereto. Illumination is reflected by a mirror 23 into the objective 12 by a beam 25 focused on mirror 23, and is directed through the objective 12 into plate 19. Part is focused on the reflector 3 by the lower reflecting surface and part focused on the. object 5 after reflection at the surface 2. Light reflected by the reflector 3 passes through the surface 2 and is focused by the lower reflector on the point 20 at which also an image of the object is formed by light reflected thereby and by the surface 2. The image is viewed in the microscope. An image of the surface 5 is formed at the point 21 by the reflecting surface 17 and the semi-reflector 2, and an image of this image is focused by the objective 12 at the mirror 23. Thus the object is properly illuminated by the beam 25. In a further modification the member 1 is replaced by a plane parallel glass plate bearing the reflector 3, and an ordinary vertical illuminator employed in the microscope. Specifications 651,035 and 676,749 are referred to.
GB2869350A 1950-11-23 1950-11-23 An optical system for use in the examination of opaque objects by interferometry Expired GB701110A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB2869350A GB701110A (en) 1950-11-23 1950-11-23 An optical system for use in the examination of opaque objects by interferometry

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2869350A GB701110A (en) 1950-11-23 1950-11-23 An optical system for use in the examination of opaque objects by interferometry

Publications (1)

Publication Number Publication Date
GB701110A true GB701110A (en) 1953-12-16

Family

ID=10279601

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2869350A Expired GB701110A (en) 1950-11-23 1950-11-23 An optical system for use in the examination of opaque objects by interferometry

Country Status (1)

Country Link
GB (1) GB701110A (en)

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