GB2558418A - A heat sink comprising synthetic diamond material - Google Patents

A heat sink comprising synthetic diamond material Download PDF

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Publication number
GB2558418A
GB2558418A GB1720962.8A GB201720962A GB2558418A GB 2558418 A GB2558418 A GB 2558418A GB 201720962 A GB201720962 A GB 201720962A GB 2558418 A GB2558418 A GB 2558418A
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heat
heat spreader
ribs
heat sink
rear surface
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GB2558418B (en
GB201720962D0 (en
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Michael Dodson Joseph
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Element Six Technologies Ltd
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Element Six Technologies Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/024Arrangements for thermal management
    • H01S5/02476Heat spreaders, i.e. improving heat flow between laser chip and heat dissipating elements
    • H01S5/02484Sapphire or diamond heat spreaders
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3732Diamonds
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F21/00Constructions of heat-exchange apparatus characterised by the selection of particular materials
    • F28F21/02Constructions of heat-exchange apparatus characterised by the selection of particular materials of carbon, e.g. graphite
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/08Mirrors
    • G02B5/0808Mirrors having a single reflecting layer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/04Arrangements for thermal management
    • H01S3/0405Conductive cooling, e.g. by heat sinks or thermo-electric elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/04Arrangements for thermal management
    • H01S3/0407Liquid cooling, e.g. by water
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/0602Crystal lasers or glass lasers
    • H01S3/0604Crystal lasers or glass lasers in the form of a plate or disc
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/0206Substrates, e.g. growth, shape, material, removal or bonding
    • H01S5/0215Bonding to the substrate
    • H01S5/0216Bonding to the substrate using an intermediate compound, e.g. a glue or solder
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/024Arrangements for thermal management
    • H01S5/02407Active cooling, e.g. the laser temperature is controlled by a thermo-electric cooler or water cooling
    • H01S5/02423Liquid cooling, e.g. a liquid cools a mount of the laser
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2039Modifications to facilitate cooling, ventilating, or heating characterised by the heat transfer by conduction from the heat generating element to a dissipating body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3733Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon having a heterogeneous or anisotropic structure, e.g. powder or fibres in a matrix, wire mesh, porous structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/04Arrangements for thermal management
    • H01S3/042Arrangements for thermal management for solid state lasers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/20218Modifications to facilitate cooling, ventilating, or heating using a liquid coolant without phase change in electronic enclosures
    • H05K7/20254Cold plates transferring heat from heat source to coolant
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S165/00Heat exchange
    • Y10S165/905Materials of manufacture

Abstract

A heat sink including: a heat spreader 2 with a front surface for mounting one or more components to be cooled and a rear surface for direct fluid cooling; and a plurality of ribs 4 bonded to the rear surface to stiffen the heat spreader; wherein both the heat spreader and ribs are formed of synthetic diamond material. The ribs may be bonded by braze bonds 6. The front surface of the heat spreader may have a convex or concave curvature and a reflective coating. The ribs may be arranged in an axially symmetric pattern (figure 1a) over the rear surface of the heat spreader to provide axially symmetric flexural stiffness. There is also an assembly including the heat sink, a heat generating component 8 and a fluid cooling system 10. The component may be a laser disc or a reflecting structure.

Description

(71) Applicant(s):
Element Six Technologies Limited Global Innovation Centre, Harwell Campus, Fermi Avenue, DIDCOT, Oxfordshire, OX11 0QR, United Kingdom (56) Documents Cited:
EP 1035578 A1 WO 2011/091430 A1 CN 105305206 A US 20030183368 A1
WO 2018/067204 A1 WO 2001/069676 A2 FR 002827079 A1 (58) Field of Search:
INT CLH01L, H01S, H05K
Other: WPI, EPODOC, Patent Fulltext (72) Inventor(s):
Joseph Michael Dodson (74) Agent and/or Address for Service:
Element Six Limited
Global Innovation Centre, Fermi Avenue,
Harwell Campus, DIDCOT, Oxfordshire, ΟΧ11 0QR, United Kingdom (54) Title ofthe Invention: A heat sink comprising synthetic diamond material
Abstract Title: A heat sink including ribs bonded to a heat spreader where both are formed of synthetic diamond (57) A heat sink including: a heat spreader 2 with a front surface for mounting one or more components to be cooled and a rear surface for direct fluid cooling; and a plurality of ribs 4 bonded to the rear surface to stiffen the heat spreader; wherein both the heat spreader and ribs are formed of synthetic diamond material. The ribs may be bonded by braze bonds 6. The front surface of the heat spreader may have a convex or concave curvature and a reflective coating. The ribs may be arranged in an axially symmetric pattern (figure 1a) over the rear surface ofthe heat spreader to provide axially symmetric flexural stiffness. There is also an assembly including the heat sink, a heat generating component 8 and a fluid cooling system 10. The component may be a laser disc or a reflecting structure.
Figure GB2558418A_D0001
At least one drawing originally filed was informal and the print reproduced here is taken from a later filed formal copy.
PF1389-GB-2
1/2
01 18
Figure GB2558418A_D0002
Fig. 1(b)
PF1389-GB-2
2/2
01 18
Figure GB2558418A_D0003
Figure GB2558418A_D0004
Fig. 3
A HEAT SINK COMPRISING SYNTHETIC DIAMOND MATERIAL
Field of Invention
The present invention relates to a heat sink comprising synthetic diamond material, and to a heat sink assembly comprising a heat sink.
Background of Invention
Heat sinks comprising synthetic diamond material are known in the art. Synthetic diamond materials are advantageous for use in heat sinks because of their extremely high thermal conductivity allowing efficient spreading of heat from hot spots and efficient transfer of heat from a heat generating component to a fluid coolant. Synthetic diamond materials are also advantageous in such applications because of their low thermal expansion coefficient and high rigidity thus having mechanical and geometric stability with low thermal deformation even when exposed to large temperature variations. This combination of features is particularly useful in optical applications such as laser systems which require precise geometry as well as efficient thermal performance. In such systems, optical components such as a laserdiscs and mirrors generate high temperatures and thus require efficient cooling while also maintaining a precise optical geometry to maintain performance. An example of a solid state laser system comprising a diamond heat sink is described in US2015/0171586. Similar criteria also apply for high power semiconductor applications.
While synthetic diamond heat sinks have enabled the development of higher power optical and semiconductor systems, next generation systems are pushing the limits of current synthetic diamond heat sinks in terms of thermal performance and mechanical stability.
It is an aim of embodiments of the present invention to provide a cost effective solution to the provision of heat sinks which have improved stiffness and improved heat transfer performance.
Summary of Invention
As described in the background section, heat sinks need to be non-distorting under thermal and cooling loads. This means that heat sinks need to be stiff and have good thermal transfer into a fluid coolant.
Stiffness of a synthetic diamond heat sink can be increased by either growing a thicker plate of synthetic diamond material or otherwise bonding two or more plates of synthetic diamond material together via their major faces. Both these solutions have the disadvantage of significantly increasing cost, as a large volume of diamond material is required. Furthermore, growing very thick plates of synthetic diamond material is difficult and there is an upper limit to the thickness of a singular synthetic diamond plate which can be grown. Further still, bonding of two or more plates of diamond together via their major faces results in a significant volume of adhesive which introduces a thermal barrier within the diamond component and reduces mechanical stability under thermal loading. Efficiency of heat transfer from the heat generating component to the fluid coolant is reduced.
Efficiency of heat transfer from the heat generating component to the fluid coolant can be increased by machining grooves or other surface features on a rear fluid cooled surface of the synthetic diamond heat sink. US 2003/0183368 describes a diamond heat sink in which fins are laser cut into a diamond substrate thereby allowing greater heat transfer from the fins. However, this approach is only practical where stiffness of the component is not a primary consideration, because cutting fins into diamond significantly decreases overall stiffness of the heat sink component. Such a component is more likely to distort when exposed to temperature variations and so is not suitable for optical applications such as laser systems.
According to a first aspect of the present invention there is provided a heat sink comprising: a heat spreader having a front surface for mounting one or more components to be cooled and a rear surface for direct fluid cooling; and a plurality of ribs bonded to the rear surface of the heat spreader to stiffen the heat spreader, wherein both the heat spreader and the plurality of ribs are formed of synthetic diamond material.
According to a second aspect of the present invention there is provided a heat sink assembly comprising:
a synthetic diamond heat sink according to the first aspect of the invention comprising a heat spreader having a front surface and a rear and a plurality of ribs bonded to the rear surface of the heat spreader to stiffen the heat spreader;
a heat generating component bonded to the front surface of the heat spreader; and a fluid cooling system configured to deliver fluid to the rear surface of the heat spreader.
The present invention is particularly suited to free standing synthetic diamond heat sinks which are directly fluid cooled rather than mounted on a solid support substrate which is itself fluid cooled. The provision of a plurality of synthetic diamond ribs on a rear surface of a synthetic diamond heat spreader improves stiffness of the heat spreader and improves heat transfer from the heat spreader into a fluid coolant. Furthermore, less diamond is required compared to the provision of a single thick plate of synthetic diamond material or multiple thinner plates of synthetic diamond material bonded together thereby reducing cost. Further still, as the bonding area is reduced using ribs when compared with a solution in which two or more plates of synthetic diamond are bonded via major faces, problems of thermal barrier resistance and thermal stability are reduced.
Forming both the heat spreader and the plurality of ribs from synthetic diamond material provides the best combination of thermal conductivity, stiffness, and thermal expansion coefficient matching between the ribs and the heat spreader.
As an option, the ribs are bonded to the rear surface by braze bonds.
The heat spreader optionally has a thickness in a range of 0.8 mm to 4.5 mm, and the ribs optionally have a thickness in the same range.
In order to ensure a good contact between the rear surface and the ribs, the rear surface of the heat spreader optionally has a flatness of less than 10 pm at least over the regions where the ribs are bonded. The flatness may optionally be less than 2 pm. Optionally, each rib has an interface surface bonded to the rear surface of the heat spreader, the interface surface having a flatness of less than 10 pm or less than 2 pm.
The front surface of the heat spreader optionally has a convex or concave curvature at least over a portion of the front surface.
The front surface of the heat spreader optionally includes a reflective coating over all or part of the front surface.
The plurality of ribs are optionally disposed on the rear surface of the heat spreader in an axially symmetric pattern, in order to ensure that the stiffness of the component is uniform in any axial direction.
Embodiments of the present invention including further optional and preferred features are described in the detailed description.
Brief Description of the Drawings
For a better understanding of the present invention and to show how the same may be carried into effect, embodiments of the present invention will now be described by way of example only with reference to the accompanying drawings, in which:
Figures 1(a) and 1(b) show schematic illustrations of a heat sink according to an embodiment of the invention;
Figure 2 shows a schematic illustration of a heat sink according to another embodiment of the invention; and
Figure 3 shows a schematic illustration of a heat sink assembly comprising a heat generating component, a heat sink, and a fluid cooling system.
Detailed Description
As described in the summary of invention section, one aspect of the present invention is concerned with the fabrication of a heat sink comprising:
a heat spreader having a front surface for mounting one or more components to be cooled and a rear surface for direct fluid cooling; and a plurality of ribs bonded to the rear surface of the heat spreader to stiffen the heat spreader, wherein both of the heat spreader and the plurality of ribs are formed of synthetic diamond material.
To fabricate such a heat sink, the rear surface of the heat spreader can be processed to a flatness of less than 10 micrometres, preferably less than 2 micrometres, at least over regions to be bonded to the ribs. Each rib has an interface surface to be bonded to the rear surface of the heat spreader. These interface surfaces can also be processed to a flatness of less than 10 micrometres, preferably less than 2 micrometres. The plurality of ribs can then be bonded to the rear surface of the heat spreader by, for example, braze bonds or metal diffusion bonds. For example, an active carbide forming braze bond can be utilized such as those containing titanium or an alternative carbide forming component for bonding to diamond. High temperature braze bonds can be utilized as there is no thermal expansion coefficient mismatch if synthetic diamond is utilized for both the heat spreader and ribs.
The heat spreader may have a thickness in a range 0.8 mm to 4.5 mm. Generally embodiments of the present invention will be applicable where relatively thick, stiff heat sinks are required but where cost or synthesis capability prohibits greater thicknesses. The ribs may also have a thickness in a range 0.8 mm to 4.5 mm. The ribs will generally have a thickness which does not significantly exceed that of the heat spreader to avoid the requirement to grown thicker pieces of diamond material which is challenging and expensive. Advantageously, the heat spreader and the ribs will have the same thickness and can thus be grown using the same synthesis process. Alternatively, each rib may comprise more than one layer of diamond material bonded together, e.g. via braze bonds. It is currently challenging to produce heat spreaders in a cost-effective manner with a high thickness (for example, over around 4.5 mm). Bonding ribs to a heat spreader gives the heat spreader a stiffness that is much greater than that of a heat spreader without ribs, and therefore makes the heat spreader suitable for higher power optical and semiconductor systems.
As the lateral dimension of the ribs is significantly smaller than that of the heat spreader, more efficient use of the diamond material is achieved while retaining the desired rigidity. The lateral dimension of the ribs should be sufficiently large as to provide sufficient braze area and bonding strength. Furthermore, the spacing of the ribs should be sufficiently small to achieve the desired level of stiffness under thermal and cooling loads. For example, the spacing between the ribs may be approximately the same as the thickness of the heat spreader. For certain applications it is advantageous for the plurality of ribs to be configured in an axially symmetric pattern over the rear surface of the heat spreader. For example, this is advantageous in many optical applications so any optical distortions within, for example, a laser cavity are symmetric, and the flexural strength of the heat spreader is substantially uniform regardless of the axial direction in which it is measured.
The front surface of the heat spreader may be processed to have a convex or concave curvature at least over a portion of the front surface. For example, a concave curvature may be provided for provision of a concave mirror component. Alternatively, a slightly convex curvature can be advantageous to ensure a good contact when bonded to an overlying component. The front surface of the heat spreader may also comprise a reflective coating for many optical applications.
Figures 1(a) and 1(b) show schematic illustrations of a heat sink according to an embodiment of the invention. The heat sink comprises a synthetic diamond heat spreader 2 with synthetic diamond ribs 4 bonded to a rear surface of the synthetic diamond heat spreader as shown in plan view in Figure 1(a). Figure 1(b) shows a cross-sectional view of the heat sink showing the ribs 4 bonded to the heat spreader 2 via braze bonds 6.
The embodiment illustrated in Figures 1(a) and 1(b) comprises six ribs in a radial distribution akin to spokes of a wheel. Figure 2 shows a schematic illustration of a heat sink according to another embodiment of the invention. This embodiment also comprises a synthetic diamond heat spreader 2 with ribs bonded to a rear surface thereof via braze bond. Here, rather than using elongate ribs a plurality of smaller (shorter) pieces of synthetic diamond material 7 are distributed to form each major supporting rib. Such a configuration can be fabricated using off-cuts of diamond, e.g. from the process used to fabricate the heat spreader, which would otherwise be discarded. As such, this approach can utilize a larger fraction of diamond material, reducing waste and decreasing fabrication costs.
A heat sink assembly can be constructed using the heat sink configuration as described herein. Figure 3 shows a schematic illustration of an example of such a heat sink assembly. The heat sink assembly comprises a heat sink as described herein comprising a heat spreader 2 having a front surface and a rear and a plurality of ribs 4 bonded to the rear surface of the heat spreader via braze bonds 6 to stiffen the heat spreader 2. A heat generating component 8 is bonded to the front surface of the heat spreader. For example, the heat generating component 8 can be a laser disc comprising a laser-active medium or a reflecting structure (i.e. a mirror). A fluid cooling system 10 is configured to deliver fluid to the rear surface of the heat spreader.
While preferably both the heat spreader and the plurality of ribs are each formed of monolithic synthetic diamond material to provide the best combination of thermal conductivity, stiffness, and thermal expansion coefficient matching between the ribs and the heat spreader, it is also envisaged that some benefits can be achieved by applying synthetic diamond stiffening ribs to a heat spreader formed of a different material. Alternatively, it is also envisaged that some benefits can be achieved by applying non-diamond stiffening ribs to a synthetic diamond heat spreader to stiffen the heat spreader if, for example, the synthetic diamond heat spreader is relatively thin. Alternative materials may include sapphire and zinc selenide. For example, a sapphire or zinc selenide substrate may be stiffened using diamond ribs.
The term “stiffness” is used herein to refer to the resistance of a component to deflection under a given load. Stiffness of a component depends not only on the Young’s Modulus of the component material, but also on how the component is loaded, and the dimensions and shape of the component. For the purposes of a heat spreader used in a high power optical or semiconductor application, the flexural stiffness is important. A heat spreader with a plurality of ribs bonded to it is stiffer than a heat spreader with no ribs bonded to it.
The primary purpose of the ribs is to stiffen the heat spreader, although they also have the additional purpose of increasing the surface area to spread heat. However, the fins of a conventional heat spreader are designed to maximize the surface area to volume ratio in order to greatly increase the overall surface area and so maximize the heat spreading. In the present application, the ribs are required for stiffening, and so maximizing the surface area to volume ratio of the ribs would reduce the amount of stiffening required. The ribs therefore increase the overall surface of the rear surface of the heat spreader by no more than 100%, by no more than 75% by no more than 50% or by no more than 30%.
By way of example, Figure 1a shows a heat spreader 2 with a rear surface having a diameter of 90 mm, leading to a surface area of 6362 mm2. Six ribs 4 are brazed to the rear surface. Each rib has dimensions of 27 x 5 x 4.5 mm. The total exposed surface area of each ribs 4 is 423 mm2, leading to an additional surface area for six ribs of 2538 mm2. The increase in surface area is therefore less than 40%.
Using the further example of Figure 2, a heat spreader 2 is shown with a rear surface having a diameter of 90 mm, leading to a surface area of 6363 mm2. Twelve ribs 7 are brazed to the rear surface. Each rib has dimensions of 7 x 5 x 4.5 mm. The total exposed area of each ribs 7 is 143 mm2, leading to an additional surface area for six ribs of 1716 mm2. The increase in surface area is therefore less than 27%. By using ribs with a lower surface area to volume ratio than heat spreading fins have, the stiffening effect of the ribs is maximized.
While this invention has been particularly shown and described with reference to embodiments, it will be understood to those skilled in the art that various changes in form and detail may be made without departing from the scope of the invention as defined by the appended claims.

Claims (15)

  1. Claims
    1. A heat sink comprising:
    a heat spreader having a front surface for mounting one or more components to be cooled and a rear surface for direct fluid cooling; and a plurality of ribs bonded to the rear surface of the heat spreader to stiffen the heat spreader, wherein both the heat spreader and the plurality of ribs are formed of synthetic diamond material.
  2. 2. A heat sink according to claim 1, wherein the plurality of ribs are bonded to the rear surface of the heat spreader by braze bonds.
  3. 3. A heat sink according to claim 1 or 2, wherein the heat spreader has a thickness in a range 0.8 mm to 4.5 mm.
  4. 4. A heat sink according to any one of claims 1 to 3, wherein the plurality of ribs each have a thickness in a range 0.8 mm to 4.5 mm.
  5. 5. A heat sink according to any one of claims 1 to 4, wherein the rear surface of the heat spreader has a flatness of less than 10 micrometres at least over regions bonded to the ribs.
  6. 6. A heat sink according to claim 5, wherein the flatness of the rear surface of the heat spreader is less than 2 micrometres at least over regions bonded to the ribs.
  7. 7. A heat sink according to any one of claims 1 to 6, wherein each rib has an interface surface bonded to the rear surface of the heat spreader, the interface surface having a flatness of less than 10 micrometres.
  8. 8. A heat sink according to claim 7, wherein the flatness of the interface surface of each rib is less than 2 micrometres.
  9. 9. A heat sink according to any one of claims 1 to 8, wherein the front surface of the heat spreader has a convex or concave curvature at least over a portion of the front surface.
  10. 10. A heat sink according to any one of claims 1 to 9,
    5 wherein the front surface of the heat spreader comprises a reflective coating.
  11. 11. A heat sink according to any one of claims 1 to 10, wherein the plurality of ribs are configured in an axially symmetric pattern over the rear surface of the heat spreader.
    io
  12. 12. A heat sink according to claim 11, wherein the axially symmetric pattern of ribs over the rear surface of the heat spreader is configured to provide axially symmetric flexural stiffness to the heat sink.
    15
  13. 13. A heat sink assembly comprising:
    a heat sink according to any one of claims 1 to 12, comprising a heat spreader having a front surface and a rear and a plurality of ribs bonded to the rear surface of the heat spreader to stiffen the heat spreader;
    a heat generating component bonded to the front surface of the heat spreader; and 20 a fluid cooling system configured to deliver fluid to the rear surface of the heat spreader.
  14. 14. A heat sink assembly according to claim 13, wherein the heat generating component is a laser disc comprising a laser-active 25 medium.
  15. 15. A heat sink assembly according to claim 13, wherein the heat generating component is a reflecting structure.
    Intellectual
    Property
    Office
    Application No: GB1720962.8 Examiner: Guy Cooper
GB1720962.8A 2016-12-20 2017-12-15 A heat sink comprising synthetic diamond material Expired - Fee Related GB2558418B (en)

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GBGB1621690.5A GB201621690D0 (en) 2016-12-20 2016-12-20 A heat sink comprising synthetic diamond material

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GB2558418A true GB2558418A (en) 2018-07-11
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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112469239A (en) * 2020-10-23 2021-03-09 广东工业大学 Large-size diamond cooling fin and preparation method thereof
CN112467508B (en) * 2021-01-28 2021-06-08 四川光天下激光科技有限公司 Narrow pulse width laser

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1035578A1 (en) * 1993-06-14 2000-09-13 Sumitomo Electric Industries, Ltd. Process for the production of a finned diamond heatsink
WO2001069676A2 (en) * 2000-03-13 2001-09-20 Sun Microsystems, Inc. Method and apparatus for bonding substrates
FR2827079A1 (en) * 2001-07-04 2003-01-10 Alstom Production of diamond substrate comprises use of silicon slice as support for chemical vapor deposition of diamond and elimination of silicon slice by chemical attack
US20030183368A1 (en) * 2002-04-02 2003-10-02 Paradis Leo Richard Diamond heat sink
WO2011091430A1 (en) * 2010-01-25 2011-07-28 Lawrence Livermore National Security, Llc Laser diode package with enhanced cooling
CN105305206A (en) * 2015-11-03 2016-02-03 华中科技大学 Heat sink suitable for disc laser jet flow impingement cooling system
WO2018067204A1 (en) * 2016-10-05 2018-04-12 Raytheon Company Transparent heat exchanger

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4715438A (en) 1986-06-30 1987-12-29 Unisys Corporation Staggered radial-fin heat sink device for integrated circuit package
DE69531390T2 (en) * 1994-11-30 2004-05-27 Sumitomo Electric Industries, Ltd. Substrate, semiconductor device, assembly for element mounting
DE19514548C1 (en) 1995-04-20 1996-10-02 Daimler Benz Ag Method of manufacturing a micro cooler
US5745344A (en) * 1995-11-06 1998-04-28 International Business Machines Corporation Heat dissipation apparatus and method for attaching a heat dissipation apparatus to an electronic device
US20020023733A1 (en) * 1999-12-13 2002-02-28 Hall David R. High-pressure high-temperature polycrystalline diamond heat spreader
DE10011892A1 (en) * 2000-03-03 2001-09-20 Jenoptik Jena Gmbh Mounting substrate and heat sink for high-performance diode laser bars
DE10038006A1 (en) * 2000-08-04 2002-02-21 Haas Laser Gmbh & Co Kg Laser amplifier arrangement
US6390181B1 (en) 2000-10-04 2002-05-21 David R. Hall Densely finned tungsten carbide and polycrystalline diamond cooling module
JP3982284B2 (en) * 2002-03-06 2007-09-26 住友電気工業株式会社 Submount and semiconductor device
US7173334B2 (en) * 2002-10-11 2007-02-06 Chien-Min Sung Diamond composite heat spreader and associated methods
CN100449889C (en) * 2002-12-26 2009-01-07 索尼株式会社 Semiconductor laser assembly
US20050070048A1 (en) * 2003-09-25 2005-03-31 Tolchinsky Peter G. Devices and methods employing high thermal conductivity heat dissipation substrates
US7585663B2 (en) * 2004-08-26 2009-09-08 Applied Biosystems, Llc Thermal device, system, and method, for fluid processing device
US7550841B2 (en) 2006-03-23 2009-06-23 Intel Corporation Methods of forming a diamond micro-channel structure and resulting devices
US8243766B2 (en) * 2007-09-21 2012-08-14 Michael Huff Means for improved implementation of laser diodes and laser diode arrays
CN101614325B (en) * 2008-06-27 2012-02-08 富准精密工业(深圳)有限公司 Semiconductor illumination device
CN101997400A (en) * 2009-08-20 2011-03-30 杭州银轮科技有限公司 Hot plate cooler for wind power generation insulated gate bipolar transistor (IGBT) converter power module
US8908737B2 (en) 2011-04-04 2014-12-09 Coherent, Inc. Transition-metal-doped thin-disk laser
TWM417597U (en) * 2011-07-19 2011-12-01 Kuan Ding Ind Co Ltd Structure of heat conducting body
JP5988977B2 (en) * 2011-07-28 2016-09-07 デンカ株式会社 Heat dissipation parts for semiconductor elements
CN202532777U (en) * 2011-12-21 2012-11-14 北京有色金属研究总院 A hot-end heat dissipater for a pulse tube refrigerator
DE102012214971A1 (en) 2012-08-23 2014-02-27 Trumpf Laser Gmbh + Co. Kg Solid state laser arrangement and method for its production

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1035578A1 (en) * 1993-06-14 2000-09-13 Sumitomo Electric Industries, Ltd. Process for the production of a finned diamond heatsink
WO2001069676A2 (en) * 2000-03-13 2001-09-20 Sun Microsystems, Inc. Method and apparatus for bonding substrates
FR2827079A1 (en) * 2001-07-04 2003-01-10 Alstom Production of diamond substrate comprises use of silicon slice as support for chemical vapor deposition of diamond and elimination of silicon slice by chemical attack
US20030183368A1 (en) * 2002-04-02 2003-10-02 Paradis Leo Richard Diamond heat sink
WO2011091430A1 (en) * 2010-01-25 2011-07-28 Lawrence Livermore National Security, Llc Laser diode package with enhanced cooling
CN105305206A (en) * 2015-11-03 2016-02-03 华中科技大学 Heat sink suitable for disc laser jet flow impingement cooling system
WO2018067204A1 (en) * 2016-10-05 2018-04-12 Raytheon Company Transparent heat exchanger

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CN110199446B (en) 2021-07-16
US20200088482A1 (en) 2020-03-19
US11075499B2 (en) 2021-07-27
GB201621690D0 (en) 2017-02-01
CN110199446A (en) 2019-09-03
GB2558418B (en) 2020-04-01
GB201720962D0 (en) 2018-01-31

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