GB2481726A - Light condensing unit with guided movement mechanisms - Google Patents
Light condensing unit with guided movement mechanisms Download PDFInfo
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- GB2481726A GB2481726A GB1112096.1A GB201112096A GB2481726A GB 2481726 A GB2481726 A GB 2481726A GB 201112096 A GB201112096 A GB 201112096A GB 2481726 A GB2481726 A GB 2481726A
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- holding shaft
- tilt
- axial direction
- rotation
- focusing mirror
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0019—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors)
- G02B19/0023—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors) at least one surface having optical power
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
- G01N23/2254—Measuring cathodoluminescence
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/023—Means for mechanically adjusting components not otherwise provided for
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
- H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
- H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
- H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/08—Investigating materials by wave or particle radiation secondary emission incident electron beam and measuring cathode luminescence (U.V.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/04—Means for controlling the discharge
- H01J2237/045—Diaphragms
- H01J2237/0456—Supports
- H01J2237/0458—Supports movable, i.e. for changing between differently sized apertures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24485—Energy spectrometers
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- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Optics & Photonics (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
A light condensing unit is located between a radiation source and a sample being analysed. The unit comprises a mirror 41 located on a holding shaft 6 that is arranged to collect light, such as cathode luminescence (cathodoluminescence), coming from the sample that is being irradiated. The unit comprises moving mechanisms 81, 82 and 83 to move the shaft in X axial, Y axial and Z axial directions respectively using corresponding moving guides 811, 821 and 831; tilt mechanism 9 with a tilt guide arranged to tilt the holding shaft around an axis 9R that is orthogonal to the direction of irradiation and to the centre axis of the shaft; and a rotation mechanism 10 with rotation guide 101 that rotates the holding shaft around its centre axis. These mechanisms allow the focusing mirror to be moved independently in each of the directions, simplifying positional adjustments and improving positional repeatability.
Description
LIGHT CONDENSING UNIT
TECHNICAL FIELD
This invention relates to a light condensing unit for condensing light such as, for example, cathode luminescence or photoluminescence coming from a measurement cell on which, for example, electron beams or ion beams are irradiated and for introducing the condensed light into a detection optical system.
BACKGROUND ART
Conventionally, as shown in the patent document 1, there is a cathode luminescence analyzer that condenses the cathode luminescence (CL) generated by irradiating electric beams on a measurement sample and analyzes the measurement sample. The cathode luminescence analyzer uses a light condensing unit having a focusing mirror to collect the cathode luminescence coming from the measurement sample and a holding shaft to hold the focusing mirror.
The light condensing unit has not only three orthogonal axial directions (the X axial direction, the Y axial direction and the Z axial direction) adjusting mechanism but also a five axial directions (the X axial direction, the Y axial direction, the Z axial direction, a tilt direction and a rotation direction) adjusting mechanism. The tilt direction is a rotational direction around a rotational axis orthogonal to a direction of the electron beam irradiation and orthogonal to a center axial direction (the X axial direction) of the holding shaft, the rotation direction is a rotational direction around the rotational axis along the center axial direction of the holding shaft. Then positioning of the focusing mirror in the orthogonal three axial directions, the tilt direction and the rotation direction are conducted by the five axial direction adjusting mechanism.
However, since the conventional each five axial directions adjusting mechanism is mounted on a vacuum chamber and operated in a vacuum atmosphere and no guide is provided for each direction, there are problems that not only positional adjustment of the focusing mirror becomes troublesome but also a position repeatability is had.
Concretely, as shown in Fig. 7, the tilt adjust mechanism incorporated into the conventional light condensing unit adjusts the focusing mirror in the tilt direction by moving the movable body on which the holding shaft is mounted by making a back and forth movement of the three adjusting shaft, each of which is arranged in equiangular angle of 120. With an arrangement of the tilt adjusting mechanism, the focusing mirror rotates not only in a vertical direction along a direction of the electron beam irradiation but also in the right and left direction (the X axial direction) that is orthogonal to the center axial direction of the holding shaft in accordance with the movement of each adiusting shaft. Then there is a problem that the focusing mirror moves in the X axial direction even though the focusing mirror is intended to be adjusted only in the tilt direction. As a result, it becomes very complicated and troublesome to adjust the position of the focusing mirror. Then, since it is necessary for an operator who adjusts the focusing mirror to conduct an operation after understanding a behavior of the above-mentioned adjusting mechanism, there are problems that not only skills are required but also it takes haifa day through one day to adjust the focusing mirror.
PRIOR ART DOCUMENT
PATENT DOCUMENT
PATENT DOCUMENT 1 Japan Unexamined Patent Application Publication No. 2004 -93526
DISCLOSURE OF THE INVENTION
PROBLEMS TO BE SOLVED BY THE INVENTION
The present claimed invention intends to solve all of the problems and a main object of this invention is to simplify a process of adjusting a position of the focusing mirror, to improve repeatability of the position while adjusting the position of the focusing mirror and to shorten a time required for adjusting the focusing mirror.
MEANS TO SOLVE THE PROBLEMS
Specifically, the light condensing unit in accordance with this invention is arranged between an energy line irradiation system and a measurement sample and that condenses light coming from the measurement sample on which energy lines are irradiated, and is characterized by comprising a focusing mirror that condenses the light coming from the measurement sample, a holding shaft that has the focusing mirror, a three axial directions moving mechanism that has moving guides each of which can move in an X axial direction, a Y axial direction and a Z axial direction each of which is orthogonal and that moves the holding shaft in the three axial directions, a tilt mechanism that has a tilt guide that can rotate around a rotational axis that is orthogonal to the direction of the energy irradiation and a center axis of the holding shaft, and that rotates the holding shaft around the rotational axis along the tilt guide, and a rotation mechanism that has a rotation guide that can rotate around the center axis of the holding shaft and that rotates the holding shaft around the center axis along the rotation guide.
In accordance with the arrangement. since the three axial directions moving mechanism has the moving guides for each of the X axial direction, the Y axial direction and the Z axial direction, the tilt mechanism has the tilt guide, and the rotation mechanism has the rotation guide, it is possible to adjust the position of the focusing mirror in the X axial direction, the Y axial direction, the Z axial direction, the tilt direction and the rotation direction respectively and independently. As a result, it is possible to simplify the position adjustment of the focusing mirror and to improve the reproducibility of the position of the focusing mirror so that a time required for adjustment of the focusing mirror can be shortened.
In order to make it possible to adjust the position of the focusing mirror in the X axial direction, the Y axial direction, the Z axial direction and the rotation direction with keeping a posture of the focusing mirror whose position in the tilt direction has been adjusted by' the tilt mechanism, it is preferable that the three axial directions moving mechanism and the rotation mechanism move in accordance with a rotational movement by the tilt mechanism.
In order to make it possible to utilize a self weight of the light condensing unit for positioning the focusing mirror in the tilt direction for the tilt mechanism and to make it easy to operate the frequently used three axial directions moving mechanism, it is preferable that a mounting flange to be mounted on a chamber where the measurement sample is housed is provided, the holding shaft is arranged so as to insert and pass the mounting flange, the focusing mirror is arranged inside of the chamber and an outer side end part of the holding shaft is arranged to extend outside of the chamber. and the tilt mechanism is connected to the mounting flange and the three axial directions moving mechanism is arranged on the outer side end part of the holding shaft. In addition, with the arrangement wherein the tilt mechanism is connected to the mountiiig flange or near the mounting flange, it is possible to lessen a radius of moving the focusing mirror in the tilt direction by placing the rotational axis of the tilt mechanism in the chamber side, and also to make it easy to conduct a fine adjustment of the focusing mirror in the tilt direction.
Similar to the above-mentioned arrangement, in order to make it easy to operate the three axial directions moving mechanism and to simplify the arrangement of the five axial directions moving mechanism by arranging the rotation mechanism near the tilt mechanism, it is preferable that the rotation mechanism is connected to a tilt movable body that moves in a tilt direction by the tilt guide of the tilt mechanism, and the three axial directions moving mechanism is connected to a rotation movable body that moves in the rotation direction by the rotation guide of the rotation mechanism.
EFFECT OF THE INVENTION
In accordance with the present claimed invention of the above-mentioned arrangement, it is possible to simplify the positioning adjustment of the focusing mirror, to improve the position repeatability for adjusting the position of the focusing mirror and to shorten a time required for adjusting the focusing mirror.
BRIEF DESCRIPTION OF THE DRAWINGS
Fig. 1 is a pattern configuration diagram of a sample analyzer in accordance with one embodiment of this invention.
Fig. 2 is a perspective view of a light condensing unit of this embodiment.
Fig. 3 is a side view of the light condensing unit of this embodiment, Fig. 4 is a cross-sectional view of the light condensing unit of this embodiment, Fig. 5 is a perspective view of a holding shaft of this embodiment, Fig. 6 is a view showing a concrete configuration of the holding shaft of this embodiment.
Fig. 7 is a pattern diagram showing a tilt adjusting mechanism of a conventional light condensing unit.
BEST MODES OF EMBODYING THE INVENTION
One embodiment of a sample analyzer 100 in accordance with this invention will be explained with reference to drawings.
<Device configuration> The sample analyzer 100 in accordance with this embodiment is so called a cathode luminescence analyzer that conducts a physicality evaluation in a micro area of a measurement sample (W) (hereinafter just called as the sample (W)) or conducts analysis of a semi-conductor element by the use of a cathode luminescence (CL) generated from the sample (W) by irradiating electron beams (EB) as being energy lines on the sample (W) such as a semiconductor wafer or the like.
Concretely, as shown in Fig. 1, the sample analyzer 100 comprises a vacuum chamber 2 that houses the sample (W), an electron beam irradiation device 3 as being an energy line irradiation system that irradiates the electron beams (EB) as being the energy lines on the sample (W) house in the vacuum chamber 2, a detecting device 4 as being a light detecting part that disperses and detects the cathode luminescence (CL) generated from the sample (W) by irradiating the electron beams (EB), and an information processing unit 5 that receives an output signal from the detecting device 4 and conducts a predetermined calculation to evaluate (for example, to measure a stress) the sample (W).
Each part 2 5 will be explained with reference to Fig. 1.
The vacuum chamber 2 has a container that houses the sample (W) on which the electron beams (EB) are irradiated and a vacuum pump that vacuates inside of the container. In addition, the vacuum chamber 2 comprises a sample stage 201 on which the sample (W) is placed and a driving mechanism (not shown in drawings) that drives the sample stage 201 in the X, Y, and Z directions.
The electron beam irradiation device 3 comprises an electron gun 31 of, for example, a thermal field emission type, an electron beam control mechanism 32 comprising a lens mechanism to converge the electron beams (EB) irradiated from the electron gun 31 on a predetermined portion of the sample (W) and a scanning mechanism to scan the electron beams (EB) and a mirror tube 33 inside of which the electron gun 31 and the electron beam control mechanism 32 are housed. A lower end part of the mirror tube 33 is continuously arranged on an upper wall of the vacuum chamber 2.
The detecting device 4 comprises a focusing mirror 41, an optical fiber 42, a spectroscopy part 43 and a sensing part 44.
The focusing mirror 41 is arranged between the mirror tube 33 and the 1 0 sample (W), and gathers the cathode luminescence (CL) generated from the sample (W) with a minimum loss and leads the cathode luminescence (CL) to the optical fiber 42. The focusing mirror 41 has an electron beam passing bore to pass the electron beams (EB) converged by the mirror tube 33 and to irradiate the electron beams (EB) on the sample (W), and a mirror surface whose focus point is set on an axial line of the electron beam passing bore. The mirror surface may be a paraboloid mirror or a concave ellipsoidal mirror, and a concave ellipsoidal mirror is used as the mirror surface in this embodiment.
The optical fiber 42 is to transfer the cathode luminescence (CL) condensed by the focusing mirror 41 to the spectroscopy part 43. A distal end surface as being a light receiving surface of the optical fiber 42 is arranged on a focus point of the focusing mirror 41 and a rear end part is connected to the spectroscopy part 43.
The spectroscopy part 43 is to separate the cathode luminescence (CL) condensed by the focusing mirror 41 into monochromatic lights, and consists of. for example, a monochromatic meter. The sensing part 44 is a light detecting part and measures a intensity of each monochromatic light dispersed into multiple for each wavelength by the spectroscopy part 43 and outputs output signals each of which has an electric current value (or a voltage value) corresponding to a strength of each monochromatic light.
The information processing unit 5 is a general purpose or dedicated computer comprising a CPU. a memory, an input/output interface, an AD convertor and an input means. The information processing unit 5 receives the output signals from the detecting device 4 and calculates stresses or the like at each of the scanned measurement points by operating the CPU or its peripheral devices based on programs stored in a predetermined area of the memory.
As shown in Fig. 2 through Fig. 4, the sample analyzer 100 of this embodiment comprises a light condensing unit (X) that holds the focusing mirror 41 and the optical fiber 42 and that has a position adjusting mechanism that can adjust the focusing mirror 41 in five axes independently.
The light condensing unit (X) has the focusing mirror 41, the optical fiber 42, a holding shaft 6 to hold the focusing mirror 41 and the optical fiber 42, a mounting flange 7 to mount the holding shaft 6 on the vacuum chamber 2, a three axial directions moving mechanism 8 that is arranged between the holding shaft 6 and the mounting flange 7 and that moves the holding shaft 6 in three axial directions (the X axial direction, the Y axial direction and the Z axial direction) each of which is orthogonal, a tilt mechanism 9 that is arranged between the holding shaft 6 and the mounting flange 7 and that rotates the holding shaft 6 in a tilt direction, and a rotation mechanism 10 that is arranged between the holding shaft 6 and the mounting flange 7 and that rotates the holding shaft 6 along a rotation direction.
As shown in Fig. 5 and Fig. 6, the holding shaft 6 has a mirror holding part 61 on a distal end part of which the focusing mirror 41 is mounted and a shaft body 62 to hold the optical fiber 42 that receives the light condensed by the focusing mirror 41.
A relative positional relationship between the focusing mirror 41 and the optical fiber 42 held by the holding shaft 6 is constant.
The mirror holding part 61 comprises a holding frame 611 of a general channel shape in a plane view arranged at a distal end part, and a holding part body 612 of a general cylindrical shape arranged continuously to the holding frame 611.
The focusing mirror 41 is fixed to inside of the holding frame 611 of the general channel shape. Concretely, the focusing mirror 41 is fixed to a distal end wall 6lla of the holding frame 611 by a screw.
The shaft body 62 is of a general cylindrical shape and the optical fiber 42 is housed inside of the shaft body 62. In addition, a light transmitting window 62W is arranged at a distal end part of the shaft body 62, and the light condensed by the focusing mirror 41 comes into a light receiving surface of the optical fiber 42 through the light transmitting window 62W. As the light transmitting window 62W, silica glass (Si02), magnesium fluoride (MgF2), or lithium fluoride (LiF) may be appropriately selected according to an objective wavelength. A flange 62F that is fixed to the three axial directions moving mechanism 8 (specifically, a movable body 832 of a Z axial direction moving mechanism 83) is arranged at a rear end part of the shaft body 62.
A positioning structure between the focus point of the focusing mirror 41 and the light receiving surface of the optical fiber 42 will be explained. In this embodiment, the distance between a distal end wall 611a of the mirror holding part 61 on which the focusing mirror 41 is mounted and the light transmitting window 62W of the shaft body 62 is set in accordance with a focal length of the focusing mirror 41.
In addition, a screw bore for fixation arranged on the focusing mirror 41 and a fixing pin for positioning arranged on the distal end wall 611 a of the mirror holding part 61 are manufactured with a most appropriate mechanical accuracy. With this accuracy, it is so arranged that the focus point of the focusing mirror 41 coincides with the light receiving surface of the optical fiber 42 just by fixing the focusing mirror 41 to the distal end wall 611a. With this arrangement, it is possible to reduce an error in adjusting the optical axis of the focusing mirror 41 and the optical axis of the light receiving surface of the optical fiber 42 and an assembling error as much as possible.
The mounting flange 7 is mounted on a mounting bore arranged on a side wall of the vacuum chamber 2. The holding shaft 6. the three axial directions moving mechanism 8, the tilt mechanism 9 and the rotation mechanism 10 are integrally formed with the mounting flange 7. Then the holding shaft 6, the three axial directions moving mechanism 8, the tilt mechanism 9 and the rotation mechanism 10 are mounted on the vacuum chamber 2 by fixing the mounting flange 7 to the vacuum chamber 2.
Concretely, the mounting flange 7 is of a cylindrical shape in a shape of a general body of revolution, and has a flange part 71 that is fixed to the side wall of the vacuum chamber 2 by a screw and a cylindrical part 72 arranged continuously to the rear end surface of the flange part 71. The tilt mechanism 9, to be described later, is arranged on the cylindrical part 72. In addition, the holding shaft 6 is arranged to penetrate the mounting flange 7, the focusing mirror 41 arranged on the distal end part of the holding shaft 6 is arranged inside of the vacuum chamber 2, and the rear end part of the holding shaft 6 extends outside of the vacuum chamber 2. The three axial directions moving mechanism 8 is arranged at the rear end part of the holding shaft 6.
The mounting flange 7 can be mounted on and dismounted from the light condensing unit (X) so that it is possible for the light condensing unit (X) to correspond to various types of the vacuum chamber 2 by exchanging the mounting flange 7. With this arrangement, it is possible to cope with various type of the vacuum chamber 2 without changing a component of the light condensing unit (X) just by exchanging the mounting flange 7, and it is possible to make a change quickly and easily. As a result, it is possible to improve productivity and versatility.
The tilt mechanism 9 has a tilt guide that can rotate around a rotation axis 9R that is orthogonal to a direction (the Z axial direction) of irradiating the electron beams (EB) and orthogonal to a center axis 6P (the Y axial direction) of the holding shaft 6, and the tilt mechanism 9 rotates the holding shaft 6 along the tilt guide around the rotational axis 9R (refer to Fig. 3). The tilt mechanism 9 makes it possible to adjust a tilt angle of the focusing mirror 41 within a range of an angle of, for example, ±2 degrees from a tilt center position.
Concretely, the tilt mechanism 9, as shown in Fig. 4. and comprises a flange fixing part 91 that is arranged continuously to the mounting flange 7 and to which the mounting flange 7 is fixed, a tilt movable body 92 arranged rotatably to the flange fixing part 91 through the rotational axis 9R. and a tilt driving part (not shown in drawings) to rotate the tilt movable body 92 to the flange fixing part 91 (the mounting flange 7) around the rotational axis 9R. The rotational axis 9R has a tilt guide function and is arranged along a direction orthogonal to the direction (the Z axial direction) of irradiating the electron beams (EB) and orthogonal to the center axis 6P (the Y axial direction) of the holding shaft 6. Concretely, the rotational axis 9R is arranged so as to intersect the rotational center of the holding shaft 6 and the center axis 6P of the holding shaft 6 (refer to Fig. 3 or Fig. 4).
The tilt driving part comprises an internal thread through bore formed on the tilt movable part 92 in the Y axial direction and an adjusting screw that is threadably mounted on the internal thread through bore. A distal end part of the adjusting screw is arranged to make a contact with the flange fixing part 91. Then, it is so arranged that the tilt movable part 92 rotates around the rotational axis 9R relative to the flange fixing part 91 by fastening or loosing the adjusting screw.
The rotation mechanism 10 has a rotation guide that rotates around the center axis OP (the Y axial direction) of the holding shaft 6, and rotates the holding shaft 6 along the rotation guide around the center axis OP. The rotation mechanism 10 makes it possible to adj ust the focusing mirror 41 within a range of, for example, HO. 5 degrees from a rotation center position.
Concretely, as shown in Fig. 4, the rotation mechanism 1 0 comprises a guide body 101 that is arranged continuously to the tilt movable body 92 of the tilt mechanism 9 and that is fixed to the tilt movable body 92. a rotation movable body 102 that rotates around the center axis OP of the holding shaft 6 relative to the guide body 101, and a rotation driving part 103 to rotate the rotation movable body 102 around the center axis 6P to the guide body 101. A slide groove 1OIM to rotate the rotation movable body 102 around the center axis OP of the holding shaft 6 is arranged on the guide body 101. The slide groove 101 M is of a partial arc shape with a center on the center axis 6P, and the holding shaft 6 rotates around the center axis 6P by a sliding movement of the rotation movable body 102 on the slide groove IO1M. The slide groove I O1M is the rotation guide. A code 1 04 in Fig. 4 is a retaining screw both to enable the sliding movement of the rotation movable body 102 and to prevent the rotation movable body 102 from being pulled out from the sliding groove 1O1M.
The rotation driving part 103 comprises an internal thread through bore formed on the guide body 101 in the X axial direction and an adjusting screw that makes an engagement threadably with the internal thread through bore. The distal end part of the adjusting screw is arranged to make a contact with the rotation movable part. Then the rotation movable body 102 makes a sliding movement on the guide body 101 by fastening or tightening the adjusting screw.
The three axial directions moving mechanism 8 has moving guides that can make a movement in the X axial direction, the Y axial direction and the Z direction respectively, and moves the holding shaft 6 in the three axial directions. each of which is orthogonal. Concretely, the three axial directions moving mechanism 8 comprises.
as shown in Fig. 4, an X axial direction moving mechanism 81, a Y axial direction moving mechanism 82 and a Z axial direction moving mechanism 83.
The Y axial direction moving mechanism 82 moves the holding shaft 6 in the Y axial direction (the center axis 6P of the holding shaft 6). The focusing mirror 41 is moved between the measurement position and a recessed position separated from the measurement position by the Y axial direction moving mechanism 82. A distance between the measurement position and the recessed position is. for example.
mm. The measurement position is a position where the electron beam passing bore of the focusing mirror 41 generally coincides with the center axis of the electron beams (EB) and where a measurement is conducted. The recessed position is a position where the focusing mirror 41 is separated from a line connecting the electron beam irradiation device 3 (an objective lens) and the sample (W) and where the measurement is not conducted.
Concretely, as shown in Fig. 4, the Y axial direction moving mechanism 82 comprises a Y axis moving guide 821 that is arranged continuously to the rotation movable body 102 of the rotation mechanism 10 and that is fixed to the rotation movable body 102 and extends toward the Y axial direction, a Y axis movable body 822 that makes a sliding movement along the Y axis moving guide 821, and a Y axis driving part 823 to drive the Y axis movable body 822 to make the sliding movement along the Y axis moving guide 821. The Y axis moving guide 821 is two rail members extending outside from the rotation movable body 102. In addition, the Y axis movable body 822 has through bores into which the two rail members 821 are inserted, and makes a sliding movement along the rail members 821. The Y axis driving part 823 uses a lead screw mechanism, and comprises a screw shaft 823a arranged in parallel to the rail members $21 between the two rail members 821, a nut 823b that is threadably connected to the screw shaft 823a and continuously connected to the Y axis movable body 822. and a rotation knob 823c for rotating the screw shaft 823a manually. Then the Y axis movable body 822 moves in the Y axial direction along the rail members 821 by rotating the rotation knob 823c.
The X axial direction moving mechanism 81 moves the holding shaft 6 in the X axial direction (an axis that is orthogonal to the Y axial direction and that extends horizontally). The X axial direction moving mechanism 81 makes it possible to adjust the focusing mirror 41 in the X axial direction within a range of, for example, ±2mm.
Concretely, as shown in Fig. 4, the X axial direction moving mechanism 81 comprises an X axis moving guide 811 that is arranged continuously to the Y axis movable part 822 of the Y axial direction moving mechanism 82 and that is fixed to the Y axis movable body 822 and extends in the X axial direction, an X axis movable body 812 that makes a sliding movement along the X axis moving guide 811, and an X axis driving part 813 to drive the X axis movable body 812 to make the sliding movement along the X axis moving guide 811. The X axis moving guide 811 is composed by the use of. for example, a cross roller guide or a linear guide. The X axis driving part 813 uses a lead screw mechanism, and comprises a screw arranged on either the X axis moving guide 811 or the X axis movable body 812 along the X 2 0 axial direction, and a nut that is arranged on the other and that is threadably connected to the screw. Then the X axis movable body 822 moves in the X axial direction along the X axis moving guide 811 by fastening or loosening the screw by the use of a tool such as a driver or a hexagonal wrench. A code Cl in Fig. 2 is an operation bore to operate the X axis driving part 813 and the operation bore is arranged on a cover (C) housing the X axial direction moving mechanism 81 and the Z axial direction moving mechanism 83. The Z axial direction moving mechanism 83 moves the holding shaft 6 along the Z axial direction (an axis that is orthogonal to the center axis 6P of the holding shaft 6 and that forms a vertical plane), The X axial direction moving mechanism 83 can adjust the focusing mirror 41 along the Z axial direction within a range of, fbr example, ±2 mm, Concretely, as shown in Fig. 4, the Z axial direction moving mechanism 83 comprises a Z axis moving guide 831 that is arranged continuously to the X axis movable part 812 of the X axial direction moving mechanism 81 and that is fixed to the X axis movable body 812 and extending in the Z axial direction, a Z axis movable body 832 that makes a sliding movement along the Z axis moving guide 831, and a Z axis driving part 833 to drive the Z axis movable body 832 to make a sliding movement along the Z axis moving guide 831. The Z axis moving guide 831 is composed of, for example, a cross roller guide or a linear guide. The Z axis driving part 833 uses a lead screw mechanism, and comprises a screw arranged on either the 1 0 Z axis moving guide 83 1 or the Z axis movable body 832 along the Z axial direction, and a nut that is arranged on the other and that is threadably connected to the screw.
Then the Z axis movable body 832 moves in the Z axial direction along the Z axis moving guide 831 by fastening or loosening the screw by the use of a tool such as a driver or a hexagonal wrench. A code C2 in Fig. 2 is an operation bore to operate the Z axis driving part 833, and the operation bore is arranged on the cover (C).
The flange 62F of the holding shaft 6 is fixed to the Z axis movable part 832, In addition, a bellow part 11 such as a welded bellow that air-tightly covers a circumference of the holding shaft 6 is arranged between the tilt movable body 92 of the tilt mechanism 9 and the flange 62F of the holding shaft 6. This arrangement makes it possible to move the holding shaft 6 forward or backward while the air-tightness is kept by the welded bellow 11.
With the above-mentioned arrangement, the rotation mechanism 1 0, the three axial directions moving mechanism 8 and the holding shaft 6 integrally connected to the tilt movable body 92 move toward the tilt direction by operating the 2 5 tilt mechanism 9. In addition, the three axial directions moving mechanism 8 and the holding shaft 6 integrally connected to the rotation movable body 102 move toward a direction of rotation by operating the rotation mechanism 10, The X axial direction moving mechanism 81. the Z axial direction moving mechanism 83 and the holding shaft 6 integrally connected to the Y axis movable body 822 move toward the Y axial 3 Ci direction by operating the Y axial direction moving mechanism 82. In addition, the Z axial direction moving mechanism 83 and the holding shaft 6 integrally connected to the X axis movable body 812 move toward the X axial direction. Then, the holding shaft 6 integrally connected to the Z axis movable body 832 moves toward the Z axial direction by operating the Z axial direction moving mechanism 83.
Next, one example of a method for adjusting a position of the focusing mirror 41 using the above-mentioned five axis adjusting mechanism 8 10 will be explained.
1. Adjustment of the electron microscope 3 and the focusing mirror 41 First, conduct an adjustment of positions of an optical axis of the electron microscope 3, concretely an optical axis of an objective lens and the electron beam passing bore of the focusing mirror 41. The adjustment of the positions is conducted with a horizontal movement (the X axial direction and the Y axial direction) of two axes using the X axial direction moving mechanism 81 and the Y axial direction moving mechanism 82. With this arrangement. it is possible to reduce astigmatism of the electron microscope 3 generated by inserting the focusing mirror 41 between the objective lens and the sample (W).
2. Adjustment of the sample (W) and the focusing mirror 41 Since the focusing mirror 41 has a focal length, an image is formed with a previously set magnification. With this arrangement, in order to adjust the optical axis of the focusing mirror 41,it is necessary to adjust the three axes (the Z axial direction, the tilt direction, the rotation direction) in addition to the two axes (the X axial direction, the Y axial direction) used for adjusting the electron microscope 3 and the focusing mirror 41.
First, conduct an adjustment of positions of the optical axis of the objective lens of the electron microscope 3 and the electron beam passing bore of the focusing mirror 41 by the use of the X axial direction moving mechanism 81 and the Y axial direction moving mechanism 82, In order to conduct this adjustment, an optical arrangement of the electron microscope 3 and an optical arrangement of the cathode luminescence are considered, Next, a height position of the focusing mirror 41 is adjusted by the use of the Z axial direction moving mechanism 83 so as to adjust the distance between the focusing mirror 41 and the sample (W). Then, a positional relationship between the focal point of the focusing mirror 4i and the sample (W) is adjusted by the use of the tilt mechanism 9 and the rotation mechanism 10. The position of the focusing mirror 41 is optimized by repeating these adjusting operations.
<Effect of this embodiment> In accordance with the sample analyzer 100 of this embodiment having the abovementioned arrangement, since the three axial directions moving mechanism 8 has the moving guides 811, 812, 831 for each of the X axial direction, the Y axial direction and the Z axial direction, the tilt mechanism 9 has the rotation axis 9R as being the tilt guide, and the rotation mechanism 10 has the slide groove 1O1M as being the rotation guide, it is possible to adjust the position of the focusing mirror 41 in the X axial direction, the Y axial direction, the Z axial direction, the tilt direction and the rotation direction respectively and independently. As a result of this, since a user of this sample analyzer 100 can move the focusing mirror 41 only in the direction that the user intends, it is possible to simplify the position adjustment of the focusing mirror 41 and to improve the reproducibility of the position, thereby enabling to shorten a time required for adjusting the position of the focusing mirror 41.
In addition, since the tilt mechanism 9 and the rotation mechanism 10 are arranged on the mounting flange 7 and the three axial direction moving mechanism 8 is arranged on the outer side end part of the holding shaft 6, it is possible for the tilt mechanism 9 to make use of the weight of the three axial directions moving 2 0 mechanism 8 in order to position the focusing mirror 41 so that the arrangement of the tilt mechanism 9 can be simplified. In addition, since the three axial directions moving mechanism 8 is alTanged separately from the vacuum chamber 2, it is possible to make it easy to operate the three axial directions moving mechanism 8 that is used frequently.
<Other modified embodiment> This invention is not limited to the above-mentioned embodiment.
For example, the arrangement of the tilt mechanism, the rotation mechanism and the three axial directions moving mechanism is not limited to the above-mentioned embodiment, and ma be appropriately changed, For example, only the tilt mechanism may be arranged on the mounting flange and the rotation mechanism and the three axial directions moving mechanism may he arranged at the rear end part of the holding shaft. In addition, only the Y axial direction moving mechanism may be arranged at the rear end part of the holding shaft and the tilt mechanism, the rotation mechanism, the X axial direction moving mechanism and the Z axial direction moving mechanism may be arranged on the mounting flange. Since the Y axial direction moving mechanism is to move the focusing mirror forward and rearward between the measurement position and the recessed position, it is preferable to arrange the Y axial direction moving mechanism at the rear end part side of the holding shaft.
In addition, the tilt mechanism of the above-mentioned embodiment adjusts the tilt angle not by a spring but by a self weight of the unit and a back and forth movement of the screw of the tilt driving part in order to reduce an influence of disturbance such as vibrations as much as possible, however, the adjustment may be conducted not by the self weight of the unit but by an elastic restore force in addition to the self weight as far as the device is used for measurement and the effect of the disturbance such as, for example, the vibrations can be ignored.
Furthermore, the mechanisms in the above-mentioned embodiment are operated by hand, however, at least a part of the mechanisms may be driven by an actuator such as a stepping motor or the like.
In addition, the electron beams are irradiated as the energy lines in the above-mentioned embodiment, however, for example, X rays or ion beams may be irradiated.
Furthermore, the cathode luminescence is measured in the above-mentioned embodiment, however, for example. photo luminescence or raman light may be measured.
In addition, in case of adjusting the X axial direction moving mechanism and 2 5 the Z axial direction moving mechanism in a state of removing the cover that houses the X axial direction moving mechanism and the Z axial direction moving mechanism, there is no need of providing the operation bore for the cover.
In addition, it is a matter of course that the present claimed invention is not limited to the above-mentioned embodiment and may be variously modified without departing from a spirit of the invention.
LIST OF REFERENCE SIGNS
sample analyzer 2 vacuum chamber 3 energy line irradiation system (electron beam irradiation device) W measurement sample X light condensing unit 41 focusing mirror 6 holding shaft 811 X axis moving guide 81 X axial direction moving mechanism 821 Y axis moving guide 82 Y axial direction moving mechanism 831 Z axis moving guide 83 Z axial direction moving mechanism 9 tilt mechanism 9R tilt guide (rotational axis) 92 tilt movable body rotation mechanism 1O1M rotation guide (slide groove) 6P center axis of holding shaft 102 rotation movable body 7 mounting flange
Claims (4)
- CLAIMSI. A light condensing unit that is arranged between an energy line irradiation system and a measurement sample and that condenses light coming from the measurement sample on which energy lines are irradiated, and comprising:-a focusing mirror that condenses the light coming from the measurement sample, a holding shaft that has the focusing mirror, a three axial directions moving mechanism that has moving guides each of which can move in an X axial direction, a Y axial direction and a Z axial direction each of which is orthogonal and that moves the holding shaft in the three axial directions.a tilt mechanism that has a tilt guide that can rotate around a rotational axis that is orthogonal to the direction of the energy irradiation and a center axis of the holding shaft and that rotates the holding shaft around the rotational axis along the tilt guide, and a rotation mechanism that has a rotation guide that can rotate around the center axis of the holding shaft and that rotates the holding shaft around the center axis along the rotation guide.
- 2. The light condensing unit according to claim I. wherein the three axial directions moving mechanism and the rotation mechanism move in accordance with a rotational movement by the tilt mechanism.
- 3. The light condensing unit according to claim I or 2. wherein 2 5 a mounting flange to be mounted on a chamber where the measurement sample is housed is provided, the holding shaft is arranged so as to insert and pass the mounting flange, the focusing mirror is arranged inside of the chamber and an outer side end part of the holding shaft is arranged to extend outside of the chamber, and the tilt mechanism is connected to the mounting flange and the three axial directions moving mechanism is arranged on the outer side end part of the holding shaft,
- 4. The light condensing unit according to claim 3, wherein the rotation mechanism is connected to a lilt movable body that moves in a tilt direction by the lilt guide of the tilt mechanism, and the three axial directions moving mechanism is connected to a rotation movable body that moves in the rotation direction by the rotation guide of the rotation mechwin *.:r: INTELLECTUAL . ... PROPERTY OFFICE Application No: GB1112096.1 Examiner: Dr Stephen Otter Claims searched: 1-4 Date of search: 27 October 2011 Patents Act 1977: Search Report under Section 17 Documents considered to be relevant: Category Relevant Identity of document and passage or figure of particular relevance to claims A -US 2003/0053048 Al (BENNETT) see whole document especially Figures 1, 5, 6 & 8 and paragraphs 0006-0050 and 0084-0097 A -US4900932A (SCHAEFER) see whole document especially Figure 1, column 1 line to column 2 line 50 and column 3 lines 10-68 A -JP 02024945 A (HAMAMATSU PHOTONICS) see especially Figures 1-4 and EPODOC abstract A -US 2008/0037150 Al (HEUSER) see whole document especially Figures and paragraphs 0004-0005, 0032-0041 and 0066 Categories: X Document indicating lack of novelty or inventive A Document indicating technological background and/or state step of the art.Y Document indicating lack of inventive step if P Document published on or after the declared priority date but combined with one or more other documents of before the filing date of this invention.same category.& Member of the same patent family E Patent document published on or after. hut with priority date earlier than, the filing date of this application.Field of Search:Search of GB, EP, WO & US patent documents classified in Ihe following areas of the UKCX Worldwide search of patent documents classified in the following areas of the IPC GO iN; GO2B; HO1J The following online and other databases have been used in the preparation of this search report EPODOC, WPI, TXTE Intellectual Property Office is an operating name of the Patent Office www.ipo.gov.uk t::r: INTELLECTUAL . . PROPERTY OFFICE 21 International Classification: Subclass Subgroup Valid From © EPODOC / EPO PN -JP7286845 A 19951031 OPD -1991-12-26 PD -1995-10-31PA -INRKENKYUSHO KKIN -INOUEKIYOSHITI -METHODAND INSTRUMENT FORMEASURING THREE-DIMENSIONAL SHAPEAB -PURPOSE:To precisely the measure three-dimensional shape by reducing the occurrence of measurement enor resulting from the inclination, etc., of a surface to be measured.CONSTITUTION:The 0023/225 01/01/2006 angle at a measuring point is determined from the reflected waves of an ultrasonic beam and, at the same time, the position of the measuring point is measured by using the reflected light of a light beam. At the time of scanning the angle at the measuring point with angle scanning devices 3 and 4 which scan the angle at the measuring point by moving both heads 1 and2ona spherical surface around the measuring point by providing an angle detecting head 1, a position measuring head 2 which measures the position of the measuring point by transmitting and receiving Intellectual Property Office is an operating name of the Patent Office www.ipo.gov.uk *.:r: INTELLECTUAL . ... PROPERTY OFFICE 22 Subclass Subgroup Valid From a laser beam, and the angle scanning devices 3 and 4, the position of the measuring point is detected and measured by means of the head 2 from the angle detected and measured results of the head 1.Position scanning devices 6, 7, and 8 which move the measuring point of the object 5 and an arithmetic processor 11 which calculates and outputs three-dimensional shape signal based on the moving position information of the measuring point from the devices 6, 7, and 8 and position detecting and measuring information of the head 2 from the angle detected and measured results at the measuring point obtained by the head 1, are provided. Fl -GOIB1 l/24&A; GO1B1 1/24&C; GO lB 17100&Z; GO1B21/20&1O1; GO1B21/20&1O1ZFT -2F065/AAO4; 2F065/AA53; 2F065/BBO5; 2F065/DDO4; 2F065/DD1 1; 2F065/FFO9; 2F065/FF65; 2F065/GGO4; 2F065/HHO4; 2F065/HH 12; 2F065/HHI3; 2F065/JJO8; 2F065/JJO9; 2F065/JJ2S; 2F065/KKO 1; 2F065/MMO9; 2F065/PP12; 2F065/QQO3; 2F065/QQ23; 2F065/QQ3 1; Intellectual Property Office is an operating name of the Patent Office www.ipo.gov.uk *::r: INTELLECTUAL . ... PROPERTY OFFICE 23 Subclass Subgroup Valid From 2F068/AAO4; 2F068/AA32; 2F068/DDO3; 2F068/DDO7; 2F068/DD16; 2F068/FF12; 2F068/FF14; 2F068/JJ1S; 2F068/KK12; 2F068/QQO5; 2F068/QQ16; 2F068/QQ 18; 2F068/QQ26; 2F069/AAO4; 2F069/AA77; 2F069/BB4O; 2F069/DDO8; 2F069/DD 16; 2F069/GGO4; 2F069/GGO7; 2F069/GGO9; 2F069/GG47; 2F069/GG59; 2F069/HHO9; 2F069/HH3O; 2F069/JJO4; 2F069/JJ15; 2F069/MMO4; 2F069/MM24; 2F069/MM32; 2F069/NNOO; 2F069/NNO 1; 2F069/NNO8; 2F069/NN25 IC -G01B21120; GO1B11/24; GO1B17/00 ICAI -GO1B11/24; GO1B17/00; GO1B21/20PR -JP19910361378 FAMN-18473332 © WPI / Thomson AN -1996- 007305 [01] OPD -1991-12-26 PD -1995-10-31AP -JP19910361378 PA -(INRK-N)INR KENKYUSHO KKIntellectual Property Office is an operating name of the Patent Office www.ipo.gov.uk t::r: INTELLECTUAL . ...* PROPERTY OFFICE 24 Subclass Subgroup Valid FromCPY -INRK-NIN -INOUEKTI -Three=dimensional shape measurement method -involves measuring position of reflected wave of light beam and calculates angle between them AB -The measurement method involves usage of a supersonic wave beam source. The wave from the wave beam source is projected on the surface of the object, whose shape is to be formed. The angle of the point at which the waves are reflected is judged. Simultaneously, the position of the measurement point is measured. The above procedure is accomplished by means of an angle detection head (11) and a position measurement head (2). An angle scanning arrangement comprising an arm (3) and a turn motor (4) scans both heads of the sphere centering the measured point of a body (5). AX axis motor (7), a Y axis motor (8) and Z axis motor (9) helps to fix the head over the fixed body.Thus, the entire surface of the three dimensional body is scanned and the output ofaprocessor (10) gives the three dimensional shape signals.-ADVANTAGE: Judges angle of measurement point with Intellectual Property Office is an operating name of the Patent Office www.ipo.gov.uk *.:r: INTELLECTUAL . ... PROPERTY OFFICE 25 Subclass Subgroup Valid From high accuracy. Improves measurement accuracy.Reduces measurement errors.GO 1 N GO1N 0021/62 01/01/2006 GO2B 0007/182 01/01/2006 HO1J 0037/22 01/01/2006 Intellectual Property Office is an operating name of the Patent Office www.ipo.gov.uk
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010162715A JP5677777B2 (en) | 2010-07-20 | 2010-07-20 | Concentrator device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| GB201112096D0 GB201112096D0 (en) | 2011-08-31 |
| GB2481726A true GB2481726A (en) | 2012-01-04 |
| GB2481726B GB2481726B (en) | 2014-04-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB201112096A Expired - Fee Related GB2481726B (en) | 2010-07-20 | 2011-07-14 | Light condensing unit |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5677777B2 (en) |
| GB (1) | GB2481726B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015178774A1 (en) * | 2014-05-23 | 2015-11-26 | Delmic B.V. | Method for positioning a focal plane of a light imaging device and apparatus arranged for applying said method |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6754780B2 (en) * | 2016-01-28 | 2020-09-16 | 株式会社堀場製作所 | Condensing mirror unit for sample analyzer and sample analyzer |
| CN106525845B (en) * | 2016-10-11 | 2023-11-03 | 聚束科技（北京）有限公司 | Charged particle beam system, photoelectric combined detection system and method |
| DE102019130516B3 (en) | 2019-11-12 | 2021-04-29 | Lange Uhren Gmbh | Alarm trigger device |
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| JPH0224945A (en) * | 1988-07-14 | 1990-01-26 | Hamamatsu Photonics Kk | Enlarged observing device for radiation image |
| US4900932A (en) * | 1987-09-05 | 1990-02-13 | Carl-Zeiss-Stiftung | Cathodoluminescence detector utilizing a hollow tube for directing light radiation from the sample to the detector |
| US20030053048A1 (en) * | 1998-05-09 | 2003-03-20 | Renishaw Plc | Electron microscope and spectroscopy system |
| US20080037150A1 (en) * | 2006-08-14 | 2008-02-14 | Newport Corporation | Mount For Optical Component Having Independent Multi-Axial Control |
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| JPS60230345A (en) * | 1984-04-28 | 1985-11-15 | Hitachi Ltd | Sample base device for scanning electron microscope |
| JP3971975B2 (en) * | 2002-09-04 | 2007-09-05 | 株式会社堀場製作所 | Cathodoluminescence analyzer |
| JP4587887B2 (en) * | 2005-06-29 | 2010-11-24 | 株式会社堀場製作所 | Sample measuring device |
| JP4920539B2 (en) * | 2006-09-26 | 2012-04-18 | 株式会社堀場製作所 | Cathodoluminescence measuring device and electron microscope |
| JP5383231B2 (en) * | 2008-07-08 | 2014-01-08 | 宮崎 裕也 | Sample holder and sample holder driving device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4900932A (en) * | 1987-09-05 | 1990-02-13 | Carl-Zeiss-Stiftung | Cathodoluminescence detector utilizing a hollow tube for directing light radiation from the sample to the detector |
| JPH0224945A (en) * | 1988-07-14 | 1990-01-26 | Hamamatsu Photonics Kk | Enlarged observing device for radiation image |
| US20030053048A1 (en) * | 1998-05-09 | 2003-03-20 | Renishaw Plc | Electron microscope and spectroscopy system |
| US20080037150A1 (en) * | 2006-08-14 | 2008-02-14 | Newport Corporation | Mount For Optical Component Having Independent Multi-Axial Control |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015178774A1 (en) * | 2014-05-23 | 2015-11-26 | Delmic B.V. | Method for positioning a focal plane of a light imaging device and apparatus arranged for applying said method |
| NL2012874B1 (en) * | 2014-05-23 | 2016-03-15 | Delmic B V | Method for positioning a focal plane of a light imaging device and apparatus arranged for applying said method. |
Also Published As
| Publication number | Publication date |
|---|---|
| GB201112096D0 (en) | 2011-08-31 |
| GB2481726B (en) | 2014-04-09 |
| JP5677777B2 (en) | 2015-02-25 |
| JP2012028019A (en) | 2012-02-09 |
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| PCNP | Patent ceased through non-payment of renewal fee |
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