GB2481726B - Light condensing unit - Google Patents

Light condensing unit

Info

Publication number
GB2481726B
GB2481726B GB201112096A GB201112096A GB2481726B GB 2481726 B GB2481726 B GB 2481726B GB 201112096 A GB201112096 A GB 201112096A GB 201112096 A GB201112096 A GB 201112096A GB 2481726 B GB2481726 B GB 2481726B
Authority
GB
United Kingdom
Prior art keywords
condensing unit
light condensing
light
unit
condensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB201112096A
Other versions
GB201112096D0 (en
GB2481726A (en
Inventor
Shogo Awata
Shigetoshi Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Publication of GB201112096D0 publication Critical patent/GB201112096D0/en
Publication of GB2481726A publication Critical patent/GB2481726A/en
Application granted granted Critical
Publication of GB2481726B publication Critical patent/GB2481726B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0019—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors)
    • G02B19/0023—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors) at least one surface having optical power
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • G01N23/2254—Measuring cathodoluminescence
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/023—Means for mechanically adjusting components not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination or light collection take place in the same area of the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/08—Investigating materials by wave or particle radiation secondary emission incident electron beam and measuring cathode luminescence (U.V.)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/045—Diaphragms
    • H01J2237/0456—Supports
    • H01J2237/0458—Supports movable, i.e. for changing between differently sized apertures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24485—Energy spectrometers

Landscapes

  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB201112096A 2010-07-20 2011-07-14 Light condensing unit Expired - Fee Related GB2481726B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010162715A JP5677777B2 (en) 2010-07-20 2010-07-20 Concentrator device

Publications (3)

Publication Number Publication Date
GB201112096D0 GB201112096D0 (en) 2011-08-31
GB2481726A GB2481726A (en) 2012-01-04
GB2481726B true GB2481726B (en) 2014-04-09

Family

ID=44586583

Family Applications (1)

Application Number Title Priority Date Filing Date
GB201112096A Expired - Fee Related GB2481726B (en) 2010-07-20 2011-07-14 Light condensing unit

Country Status (2)

Country Link
JP (1) JP5677777B2 (en)
GB (1) GB2481726B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2012874B1 (en) * 2014-05-23 2016-03-15 Delmic B V Method for positioning a focal plane of a light imaging device and apparatus arranged for applying said method.
WO2017131132A1 (en) * 2016-01-28 2017-08-03 株式会社堀場製作所 Sample analysis device and collector mirror unit for sample analysis device
CN106525845B (en) * 2016-10-11 2023-11-03 聚束科技（北京）有限公司 Charged particle beam system, photoelectric combined detection system and method
DE102019130516B3 (en) 2019-11-12 2021-04-29 Lange Uhren Gmbh Alarm trigger device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0224945A (en) * 1988-07-14 1990-01-26 Hamamatsu Photonics Kk Enlarged observing device for radiation image
US4900932A (en) * 1987-09-05 1990-02-13 Carl-Zeiss-Stiftung Cathodoluminescence detector utilizing a hollow tube for directing light radiation from the sample to the detector
US20030053048A1 (en) * 1998-05-09 2003-03-20 Renishaw Plc Electron microscope and spectroscopy system
US20080037150A1 (en) * 2006-08-14 2008-02-14 Newport Corporation Mount For Optical Component Having Independent Multi-Axial Control

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60230345A (en) * 1984-04-28 1985-11-15 Hitachi Ltd Sample base device for scanning electron microscope
JP3971975B2 (en) * 2002-09-04 2007-09-05 株式会社堀場製作所 Cathodoluminescence analyzer
JP4587887B2 (en) * 2005-06-29 2010-11-24 株式会社堀場製作所 Sample measuring device
JP4920539B2 (en) * 2006-09-26 2012-04-18 株式会社堀場製作所 Cathodoluminescence measuring device and electron microscope
JP5383231B2 (en) * 2008-07-08 2014-01-08 宮崎 裕也 Sample holder and sample holder driving device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4900932A (en) * 1987-09-05 1990-02-13 Carl-Zeiss-Stiftung Cathodoluminescence detector utilizing a hollow tube for directing light radiation from the sample to the detector
JPH0224945A (en) * 1988-07-14 1990-01-26 Hamamatsu Photonics Kk Enlarged observing device for radiation image
US20030053048A1 (en) * 1998-05-09 2003-03-20 Renishaw Plc Electron microscope and spectroscopy system
US20080037150A1 (en) * 2006-08-14 2008-02-14 Newport Corporation Mount For Optical Component Having Independent Multi-Axial Control

Also Published As

Publication number Publication date
GB201112096D0 (en) 2011-08-31
GB2481726A (en) 2012-01-04
JP2012028019A (en) 2012-02-09
JP5677777B2 (en) 2015-02-25

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20180714