GB2425404B - Formation of abrupt junctions in devices by using silicide growth dopant snowplow effect - Google Patents

Formation of abrupt junctions in devices by using silicide growth dopant snowplow effect

Info

Publication number
GB2425404B
GB2425404B GB0612074A GB0612074A GB2425404B GB 2425404 B GB2425404 B GB 2425404B GB 0612074 A GB0612074 A GB 0612074A GB 0612074 A GB0612074 A GB 0612074A GB 2425404 B GB2425404 B GB 2425404B
Authority
GB
United Kingdom
Prior art keywords
formation
devices
abrupt junctions
silicide growth
snowplow effect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0612074A
Other languages
English (en)
Other versions
GB2425404A (en
GB0612074D0 (en
Inventor
Witold P Maszara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Micro Devices Inc
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34633603&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=GB2425404(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Publication of GB0612074D0 publication Critical patent/GB0612074D0/en
Publication of GB2425404A publication Critical patent/GB2425404A/en
Application granted granted Critical
Publication of GB2425404B publication Critical patent/GB2425404B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
    • H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
    • H01L21/2652—Through-implantation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/23—Electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. sources, drains, anodes or cathodes
    • H10D64/251—Source or drain electrodes for field-effect devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/027—Manufacture or treatment of FETs having insulated gates [IGFET] of lateral single-gate IGFETs
    • H10D30/0275—Manufacture or treatment of FETs having insulated gates [IGFET] of lateral single-gate IGFETs forming single crystalline semiconductor source or drain regions resulting in recessed gates, e.g. forming raised source or drain regions
    • H01L29/41725—
    • H01L29/78—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0212—Manufacture or treatment of FETs having insulated gates [IGFET] using self-aligned silicidation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/601—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs 
    • H10D30/608—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs  having non-planar bodies, e.g. having recessed gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/23—Electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. sources, drains, anodes or cathodes
    • H10D64/251—Source or drain electrodes for field-effect devices
    • H10D64/258—Source or drain electrodes for field-effect devices characterised by the relative positions of the source or drain electrodes with respect to the gate electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
    • H01L21/28518—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table the conductive layers comprising silicides

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
GB0612074A 2003-12-03 2004-10-26 Formation of abrupt junctions in devices by using silicide growth dopant snowplow effect Expired - Fee Related GB2425404B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/727,999 US7081655B2 (en) 2003-12-03 2003-12-03 Formation of abrupt junctions in devices by using silicide growth dopant snowplow effect
PCT/US2004/035408 WO2005062387A1 (en) 2003-12-03 2004-10-26 Formation of abrupt junctions in devices by using silicide growth dopant snowplow effect

Publications (3)

Publication Number Publication Date
GB0612074D0 GB0612074D0 (en) 2006-07-26
GB2425404A GB2425404A (en) 2006-10-25
GB2425404B true GB2425404B (en) 2007-05-16

Family

ID=34633603

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0612074A Expired - Fee Related GB2425404B (en) 2003-12-03 2004-10-26 Formation of abrupt junctions in devices by using silicide growth dopant snowplow effect

Country Status (8)

Country Link
US (2) US7081655B2 (enExample)
JP (1) JP2007513516A (enExample)
KR (1) KR101093125B1 (enExample)
CN (1) CN1886838B (enExample)
DE (1) DE112004002401B4 (enExample)
GB (1) GB2425404B (enExample)
TW (1) TWI370518B (enExample)
WO (1) WO2005062387A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
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US20060228850A1 (en) * 2005-04-06 2006-10-12 Pang-Yen Tsai Pattern loading effect reduction for selective epitaxial growth
US7659172B2 (en) * 2005-11-18 2010-02-09 International Business Machines Corporation Structure and method for reducing miller capacitance in field effect transistors
JP2009520373A (ja) * 2005-12-19 2009-05-21 エヌエックスピー ビー ヴィ シリコン・オン・インシュレータ装置におけるソースおよびドレイン形成
US7745847B2 (en) * 2007-08-09 2010-06-29 United Microelectronics Corp. Metal oxide semiconductor transistor
US8273631B2 (en) * 2009-12-14 2012-09-25 United Microelectronics Corp. Method of fabricating n-channel metal-oxide semiconductor transistor
US8513765B2 (en) 2010-07-19 2013-08-20 International Business Machines Corporation Formation method and structure for a well-controlled metallic source/drain semiconductor device
US8846492B2 (en) 2011-07-22 2014-09-30 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated circuit having a stressor and method of forming the same
KR20160058499A (ko) * 2014-11-17 2016-05-25 삼성전자주식회사 반도체 소자, 및 그 반도체 소자의 제조방법과 제조장치
US10510869B2 (en) 2016-05-06 2019-12-17 Silicet, LLC Devices and methods for a power transistor having a Schottky or Schottky-like contact
US9947787B2 (en) 2016-05-06 2018-04-17 Silicet, LLC Devices and methods for a power transistor having a schottky or schottky-like contact
US11228174B1 (en) 2019-05-30 2022-01-18 Silicet, LLC Source and drain enabled conduction triggers and immunity tolerance for integrated circuits
US10892362B1 (en) 2019-11-06 2021-01-12 Silicet, LLC Devices for LDMOS and other MOS transistors with hybrid contact
US11522053B2 (en) 2020-12-04 2022-12-06 Amplexia, Llc LDMOS with self-aligned body and hybrid source
CN120390443B (zh) * 2025-06-30 2025-09-09 合肥晶合集成电路股份有限公司 一种半导体器件及其制作方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4769686A (en) * 1983-04-01 1988-09-06 Hitachi, Ltd. Semiconductor device
US4885617A (en) * 1986-11-18 1989-12-05 Siemens Aktiengesellschaft Metal-oxide semiconductor (MOS) field effect transistor having extremely shallow source/drain zones and silicide terminal zones, and a process for producing the transistor circuit
US6451693B1 (en) * 2000-10-05 2002-09-17 Advanced Micro Device, Inc. Double silicide formation in polysicon gate without silicide in source/drain extensions

Family Cites Families (12)

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Publication number Priority date Publication date Assignee Title
US4293587A (en) 1978-11-09 1981-10-06 Zilog, Inc. Low resistance backside preparation for semiconductor integrated circuit chips
US4274892A (en) 1978-12-14 1981-06-23 Trw Inc. Dopant diffusion method of making semiconductor products
DE2926874A1 (de) 1979-07-03 1981-01-22 Siemens Ag Verfahren zum herstellen von niederohmigen, diffundierten bereichen bei der silizium-gate-technologie
US4362597A (en) 1981-01-19 1982-12-07 Bell Telephone Laboratories, Incorporated Method of fabricating high-conductivity silicide-on-polysilicon structures for MOS devices
US4692348A (en) 1984-06-21 1987-09-08 International Business Machines Corporation Low temperature shallow doping technique
JPH04291929A (ja) * 1991-03-20 1992-10-16 Toshiba Corp 半導体装置の製造方法
US5352631A (en) * 1992-12-16 1994-10-04 Motorola, Inc. Method for forming a transistor having silicided regions
US5780341A (en) * 1996-12-06 1998-07-14 Halo Lsi Design & Device Technology, Inc. Low voltage EEPROM/NVRAM transistors and making method
US6136636A (en) 1998-03-25 2000-10-24 Texas Instruments - Acer Incorporated Method of manufacturing deep sub-micron CMOS transistors
US6326251B1 (en) 1999-01-12 2001-12-04 Advanced Micro Devices Method of making salicidation of source and drain regions with metal gate MOSFET
US6087235A (en) * 1999-10-14 2000-07-11 Advanced Micro Devices, Inc. Method for effective fabrication of a field effect transistor with elevated drain and source contact structures
US6812527B2 (en) * 2002-09-05 2004-11-02 International Business Machines Corporation Method to control device threshold of SOI MOSFET's

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4769686A (en) * 1983-04-01 1988-09-06 Hitachi, Ltd. Semiconductor device
US4885617A (en) * 1986-11-18 1989-12-05 Siemens Aktiengesellschaft Metal-oxide semiconductor (MOS) field effect transistor having extremely shallow source/drain zones and silicide terminal zones, and a process for producing the transistor circuit
US6451693B1 (en) * 2000-10-05 2002-09-17 Advanced Micro Device, Inc. Double silicide formation in polysicon gate without silicide in source/drain extensions

Non-Patent Citations (7)

* Cited by examiner, † Cited by third party
Title
Hokanzo A et al; "Source/drain engineering for sub-100 nm CMOS using selective epitaxial growth technique"; International Electron Devices Meeting 2000 IEDM Technical Digest, San Francisco; 2000; New York; IEEE, US; pages 243-246; ISBN: 0-7803-6439-2 *
Horiuchi M et al: "Solid-II: High-voltage high-gain kilo-angstrom-channel-length CMOSFETs using silicide with self-aligned ultrashallow (3S) junction"; IEEE Transactions on Electron Devices; IEEE Inc. New York, US; Vol. 33 No. 2; 1986; pages 260-269; ISSN: 0018-9383 *
Jiang H et al: "Ultra shallow junction formation using diffusion from silicides:.\II. diffusion in silicides and evaporation"; Journal of the Electrochemical Society, Electrochemical Society. Manchester, New Hampshire; Vol. 139 No. 1; 1992; pages 206-211; ISSN: 0013-4651 *
Kotaki H et al: "Novel elevated silicide source/drain (ESSOD) by load-lock LPCVD-Si and advanced silicidation processing"; Electron Devices Meeting, 1993 Technical Digest, Washington, DC, US; 1993; New York, US; pages 839-842; ISBN 0-7803-1450-6 *
Murarka S P et al: "Dopant redistribution in silicide-polycrystalline silicon bilayered structures"; Journal of Vacuum science and Technology; Part B; American Institute of Physics; New York, US; Vol. 5 No. 6; Index; 1987; pages 1674-1688; ISSN: 1071-1023 *
Sun J J et al: "Elevated n+/p junctions by implant into CoSi2 formed on selective epitaxy for deep submicron mosfets"; IEEE Transactions on Electron Devices; IEEE Inc. New York, US; Vol. 45 No. 9; 1998; pages 1946-1952; ISSN: 0018-9383 *
Wittmer M et Al: "Redistribution of As during PD2SI formation: Ion channeling measurements"; Journal of Applied Physics, American Institute of Physics. New York, US; Vol 53 No. 10; 1982; pages 6781-6787; ISSN: 0021-8979 *

Also Published As

Publication number Publication date
TWI370518B (en) 2012-08-11
CN1886838A (zh) 2006-12-27
KR20060115892A (ko) 2006-11-10
DE112004002401B4 (de) 2009-02-26
GB2425404A (en) 2006-10-25
GB0612074D0 (en) 2006-07-26
US7306998B2 (en) 2007-12-11
CN1886838B (zh) 2011-03-16
US7081655B2 (en) 2006-07-25
US20060211245A1 (en) 2006-09-21
US20050121731A1 (en) 2005-06-09
KR101093125B1 (ko) 2011-12-13
TW200524082A (en) 2005-07-16
JP2007513516A (ja) 2007-05-24
WO2005062387A1 (en) 2005-07-07
DE112004002401T5 (de) 2006-11-30

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20221026