GB2396743B - Thin film transistor - Google Patents

Thin film transistor

Info

Publication number
GB2396743B
GB2396743B GB0408229A GB0408229A GB2396743B GB 2396743 B GB2396743 B GB 2396743B GB 0408229 A GB0408229 A GB 0408229A GB 0408229 A GB0408229 A GB 0408229A GB 2396743 B GB2396743 B GB 2396743B
Authority
GB
United Kingdom
Prior art keywords
thin film
film transistor
transistor
thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0408229A
Other versions
GB2396743A (en
GB0408229D0 (en
Inventor
Shin-Itsu Takehashi
Shigeo Ikuta
Tetsuo Kawakita
Mayumi Inque
Keizaburo Kuramasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority claimed from GB0027543A external-priority patent/GB2354882B/en
Publication of GB0408229D0 publication Critical patent/GB0408229D0/en
Publication of GB2396743A publication Critical patent/GB2396743A/en
Application granted granted Critical
Publication of GB2396743B publication Critical patent/GB2396743B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66742—Thin film unipolar transistors
    • H01L29/6675—Amorphous silicon or polysilicon transistors
    • H01L29/66757—Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
    • H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
    • H01L29/42384—Gate electrodes for field effect devices for field-effect transistors with insulated gate for thin film field effect transistors, e.g. characterised by the thickness or the shape of the insulator or the dimensions, the shape or the lay-out of the conductor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
    • H01L29/4908—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET for thin film semiconductor, e.g. gate of TFT
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66742—Thin film unipolar transistors
    • H01L29/6675—Amorphous silicon or polysilicon transistors
    • H01L29/66765—Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
    • H01L29/78618—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
    • H01L29/78621—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
    • H01L29/78618—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
    • H01L29/78621—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile
    • H01L29/78624—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile the source and the drain regions being asymmetrical
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
    • H01L29/78618—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
    • H01L29/78621—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile
    • H01L29/78627—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile with a significant overlap between the lightly doped drain and the gate electrode, e.g. GOLDD

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Film Transistor (AREA)
GB0408229A 1999-03-10 2000-03-09 Thin film transistor Expired - Fee Related GB2396743B (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP6276799 1999-03-10
JP8005199 1999-03-24
JP8331999 1999-03-26
JP8331699 1999-03-26
JP8331499 1999-03-26
GB0027543A GB2354882B (en) 1999-03-10 2000-03-09 Thin film transistor panel and their manufacturing method

Publications (3)

Publication Number Publication Date
GB0408229D0 GB0408229D0 (en) 2004-05-19
GB2396743A GB2396743A (en) 2004-06-30
GB2396743B true GB2396743B (en) 2004-08-18

Family

ID=31950912

Family Applications (5)

Application Number Title Priority Date Filing Date
GB0330021A Expired - Fee Related GB2393574B (en) 1999-03-10 2000-03-09 Method of manufacturing a thin film transistor
GB0408229A Expired - Fee Related GB2396743B (en) 1999-03-10 2000-03-09 Thin film transistor
GB0408368A Expired - Fee Related GB2396744B (en) 1999-03-10 2000-03-09 A semiconductor element
GB0330024A Expired - Fee Related GB2393576B (en) 1999-03-10 2000-03-09 LCD substrate
GB0330022A Expired - Fee Related GB2393575B (en) 1999-03-10 2000-03-09 Method of manufacturing a thin film transistor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB0330021A Expired - Fee Related GB2393574B (en) 1999-03-10 2000-03-09 Method of manufacturing a thin film transistor

Family Applications After (3)

Application Number Title Priority Date Filing Date
GB0408368A Expired - Fee Related GB2396744B (en) 1999-03-10 2000-03-09 A semiconductor element
GB0330024A Expired - Fee Related GB2393576B (en) 1999-03-10 2000-03-09 LCD substrate
GB0330022A Expired - Fee Related GB2393575B (en) 1999-03-10 2000-03-09 Method of manufacturing a thin film transistor

Country Status (1)

Country Link
GB (5) GB2393574B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11121263B2 (en) * 2019-08-27 2021-09-14 Apple Inc. Hydrogen trap layer for display device and the same

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07202210A (en) * 1993-12-28 1995-08-04 Sharp Corp Thin film transistor and manufacture thereof
JPH0992840A (en) * 1995-09-28 1997-04-04 Nec Corp Liquid crystal display device and its manufacture
WO1998027583A1 (en) * 1996-12-19 1998-06-25 Koninklijke Philips Electronics N.V. Electronic devices and their manufacture
US5807770A (en) * 1995-03-13 1998-09-15 Nec Corporation Fabrication method of semiconductor device containing semiconductor active film
EP1001467A2 (en) * 1998-11-09 2000-05-17 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of manufacturing the same
EP1003223A2 (en) * 1998-11-17 2000-05-24 Sel Semiconductor Energy Laboratory Co., Ltd. Method of fabricating a TFT

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197864A (en) * 1984-10-18 1986-05-16 Asahi Glass Co Ltd Thin film transistor
JP2503656B2 (en) * 1989-05-31 1996-06-05 日本電気株式会社 Thin film field effect transistor and method of manufacturing the same
JP3214091B2 (en) * 1992-09-18 2001-10-02 松下電器産業株式会社 Method for manufacturing thin film transistor
JPH07321329A (en) * 1994-05-27 1995-12-08 Matsushita Electric Ind Co Ltd Method for manufacturing thin film transistor and liquid display unit
JPH08335687A (en) * 1995-06-07 1996-12-17 Fuji Xerox Co Ltd Manufacture of thin film photoelectric conversion device
JPH0974206A (en) * 1995-09-04 1997-03-18 Semiconductor Energy Lab Co Ltd Semiconductor device and manufacture thereof
JPH10223907A (en) * 1997-02-07 1998-08-21 Toshiba Corp Thin-film transistor and lcd display device, and manufacture of the same
US6037195A (en) * 1997-09-25 2000-03-14 Kabushiki Kaisha Toshiba Process of producing thin film transistor
EP1017108B1 (en) * 1998-12-25 2009-02-18 Semiconductor Energy Laboratory Co., Ltd. Semiconductor devices and methods of manufacturing the same

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07202210A (en) * 1993-12-28 1995-08-04 Sharp Corp Thin film transistor and manufacture thereof
US5807770A (en) * 1995-03-13 1998-09-15 Nec Corporation Fabrication method of semiconductor device containing semiconductor active film
JPH0992840A (en) * 1995-09-28 1997-04-04 Nec Corp Liquid crystal display device and its manufacture
WO1998027583A1 (en) * 1996-12-19 1998-06-25 Koninklijke Philips Electronics N.V. Electronic devices and their manufacture
EP1001467A2 (en) * 1998-11-09 2000-05-17 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of manufacturing the same
EP1003223A2 (en) * 1998-11-17 2000-05-24 Sel Semiconductor Energy Laboratory Co., Ltd. Method of fabricating a TFT

Also Published As

Publication number Publication date
GB2396743A (en) 2004-06-30
GB2393575A (en) 2004-03-31
GB2393574B (en) 2004-06-02
GB2393574A (en) 2004-03-31
GB0408368D0 (en) 2004-05-19
GB2396744A (en) 2004-06-30
GB0330024D0 (en) 2004-01-28
GB2393575B (en) 2004-06-02
GB0330022D0 (en) 2004-01-28
GB2396744B (en) 2004-08-18
GB0330021D0 (en) 2004-01-28
GB0408229D0 (en) 2004-05-19
GB2393576B (en) 2004-05-19
GB2393576A (en) 2004-03-31

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20080309