GB2348212B - Treatment installation for flat substrates - Google Patents

Treatment installation for flat substrates

Info

Publication number
GB2348212B
GB2348212B GB0006605A GB0006605A GB2348212B GB 2348212 B GB2348212 B GB 2348212B GB 0006605 A GB0006605 A GB 0006605A GB 0006605 A GB0006605 A GB 0006605A GB 2348212 B GB2348212 B GB 2348212B
Authority
GB
United Kingdom
Prior art keywords
treatment installation
flat substrates
substrates
flat
installation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0006605A
Other languages
English (en)
Other versions
GB0006605D0 (en
GB2348212A (en
Inventor
Karl-Heinrich Wenk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Leybold Systems GmbH
Applied Materials GmbH and Co KG
Oerlikon Deutschland Holding GmbH
Original Assignee
Leybold AG
Balzers und Leybold Deutschland Holding AG
Leybold Systems GmbH
Unaxis Deutschland Holding GmbH
Applied Films GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG, Balzers und Leybold Deutschland Holding AG, Leybold Systems GmbH, Unaxis Deutschland Holding GmbH, Applied Films GmbH and Co KG filed Critical Leybold AG
Publication of GB0006605D0 publication Critical patent/GB0006605D0/en
Publication of GB2348212A publication Critical patent/GB2348212A/en
Application granted granted Critical
Publication of GB2348212B publication Critical patent/GB2348212B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
GB0006605A 1999-03-20 2000-03-17 Treatment installation for flat substrates Expired - Fee Related GB2348212B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19912707A DE19912707B4 (de) 1999-03-20 1999-03-20 Behandlungsanlage für flache Substrate

Publications (3)

Publication Number Publication Date
GB0006605D0 GB0006605D0 (en) 2000-05-10
GB2348212A GB2348212A (en) 2000-09-27
GB2348212B true GB2348212B (en) 2003-07-30

Family

ID=7901846

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0006605A Expired - Fee Related GB2348212B (en) 1999-03-20 2000-03-17 Treatment installation for flat substrates

Country Status (3)

Country Link
DE (1) DE19912707B4 (it)
GB (1) GB2348212B (it)
IT (1) IT1316806B1 (it)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2824080B1 (fr) * 2001-04-30 2004-03-05 Tecmachine Dispositif d'introduction d'un materiau souple en bande dans une enceinte
US7799182B2 (en) 2006-12-01 2010-09-21 Applied Materials, Inc. Electroplating on roll-to-roll flexible solar cell substrates
DE102009017305B4 (de) * 2009-04-16 2012-12-06 Von Ardenne Anlagentechnik Gmbh Einrichtung zum Transport von Substraten durch Vakuumanlagen

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4478878A (en) * 1981-09-01 1984-10-23 Siemens Aktiengesellschaft Method for the preparation of metal-free strips in the metal vapor deposition of an insulating tape
US5350598A (en) * 1993-03-27 1994-09-27 Leybold Aktiengesellschaft Apparatus and method for selectively coating a substrate in strip form
GB2306173A (en) * 1995-10-11 1997-04-30 Leybold Ag Coating plant with pivotting contact rollers
GB2306172A (en) * 1995-10-11 1997-04-30 Leybold Ag Coating plant with dismountable guide rollers
US5652022A (en) * 1995-07-28 1997-07-29 Balzers Und Leybold Deutschland Holding Ag Method and apparatus for the production of metal-free areas during metal vapor deposition

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1279426B (de) * 1966-08-24 1968-10-03 Leybold Heraeus Gmbh & Co Kg Bandbedampfungsvorrichtung
DE2747061A1 (de) * 1977-10-20 1979-04-26 Leybold Heraeus Gmbh & Co Kg Verfahren und vorrichtung zum beschichten von baendern in vakuumanlagen mit schleuseneinrichtungen
JPH01306562A (ja) * 1988-06-04 1989-12-11 Nippon Steel Corp 真空チャンバー用シール装置
JPH02294481A (ja) * 1989-05-09 1990-12-05 Matsushita Electric Ind Co Ltd 蒸着装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4478878A (en) * 1981-09-01 1984-10-23 Siemens Aktiengesellschaft Method for the preparation of metal-free strips in the metal vapor deposition of an insulating tape
US5350598A (en) * 1993-03-27 1994-09-27 Leybold Aktiengesellschaft Apparatus and method for selectively coating a substrate in strip form
US5652022A (en) * 1995-07-28 1997-07-29 Balzers Und Leybold Deutschland Holding Ag Method and apparatus for the production of metal-free areas during metal vapor deposition
GB2306173A (en) * 1995-10-11 1997-04-30 Leybold Ag Coating plant with pivotting contact rollers
GB2306172A (en) * 1995-10-11 1997-04-30 Leybold Ag Coating plant with dismountable guide rollers

Also Published As

Publication number Publication date
DE19912707A1 (de) 2000-09-21
ITMI20000564A1 (it) 2001-09-17
GB0006605D0 (en) 2000-05-10
DE19912707B4 (de) 2010-01-21
IT1316806B1 (it) 2003-05-12
GB2348212A (en) 2000-09-27
ITMI20000564A0 (it) 2000-03-17

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20140317