IT1316806B1 - Impianto di trattamento per substrati piatti - Google Patents
Impianto di trattamento per substrati piattiInfo
- Publication number
- IT1316806B1 IT1316806B1 IT2000MI000564A ITMI20000564A IT1316806B1 IT 1316806 B1 IT1316806 B1 IT 1316806B1 IT 2000MI000564 A IT2000MI000564 A IT 2000MI000564A IT MI20000564 A ITMI20000564 A IT MI20000564A IT 1316806 B1 IT1316806 B1 IT 1316806B1
- Authority
- IT
- Italy
- Prior art keywords
- treatment plant
- flat substrates
- substrates
- flat
- plant
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19912707A DE19912707B4 (de) | 1999-03-20 | 1999-03-20 | Behandlungsanlage für flache Substrate |
Publications (3)
Publication Number | Publication Date |
---|---|
ITMI20000564A0 ITMI20000564A0 (it) | 2000-03-17 |
ITMI20000564A1 ITMI20000564A1 (it) | 2001-09-17 |
IT1316806B1 true IT1316806B1 (it) | 2003-05-12 |
Family
ID=7901846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT2000MI000564A IT1316806B1 (it) | 1999-03-20 | 2000-03-17 | Impianto di trattamento per substrati piatti |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE19912707B4 (it) |
GB (1) | GB2348212B (it) |
IT (1) | IT1316806B1 (it) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2824080B1 (fr) * | 2001-04-30 | 2004-03-05 | Tecmachine | Dispositif d'introduction d'un materiau souple en bande dans une enceinte |
US7799182B2 (en) | 2006-12-01 | 2010-09-21 | Applied Materials, Inc. | Electroplating on roll-to-roll flexible solar cell substrates |
DE102009017305B4 (de) * | 2009-04-16 | 2012-12-06 | Von Ardenne Anlagentechnik Gmbh | Einrichtung zum Transport von Substraten durch Vakuumanlagen |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1279426B (de) * | 1966-08-24 | 1968-10-03 | Leybold Heraeus Gmbh & Co Kg | Bandbedampfungsvorrichtung |
DE2747061A1 (de) * | 1977-10-20 | 1979-04-26 | Leybold Heraeus Gmbh & Co Kg | Verfahren und vorrichtung zum beschichten von baendern in vakuumanlagen mit schleuseneinrichtungen |
DE3224234A1 (de) * | 1981-09-01 | 1983-03-10 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur herstellung von metallfreien streifen bei der metallbedampfung eines isolierstoffbandes und vorrichtung zur durchfuehrung des verfahrens |
JPH01306562A (ja) * | 1988-06-04 | 1989-12-11 | Nippon Steel Corp | 真空チャンバー用シール装置 |
JPH02294481A (ja) * | 1989-05-09 | 1990-12-05 | Matsushita Electric Ind Co Ltd | 蒸着装置 |
DE4310085A1 (de) * | 1993-03-27 | 1994-09-29 | Leybold Ag | Verfahren und Vorrichtung zur Erzeugung von Mustern auf Substraten |
DE19527604A1 (de) * | 1995-07-28 | 1997-01-30 | Leybold Ag | Verfahren und Vorrichtung zur Herstellung von metallfreien Streifen bei der Metallbedampfung |
DE19537779A1 (de) * | 1995-10-11 | 1997-04-17 | Leybold Ag | Beschichtungsanlage für Folien |
DE19537781A1 (de) * | 1995-10-11 | 1997-04-17 | Leybold Ag | Beschichtungsanlage für Folien |
-
1999
- 1999-03-20 DE DE19912707A patent/DE19912707B4/de not_active Expired - Fee Related
-
2000
- 2000-03-17 GB GB0006605A patent/GB2348212B/en not_active Expired - Fee Related
- 2000-03-17 IT IT2000MI000564A patent/IT1316806B1/it active
Also Published As
Publication number | Publication date |
---|---|
GB2348212B (en) | 2003-07-30 |
ITMI20000564A0 (it) | 2000-03-17 |
GB2348212A (en) | 2000-09-27 |
DE19912707B4 (de) | 2010-01-21 |
DE19912707A1 (de) | 2000-09-21 |
GB0006605D0 (en) | 2000-05-10 |
ITMI20000564A1 (it) | 2001-09-17 |
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