GB0006605D0 - Treatment installation for flat substrates - Google Patents

Treatment installation for flat substrates

Info

Publication number
GB0006605D0
GB0006605D0 GBGB0006605.0A GB0006605A GB0006605D0 GB 0006605 D0 GB0006605 D0 GB 0006605D0 GB 0006605 A GB0006605 A GB 0006605A GB 0006605 D0 GB0006605 D0 GB 0006605D0
Authority
GB
United Kingdom
Prior art keywords
treatment installation
flat substrates
substrates
flat
installation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB0006605.0A
Other versions
GB2348212B (en
GB2348212A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Systems GmbH
Original Assignee
Leybold Systems GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Systems GmbH filed Critical Leybold Systems GmbH
Publication of GB0006605D0 publication Critical patent/GB0006605D0/en
Publication of GB2348212A publication Critical patent/GB2348212A/en
Application granted granted Critical
Publication of GB2348212B publication Critical patent/GB2348212B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
GB0006605A 1999-03-20 2000-03-17 Treatment installation for flat substrates Expired - Fee Related GB2348212B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19912707A DE19912707B4 (en) 1999-03-20 1999-03-20 Treatment plant for flat substrates

Publications (3)

Publication Number Publication Date
GB0006605D0 true GB0006605D0 (en) 2000-05-10
GB2348212A GB2348212A (en) 2000-09-27
GB2348212B GB2348212B (en) 2003-07-30

Family

ID=7901846

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0006605A Expired - Fee Related GB2348212B (en) 1999-03-20 2000-03-17 Treatment installation for flat substrates

Country Status (3)

Country Link
DE (1) DE19912707B4 (en)
GB (1) GB2348212B (en)
IT (1) IT1316806B1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2824080B1 (en) * 2001-04-30 2004-03-05 Tecmachine DEVICE FOR INTRODUCING A FLEXIBLE STRIP MATERIAL INTO AN ENCLOSURE
US7799182B2 (en) 2006-12-01 2010-09-21 Applied Materials, Inc. Electroplating on roll-to-roll flexible solar cell substrates
DE102009017305B4 (en) * 2009-04-16 2012-12-06 Von Ardenne Anlagentechnik Gmbh Device for transporting substrates by vacuum systems

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1279426B (en) * 1966-08-24 1968-10-03 Leybold Heraeus Gmbh & Co Kg Tape evaporation device
DE2747061A1 (en) * 1977-10-20 1979-04-26 Leybold Heraeus Gmbh & Co Kg Vacuum chamber for coating strip - has air lock chambers to permit continuous coating
DE3224234A1 (en) * 1981-09-01 1983-03-10 Siemens AG, 1000 Berlin und 8000 München METHOD FOR PRODUCING METAL-FREE STRIPS IN THE METAL STEAMING OF AN INSULATING TAPE AND DEVICE FOR IMPLEMENTING THE METHOD
JPH01306562A (en) * 1988-06-04 1989-12-11 Nippon Steel Corp Sealing device for vacuum chamber
JPH02294481A (en) * 1989-05-09 1990-12-05 Matsushita Electric Ind Co Ltd Vapor deposition device
DE4310085A1 (en) * 1993-03-27 1994-09-29 Leybold Ag Method and device for creating patterns on substrates
DE19527604A1 (en) * 1995-07-28 1997-01-30 Leybold Ag Method and device for producing metal-free strips in metal vapor deposition
DE19537781A1 (en) * 1995-10-11 1997-04-17 Leybold Ag Coating line for foils
DE19537779A1 (en) * 1995-10-11 1997-04-17 Leybold Ag Coating line for foils

Also Published As

Publication number Publication date
ITMI20000564A0 (en) 2000-03-17
DE19912707B4 (en) 2010-01-21
ITMI20000564A1 (en) 2001-09-17
GB2348212B (en) 2003-07-30
IT1316806B1 (en) 2003-05-12
DE19912707A1 (en) 2000-09-21
GB2348212A (en) 2000-09-27

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20140317