GB2320809A8 - Forming a protective film in a semiconductor device - Google Patents
Forming a protective film in a semiconductor deviceInfo
- Publication number
- GB2320809A8 GB2320809A8 GB9727080A GB9727080A GB2320809A8 GB 2320809 A8 GB2320809 A8 GB 2320809A8 GB 9727080 A GB9727080 A GB 9727080A GB 9727080 A GB9727080 A GB 9727080A GB 2320809 A8 GB2320809 A8 GB 2320809A8
- Authority
- GB
- United Kingdom
- Prior art keywords
- forming
- semiconductor device
- protective film
- protective
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
- H01L21/02134—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC the material comprising hydrogen silsesquioxane, e.g. HSQ
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
- H01L21/02137—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC the material comprising alkyl silsesquioxane, e.g. MSQ
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76819—Smoothing of the dielectric
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76835—Combinations of two or more different dielectric layers having a low dielectric constant
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960074957A KR19980055721A (en) | 1996-12-28 | 1996-12-28 | Method of forming protective film of semiconductor device |
Publications (4)
Publication Number | Publication Date |
---|---|
GB9727080D0 GB9727080D0 (en) | 1998-02-18 |
GB2320809A GB2320809A (en) | 1998-07-01 |
GB2320809A8 true GB2320809A8 (en) | 1998-08-04 |
GB2320809B GB2320809B (en) | 2001-09-12 |
Family
ID=19491706
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9727080A Expired - Fee Related GB2320809B (en) | 1996-12-28 | 1997-12-23 | Method of forming a protective film in a semiconductor device |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPH10199877A (en) |
KR (1) | KR19980055721A (en) |
CN (1) | CN1113398C (en) |
DE (1) | DE19757879A1 (en) |
GB (1) | GB2320809B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2358733A (en) * | 1999-08-30 | 2001-08-01 | Lucent Technologies Inc | Integrated circuit with multi-layer dielectric having reduced capacitance |
GB2358734A (en) * | 1999-08-30 | 2001-08-01 | Lucent Technologies Inc | Process for fabricating integrated circuit with multi-layer dielectric having reduced capacitance |
CN100444331C (en) * | 2003-11-11 | 2008-12-17 | 三星电子株式会社 | Spin-on glass composition and method of forming silicon oxide layer in semiconductor manufacturing process using the same |
WO2005122227A1 (en) | 2004-06-08 | 2005-12-22 | Koninklijke Philips Electronics, N.V. | Reduction of cracking in low-k spin-on-dielectric films |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS501872B1 (en) * | 1970-01-30 | 1975-01-22 | ||
US4091407A (en) * | 1976-11-01 | 1978-05-23 | Rca Corporation | Combination glass/low temperature deposited Siw Nx Hy O.sub.z |
WO1987002828A1 (en) * | 1985-11-04 | 1987-05-07 | Motorola, Inc. | Glass intermetal dielectric |
US5057897A (en) * | 1990-03-05 | 1991-10-15 | Vlsi Technology, Inc. | Charge neutralization using silicon-enriched oxide layer |
US5374833A (en) * | 1990-03-05 | 1994-12-20 | Vlsi Technology, Inc. | Structure for suppression of field inversion caused by charge build-up in the dielectric |
KR970052338A (en) * | 1995-12-23 | 1997-07-29 | 김주용 | Manufacturing method of semiconductor device |
-
1996
- 1996-12-28 KR KR1019960074957A patent/KR19980055721A/en not_active Application Discontinuation
-
1997
- 1997-12-23 GB GB9727080A patent/GB2320809B/en not_active Expired - Fee Related
- 1997-12-24 DE DE19757879A patent/DE19757879A1/en not_active Ceased
- 1997-12-25 CN CN97125706A patent/CN1113398C/en not_active Expired - Fee Related
- 1997-12-26 JP JP9370264A patent/JPH10199877A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
CN1187027A (en) | 1998-07-08 |
KR19980055721A (en) | 1998-09-25 |
GB9727080D0 (en) | 1998-02-18 |
DE19757879A1 (en) | 1998-07-02 |
GB2320809B (en) | 2001-09-12 |
CN1113398C (en) | 2003-07-02 |
GB2320809A (en) | 1998-07-01 |
JPH10199877A (en) | 1998-07-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20091223 |