GB2248457A - Multiple source evaporation for alloy production - Google Patents
Multiple source evaporation for alloy productionInfo
- Publication number
- GB2248457A GB2248457A GB9121008A GB9121008A GB2248457A GB 2248457 A GB2248457 A GB 2248457A GB 9121008 A GB9121008 A GB 9121008A GB 9121008 A GB9121008 A GB 9121008A GB 2248457 A GB2248457 A GB 2248457A
- Authority
- GB
- United Kingdom
- Prior art keywords
- multiple source
- alloy production
- source evaporation
- evaporation
- alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8909088A GB2230792A (en) | 1989-04-21 | 1989-04-21 | Multiple source physical vapour deposition. |
Publications (3)
Publication Number | Publication Date |
---|---|
GB9121008D0 GB9121008D0 (en) | 1991-12-11 |
GB2248457A true GB2248457A (en) | 1992-04-08 |
GB2248457B GB2248457B (en) | 1993-05-05 |
Family
ID=10655463
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB8909088A Withdrawn GB2230792A (en) | 1989-04-21 | 1989-04-21 | Multiple source physical vapour deposition. |
GB9121008A Expired - Fee Related GB2248457B (en) | 1989-04-21 | 1991-10-03 | Multiple source evaporation for bulk alloy production |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB8909088A Withdrawn GB2230792A (en) | 1989-04-21 | 1989-04-21 | Multiple source physical vapour deposition. |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0469050A1 (en) |
JP (1) | JPH04505478A (en) |
GB (2) | GB2230792A (en) |
WO (1) | WO1990012485A2 (en) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2230792A (en) * | 1989-04-21 | 1990-10-31 | Secr Defence | Multiple source physical vapour deposition. |
GB2248852A (en) * | 1990-10-16 | 1992-04-22 | Secr Defence | Vapour deposition |
GB2262539A (en) * | 1991-12-16 | 1993-06-23 | Secr Defence | Titanium containing magnesium alloy produced by vapour quenching. |
GB2267913A (en) * | 1991-12-16 | 1993-12-22 | Secr Defence | Titanium containing magnesium alloy produced by vapour quenching |
US5253266A (en) * | 1992-07-20 | 1993-10-12 | Intevac, Inc. | MBE effusion source with asymmetrical heaters |
GB9302978D0 (en) * | 1993-02-15 | 1993-03-31 | Secr Defence | Diffusion barrier layers |
BE1010720A3 (en) * | 1996-10-30 | 1998-12-01 | Centre Rech Metallurgique | Method and device for the continuous coating of a substrate in movement by means of a metal alloy in vapour phase |
US6830626B1 (en) * | 1999-10-22 | 2004-12-14 | Kurt J. Lesker Company | Method and apparatus for coating a substrate in a vacuum |
DE10256038A1 (en) * | 2002-11-30 | 2004-06-17 | Applied Films Gmbh & Co. Kg | A steamer |
JP2009149916A (en) * | 2006-09-14 | 2009-07-09 | Ulvac Japan Ltd | Vacuum vapor processing apparatus |
US20130129938A1 (en) * | 2010-01-06 | 2013-05-23 | Direct Vapor Technologies International | Method for the co-evaporation and deposition of materials with differing vapor pressures |
DE102014109195A1 (en) * | 2014-07-01 | 2016-01-07 | Aixtron Se | Apparatus and method for generating a vapor from multiple liquid or solid sources for a CVD or PVD device |
DE102014109196A1 (en) * | 2014-07-01 | 2016-01-07 | Aixtron Se | Apparatus for generating a vapor from a solid or liquid source for a CVD or PVD device |
CN106191785B (en) * | 2016-09-27 | 2018-09-18 | 京东方科技集团股份有限公司 | Crucible, evaporation coating device and deposition system |
EP4053303A1 (en) | 2021-03-01 | 2022-09-07 | Carl Zeiss Vision International GmbH | Vapor deposition method for coating a spectacle lens, physical vapor deposition system and crucible for physical vapor deposition |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3361591A (en) * | 1964-04-15 | 1968-01-02 | Hughes Aircraft Co | Production of thin films of cadmium sulfide, cadmium telluride or cadmium selenide |
FR1534681A (en) * | 1966-06-15 | 1968-08-02 | Continuous zinc metallization process of a strip of dielectric material |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB990288A (en) * | 1961-09-05 | 1965-04-28 | Ibm | Improved method of depositing silicon monoxide films |
GB962868A (en) * | 1961-09-29 | 1964-07-08 | Philips Electrical Ind Ltd | Improvements in or relating to coating objects with light-absorbing transparent or translucent colour layers |
NL6504932A (en) * | 1965-04-17 | 1966-10-18 | ||
GB1206586A (en) * | 1966-09-07 | 1970-09-23 | Mini Of Technology | Vacuum deposition process of forming alloys |
GB1292544A (en) * | 1970-02-04 | 1972-10-11 | Gen Electric Co Ltd | Improvements in or relating to the manufacture of electroluminescent devices |
US3751310A (en) * | 1971-03-25 | 1973-08-07 | Bell Telephone Labor Inc | Germanium doped epitaxial films by the molecular beam method |
GB2084197B (en) * | 1980-09-23 | 1984-02-22 | Univ Delaware | Deposition material by vacuum evaporation |
GB2230792A (en) * | 1989-04-21 | 1990-10-31 | Secr Defence | Multiple source physical vapour deposition. |
-
1989
- 1989-04-21 GB GB8909088A patent/GB2230792A/en not_active Withdrawn
-
1990
- 1990-04-20 JP JP50664490A patent/JPH04505478A/en active Pending
- 1990-04-20 WO PCT/GB1990/000610 patent/WO1990012485A2/en not_active Application Discontinuation
- 1990-04-20 EP EP19900907203 patent/EP0469050A1/en not_active Withdrawn
-
1991
- 1991-10-03 GB GB9121008A patent/GB2248457B/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3361591A (en) * | 1964-04-15 | 1968-01-02 | Hughes Aircraft Co | Production of thin films of cadmium sulfide, cadmium telluride or cadmium selenide |
FR1534681A (en) * | 1966-06-15 | 1968-08-02 | Continuous zinc metallization process of a strip of dielectric material |
Also Published As
Publication number | Publication date |
---|---|
GB2248457B (en) | 1993-05-05 |
EP0469050A1 (en) | 1992-02-05 |
GB2230792A (en) | 1990-10-31 |
JPH04505478A (en) | 1992-09-24 |
GB9121008D0 (en) | 1991-12-11 |
WO1990012485A2 (en) | 1990-11-01 |
GB8909088D0 (en) | 1989-06-07 |
WO1990012485A3 (en) | 1990-11-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19940420 |