GB2226132B - Apparatus for detecting the position of a laser beam - Google Patents

Apparatus for detecting the position of a laser beam

Info

Publication number
GB2226132B
GB2226132B GB8925114A GB8925114A GB2226132B GB 2226132 B GB2226132 B GB 2226132B GB 8925114 A GB8925114 A GB 8925114A GB 8925114 A GB8925114 A GB 8925114A GB 2226132 B GB2226132 B GB 2226132B
Authority
GB
United Kingdom
Prior art keywords
detecting
laser beam
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB8925114A
Other languages
English (en)
Other versions
GB8925114D0 (en
GB2226132A (en
Inventor
Horst-Ulf Schottelius
Rolf Mosandl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Diehl Verwaltungs Stiftung
Original Assignee
Diehl GmbH and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Diehl GmbH and Co filed Critical Diehl GmbH and Co
Publication of GB8925114D0 publication Critical patent/GB8925114D0/en
Publication of GB2226132A publication Critical patent/GB2226132A/en
Application granted granted Critical
Publication of GB2226132B publication Critical patent/GB2226132B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Lasers (AREA)
  • Laser Beam Processing (AREA)
  • Laser Surgery Devices (AREA)
GB8925114A 1988-11-30 1989-11-07 Apparatus for detecting the position of a laser beam Expired - Lifetime GB2226132B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19883840278 DE3840278A1 (de) 1988-11-30 1988-11-30 Einrichtung zur erfassung eines laserstrahls

Publications (3)

Publication Number Publication Date
GB8925114D0 GB8925114D0 (en) 1989-12-28
GB2226132A GB2226132A (en) 1990-06-20
GB2226132B true GB2226132B (en) 1992-10-14

Family

ID=6368126

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8925114A Expired - Lifetime GB2226132B (en) 1988-11-30 1989-11-07 Apparatus for detecting the position of a laser beam

Country Status (3)

Country Link
DE (1) DE3840278A1 (enrdf_load_stackoverflow)
FR (1) FR2640775B1 (enrdf_load_stackoverflow)
GB (1) GB2226132B (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4200505C2 (de) * 1992-01-11 2003-04-10 Diehl Stiftung & Co Vorrichtungen zur Beobachtung und Regelung der Geometrie und/oder der Energieverteilung des mittels eines Laserstrahles auf einem zu bearbeitenden Werkstück erzeugten Strahlflecks
DE102011005775B4 (de) 2011-03-18 2012-11-15 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Detektor und Verfahren zum Erfassen einer Ausrichtung eines Laserstrahls in einer Laserbearbeitungsmaschine sowie Laserbearbeitungsmaschine
WO2015172816A1 (de) * 2014-05-13 2015-11-19 Trumpf Laser- Und Systemtechnik Gmbh Einrichtung zur überwachung der ausrichtung eines laserstrahls und euv-strahlungserzeugungsvorrichtung damit
WO2019162038A1 (en) * 2018-02-20 2019-08-29 Asml Netherlands B.V. Sensor system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2083217A (en) * 1980-09-02 1982-03-17 Amada Co Ltd Determining beam position
GB2117511A (en) * 1982-02-19 1983-10-12 Dr Paul Derek Cook Laser beam alignment detection
GB2161599A (en) * 1984-07-14 1986-01-15 Richard Ian Emmess Alignment device for tools
EP0304664A2 (en) * 1987-08-28 1989-03-01 Westinghouse Electric Corporation Detector for aligning high power lasers

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3753150A (en) * 1972-09-06 1973-08-14 Avco Corp Laser mirror positioning apparatus
US4035654A (en) * 1976-01-12 1977-07-12 Elmer Frank J Optical alignment sensor
JPS59195890A (ja) * 1983-04-20 1984-11-07 Mitsubishi Electric Corp レ−ザ光軸調整器
FR2553910B1 (fr) * 1983-10-24 1986-03-21 Commissariat Energie Atomique Detecteur thermoelectrique d'alignement d'un faisceau laser et dispositif d'asservissement utilisant ce detecteur, pour l'alignement automatique d'un faisceau laser
FR2616267A1 (fr) * 1987-06-02 1988-12-09 Commissariat Energie Atomique Laser a moyens d'asservissement en mode fondamental
DE3812091C1 (enrdf_load_stackoverflow) * 1988-04-12 1989-06-01 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2083217A (en) * 1980-09-02 1982-03-17 Amada Co Ltd Determining beam position
GB2117511A (en) * 1982-02-19 1983-10-12 Dr Paul Derek Cook Laser beam alignment detection
GB2161599A (en) * 1984-07-14 1986-01-15 Richard Ian Emmess Alignment device for tools
EP0304664A2 (en) * 1987-08-28 1989-03-01 Westinghouse Electric Corporation Detector for aligning high power lasers

Also Published As

Publication number Publication date
DE3840278C2 (enrdf_load_stackoverflow) 1991-04-18
GB8925114D0 (en) 1989-12-28
GB2226132A (en) 1990-06-20
DE3840278A1 (de) 1990-05-31
FR2640775A1 (fr) 1990-06-22
FR2640775B1 (fr) 1994-11-04

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19941107