GB2175855B - Aqueous solution and gaseous-aqueous combination for etching copper - Google Patents

Aqueous solution and gaseous-aqueous combination for etching copper

Info

Publication number
GB2175855B
GB2175855B GB08615381A GB8615381A GB2175855B GB 2175855 B GB2175855 B GB 2175855B GB 08615381 A GB08615381 A GB 08615381A GB 8615381 A GB8615381 A GB 8615381A GB 2175855 B GB2175855 B GB 2175855B
Authority
GB
United Kingdom
Prior art keywords
aqueous
gaseous
combination
etching copper
aqueous solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08615381A
Other versions
GB2175855A (en
GB8615381D0 (en
Inventor
Norvell John Nelson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Psi Star
PSI Star Inc
Original Assignee
Psi Star
PSI Star Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/563,683 external-priority patent/US4497687A/en
Application filed by Psi Star, PSI Star Inc filed Critical Psi Star
Publication of GB8615381D0 publication Critical patent/GB8615381D0/en
Publication of GB2175855A publication Critical patent/GB2175855A/en
Application granted granted Critical
Publication of GB2175855B publication Critical patent/GB2175855B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/067—Etchants
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/12—Gaseous compositions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/18—Acidic compositions for etching copper or alloys thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • ing And Chemical Polishing (AREA)
GB08615381A 1983-06-06 1986-06-24 Aqueous solution and gaseous-aqueous combination for etching copper Expired GB2175855B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US50115983A 1983-06-06 1983-06-06
US51794383A 1983-07-28 1983-07-28
US06/563,683 US4497687A (en) 1983-07-28 1983-12-20 Aqueous process for etching cooper and other metals

Publications (3)

Publication Number Publication Date
GB8615381D0 GB8615381D0 (en) 1986-07-30
GB2175855A GB2175855A (en) 1986-12-10
GB2175855B true GB2175855B (en) 1987-11-18

Family

ID=27414166

Family Applications (2)

Application Number Title Priority Date Filing Date
GB08413067A Expired GB2143778B (en) 1983-06-06 1984-05-22 Etching copper and other metals
GB08615381A Expired GB2175855B (en) 1983-06-06 1986-06-24 Aqueous solution and gaseous-aqueous combination for etching copper

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB08413067A Expired GB2143778B (en) 1983-06-06 1984-05-22 Etching copper and other metals

Country Status (4)

Country Link
CA (1) CA1221896A (en)
DE (2) DE3420309A1 (en)
FR (1) FR2547834A1 (en)
GB (2) GB2143778B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4632727A (en) * 1985-08-12 1986-12-30 Psi Star Copper etching process and solution
US4695348A (en) * 1986-09-15 1987-09-22 Psi Star Copper etching process and product

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB705053A (en) * 1949-02-10 1954-03-10 Coates Brothers & Co Improvements in photomechanical printing surfaces and methods of producing the same
US2647864A (en) * 1952-05-29 1953-08-04 Daniel L Goffredo Etching process
GB874365A (en) * 1957-10-08 1961-08-02 Ball Brothers Co Process for etching alloys and etch bath for use therein
US3464805A (en) * 1964-12-31 1969-09-02 Texas Instruments Inc Method for making a composite glass-to-metal seal with one transitory metal
GB1180174A (en) * 1967-10-14 1970-02-04 Concast Ag Improvements in Continuous Casting Moulds
JPS4834656B1 (en) * 1968-08-02 1973-10-23
GB1294804A (en) * 1970-07-24 1972-11-01 Shipley Co Etchant for cupreous metals
US3671344A (en) * 1970-12-04 1972-06-20 Fmc Corp Process of etching metal with ammonium persulfate with recovery and recycling
GB1371035A (en) * 1971-09-21 1974-10-23 Rolls Royce Method of etching aluminium alloys
GB1353960A (en) * 1971-09-21 1974-05-22 Rolls Royce Method of etching a partially masked surface
US4297257A (en) * 1980-04-17 1981-10-27 Dart Industries Inc. Metal stripping composition and method

Also Published As

Publication number Publication date
DE3421064A1 (en) 1984-12-06
CA1221896A (en) 1987-05-19
DE3420309A1 (en) 1984-12-06
GB8413067D0 (en) 1984-06-27
GB2143778B (en) 1987-11-18
GB2143778A (en) 1985-02-20
GB2175855A (en) 1986-12-10
GB8615381D0 (en) 1986-07-30
FR2547834A1 (en) 1984-12-28

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee