GB2173956A - Integrated electrical transformer - Google Patents

Integrated electrical transformer Download PDF

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Publication number
GB2173956A
GB2173956A GB8508332A GB8508332A GB2173956A GB 2173956 A GB2173956 A GB 2173956A GB 8508332 A GB8508332 A GB 8508332A GB 8508332 A GB8508332 A GB 8508332A GB 2173956 A GB2173956 A GB 2173956A
Authority
GB
United Kingdom
Prior art keywords
primary
turns
gallium arsenide
conductor turns
conductorturns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB8508332A
Other versions
GB8508332D0 (en
GB2173956B (en
Inventor
Ian Gregory Eddison
John Benedict Swift
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plessey Co Ltd
Original Assignee
Plessey Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plessey Co Ltd filed Critical Plessey Co Ltd
Priority to GB8508332A priority Critical patent/GB2173956B/en
Publication of GB8508332D0 publication Critical patent/GB8508332D0/en
Publication of GB2173956A publication Critical patent/GB2173956A/en
Application granted granted Critical
Publication of GB2173956B publication Critical patent/GB2173956B/en
Expired legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/58Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/64Impedance arrangements
    • H01L23/645Inductive arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • H01F27/2804Printed windings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • H01F17/0006Printed inductances
    • H01F2017/0086Printed inductances on semiconductor substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3011Impedance

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

A planar transformer comprises an insulating or semiconductor substrate 1, such as gallium arsenide, in which the primary and secondary conductor turns of spiral configuration are formed at different levels within a dielectric layer 2,3 applied to the substrate. This configuration enables the primary and secondary conductor turns to be located in closer proximity than known co-planar designs, thereby providing improved magnetic coupling between the conductors. Furthermore, the width of the conductor turns can be increased, thereby providing a further improvement in the magnetic coupling and enabling a reduction in the resistive loss of the conductor turns. <IMAGE>

Description

SPECIFICATION Improvements relating to electric transformers This invention relates to electric transformers and relates more specificallyto planar transformers which may be embodied in integrated circuits including other passive and/or active circuitcomponents.
Such planartransformers embodied in gallium arsenide monolithic microwave integrated circuits for performing given microwave functions may comprise co-planar interwound primary and secondary conductorturns (metallisation) of rectangular spiral configuration providing an approximate 1:1 transformer turns ratio. These transformers, the interwound metallised turns of which lie side-by-side on the dielectric coated surface of a gallium arsenide subs- trate, only occupy small surface areas but they can perform several important electronic functions. Firstly, the planartransformer can be designed to provide over a relatively narrow bandwidth an efficient interstage impedence matching element two replace the traditional larger area multi-element matching circuit.
Secondly, the inherent isolation ofthetransformer permits the straightforward introduction of d.c. bias withoutthe need for large area MIM decoupiing capacitors.
However, the transformer action in these small area planartransformers relies upon magnetic coupling between the co-planar primary and secondary metallised turns lying side-by-side on the dielectric coated gallium arsenide substrate. With typicalmetallisation thickness of about 3 microns and minimum line separations of between 3-5 microns being presently achievable in gallium arsenide integrated circuit production processes the coupling factor (K) ofthe transformer may be 0.8 at best against the ideal transformer coupling factor of unity.As a direct consequence of its low coupling factorthe planar transformer with co-planar interwound primary and secondary conductorturns will have high insertion loss and it will also provide a poor impedance matching element thereby limiting the application of this otherwise useful small area circuit component.
The present invention seeks to improve the magne tic coupling between the primaryand secondary conductorturns of a planartransformer and thereby inter alia reduce the insertion loss of the transformer.
According to the present invention there is provided a planartransformercomprising an insulating or semiconductor substrate (e.g. gallium arsenide), in which primary and secondary conductorturns of spiral configuration are formed at slightly different levels within the dielectric layer material applied to the semiconductor substrate.
Since the dielectric layers normally applied to the gallium arsenide substrate in gallium arsenide integrated circuits are between 1 and 2 microns thick it will be apparent that the primary and secondary conductorturns ofthe planartransformer may be in significantly closer proximity to provide better magnetic coupling than in the co-planar interwound construction previously referred to. Sincethe primary and secondary conductors are at different levels in the circuitthewidth of the conductorturns can be increased and thereby provide further improvement in the coupling factor whilst reducing the resistive loss.
The primary and secondary spiral conductors which may be formed be metallisation techniques may be located in vertical alignment or they may be displaced from each other in the horizontal direction so as effectively to provide interwound primary and secon dary turns at different levels in the insulating or dielectric material. The latter construction may enable a high coupling factor and reduced parasitic interspiral capacitance to be achieved.
The widths of the primary and secondary conductor turns may be the same or different widths of conductorturns may be provided in order to reduce the separation between the primary and secondary conductorturns.
By way of example the present invention will now be described with reference to the accompanying drawings in which: Figures 1 and 2 show diagrammatic plan and part cross-sectional views of a known interwound planar transformerforming part of a monolithic microwave gallium arsenide integrated circuit; Figures 3 and 4 show diagrammatic plan and part cross-sectional views of a planartransformeraccord- ing to the present invention as part of an integrated circuit; and Figure 5 shows a cross-sectional view of an alternative form of planartransformerto that shown in Figures 3and 4.
Referring to Figures 1 and to Figure 2 which is a cross-sectional view taken along the line A-A in Figure 1 a gallium arsenide monolithic microwave integrated circuit comprises a gallium arsenide substrate 1 provided with super-imposed dielectric layers 2 and 3.
After application to the sg Bqtrate 1 of the first dielectric layer 2 primary and secondary connecting strips4and 5Ofthe planartransformerareformed on the dielectric layer 2 by means of a metallisation process. Afterthe application of the outer dielectric layer 3 co-planar interwound primary and secondary conductorturns 6 and 7 of rectangular spiral configuration are formed on the dielectric layer 3 by a further metallisation process step.As will best be appreciated from Figure 1, the inner ends of the metallised primary and secondary conducutorturns are electrically connected to the respective connecting strips 4 and 5 while the outer ends of the primary and secondary conductorturns are electrically connected to further metallised connecting strips 8 and 9 which may, like the strips 4 and 5, also be provided on the dielectric layer 2 by a metallisation process before application of the second dielectric layer 3.
The planartransformer depicted has a turns ratio of approximately 1:1 and the transformer action relies upon the magnetic coupling between the primary and secondary turns as illustrated in Figure 2. Since the minimum separation "x" that can be provided between the metallised primary and secondary conductors using existing gallium arsenide techniques is between 3 to 5 microns the transformer coupling factor (K) may only be as high as 0.8. Consequently, the planartransformerwill have a relatively high insertion loss and it will also provide a poor input impedance match which accordingly limits the ap- plication ofthetransformer.
Referring now to Figures 3 and 4 of the accompany- ing drawings these show a planartransformerconstructed according to the present invention. It will be seen that primary a nd secondary conducto r tu rns 10 and 11 of generally rectangularspiral configuration are vertically aligned with one another at slightly different levels in the circuit. Unlike the case of Figures 1 and 2 transformer primary and secondary winding connecting strips 12 and 13 are formed on the surface ofthe gallium arsenide substrate 1 by a suitable metallisation process before the first dielectric layer 2 is applied.The rectangular spiral turns ofthe primary winding are then produced by a metallisation process on the dielectric layer2 following which the second dielectric layer 3 is applied. The secondary winding comprising spiral turns 11 arethenformedbya metallisation technique on the surface ofthe outer dielectric layer3 so that the secondary conductor turns 11 are located directly overthe primary conductor turns 10. Atypical spacing between the primary and secondaryconductorturns 10 and 11 will be less than 1 micron (i.e.typical thickness ofthe dielectric layers 2 and 3).As a consequence the reduced spacing between the primary and secondary conductorturns contributes to significantly improved magnetic cou pling and thus the coupling factor (K) between the primary and secondary is nearer two unity. This tighter coupling resultsin lower insertion lossofthe transfor- mer and better matching capabilities. Since the primary and secondaryconductorturns areatdiffe rent levels the width oftheturns may be increased to reduce the resistive loss of the transformer.
In an alternative embodiment shown in crosssection in Figure 5the primary and secondary conductorturns 14 and 15 are effectively interwound atdifferentlevels but the reduced spacing between the primary and secondary conductorturns compared with the known construction of Figures 1 and 2 provides a significantly tighter coupling and thus provides a h igher ( K) factor. The relative displacement ofthe primary and secondary may also serve to reduceparasiticinterspiral capacitance.
Although in the particular embodiments illustrated the conductors of the primary and secondary windings are substantially equal width is should be understood thatconductors of differentwidth could be used without departing from the spirit ofthe invention and may in fact serve to reduce still further theseparation between the turns ofthe primary and secondary and thus improve the coupling factor of the transformer.
In the embodiments shown a back metallisation layer 16 is also provided.

Claims (6)

1. Aplanartransformercomprising an insulating or semiconductor substrate (e.g. gallium arsenide) in which primary and secondary conductorturns of spiral configuration are formed atslightly different levels within the dielectric layer material applied to the semiconductor substrate.
2. A planartransformeras claimed in claim 1, in which the primary and secondary spiral conductors are located in vertical alignment.
3. A planartransformeras claimed in claim 1, in which the primary and secondary spiral conductors are displaced from each other in the horizontal direction so as effectively to provide interwound primary and secondary turns at different levels in the insulating or dielectric material.
4. A planartransformer as claimed in any preceding claim, in which the spiral conductors are formed by metallisation techniques.
5. Aplanartransformer as claimed in any preceding claim, in which the primary and secondaryturns are ofdifferentwidths in order to reduce the separation between the primary and secondary conductor turns.
6. A planartransformer substantially as hereinbefore described with reference to the accompanying drawings.
GB8508332A 1985-03-29 1985-03-29 Improvements relating to electric transformers Expired GB2173956B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8508332A GB2173956B (en) 1985-03-29 1985-03-29 Improvements relating to electric transformers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8508332A GB2173956B (en) 1985-03-29 1985-03-29 Improvements relating to electric transformers

Publications (3)

Publication Number Publication Date
GB8508332D0 GB8508332D0 (en) 1985-05-09
GB2173956A true GB2173956A (en) 1986-10-22
GB2173956B GB2173956B (en) 1989-01-05

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Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1987007074A1 (en) * 1986-05-08 1987-11-19 American Telephone & Telegraph Company Transformer structure
EP0413348A2 (en) * 1989-08-18 1991-02-20 Mitsubishi Denki Kabushiki Kaisha Semiconductor integrated circuit
EP0506362A2 (en) * 1991-03-25 1992-09-30 Satosen Co., Ltd. Coil
GB2269057A (en) * 1992-05-27 1994-01-26 Fuji Electric Co Ltd Thin film transformer
EP0713229A1 (en) * 1994-11-17 1996-05-22 International Business Machines Corporation Planar transformer and method of manufacture
WO2001053748A1 (en) * 2000-01-24 2001-07-26 Ronald Kevin Fricker A lighting assembly
DE10100282A1 (en) * 2001-01-04 2002-07-18 Infineon Technologies Ag Transformer comprises a first coil and a second coil formed in displaced surfaces of a semiconductor device
US6927662B2 (en) 2002-07-18 2005-08-09 Infineon Technologies Ag Integrated transformer configuration
US7302247B2 (en) 2004-06-03 2007-11-27 Silicon Laboratories Inc. Spread spectrum isolator
US7683654B2 (en) 2003-04-30 2010-03-23 Analog Devices, Inc. Signal isolators using micro-transformers
US7719305B2 (en) 2006-07-06 2010-05-18 Analog Devices, Inc. Signal isolator using micro-transformers
US7971340B2 (en) 2008-06-30 2011-07-05 Alpha & Omega Semiconductor, Ltd Planar grooved power inductor structure and method
US8058960B2 (en) * 2007-03-27 2011-11-15 Alpha And Omega Semiconductor Incorporated Chip scale power converter package having an inductor substrate
US9293997B2 (en) 2013-03-14 2016-03-22 Analog Devices Global Isolated error amplifier for isolated power supplies
US9660848B2 (en) 2014-09-15 2017-05-23 Analog Devices Global Methods and structures to generate on/off keyed carrier signals for signal isolators
US9998301B2 (en) 2014-11-03 2018-06-12 Analog Devices, Inc. Signal isolator system with protection for common mode transients
US10270630B2 (en) 2014-09-15 2019-04-23 Analog Devices, Inc. Demodulation of on-off-key modulated signals in signal isolator systems
US10290608B2 (en) 2016-09-13 2019-05-14 Allegro Microsystems, Llc Signal isolator having bidirectional diagnostic signal exchange
US10419251B2 (en) 2002-09-18 2019-09-17 Infineon Technologies Digital signal transfer using integrated transformers with electrical isolation
US10536309B2 (en) 2014-09-15 2020-01-14 Analog Devices, Inc. Demodulation of on-off-key modulated signals in signal isolator systems
US11115244B2 (en) 2019-09-17 2021-09-07 Allegro Microsystems, Llc Signal isolator with three state data transmission

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8198951B2 (en) 2004-06-03 2012-06-12 Silicon Laboratories Inc. Capacitive isolation circuitry
US7737871B2 (en) 2004-06-03 2010-06-15 Silicon Laboratories Inc. MCU with integrated voltage isolator to provide a galvanic isolation between input and output
US7821428B2 (en) 2004-06-03 2010-10-26 Silicon Laboratories Inc. MCU with integrated voltage isolator and integrated galvanically isolated asynchronous serial data link
US7902627B2 (en) 2004-06-03 2011-03-08 Silicon Laboratories Inc. Capacitive isolation circuitry with improved common mode detector
US8049573B2 (en) 2004-06-03 2011-11-01 Silicon Laboratories Inc. Bidirectional multiplexed RF isolator
US7447492B2 (en) 2004-06-03 2008-11-04 Silicon Laboratories Inc. On chip transformer isolator
US8169108B2 (en) 2004-06-03 2012-05-01 Silicon Laboratories Inc. Capacitive isolator
US7738568B2 (en) 2004-06-03 2010-06-15 Silicon Laboratories Inc. Multiplexed RF isolator
US8441325B2 (en) 2004-06-03 2013-05-14 Silicon Laboratories Inc. Isolator with complementary configurable memory
US8451032B2 (en) 2010-12-22 2013-05-28 Silicon Laboratories Inc. Capacitive isolator with schmitt trigger

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB770166A (en) * 1951-05-31 1957-03-20 Standard Telephones Cables Ltd Microwave radio receiver
GB845352A (en) * 1958-03-05 1960-08-17 Standard Telephones Cables Ltd Dipole-antenna element for connection to coaxial lines
GB1116161A (en) * 1964-10-21 1968-06-06 Sperry Rand Ltd Improvements relating to electrical coils
GB1116117A (en) * 1966-09-27 1968-06-06 Standard Telephones Cables Ltd A tuning arrangement
GB1180923A (en) * 1966-02-21 1970-02-11 Plessey Co Ltd Improvements relating to Electric Coil Assemblies.
GB1494087A (en) * 1975-10-22 1977-12-07 Data Recording Instr Co Magnetic recording and reproducing transducers and methods of manufacture thereof
GB2087656A (en) * 1980-11-14 1982-05-26 Analog Devices Inc Miniaturized transformer construction

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB770166A (en) * 1951-05-31 1957-03-20 Standard Telephones Cables Ltd Microwave radio receiver
GB845352A (en) * 1958-03-05 1960-08-17 Standard Telephones Cables Ltd Dipole-antenna element for connection to coaxial lines
GB1116161A (en) * 1964-10-21 1968-06-06 Sperry Rand Ltd Improvements relating to electrical coils
GB1180923A (en) * 1966-02-21 1970-02-11 Plessey Co Ltd Improvements relating to Electric Coil Assemblies.
GB1116117A (en) * 1966-09-27 1968-06-06 Standard Telephones Cables Ltd A tuning arrangement
GB1494087A (en) * 1975-10-22 1977-12-07 Data Recording Instr Co Magnetic recording and reproducing transducers and methods of manufacture thereof
GB2087656A (en) * 1980-11-14 1982-05-26 Analog Devices Inc Miniaturized transformer construction

Cited By (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1987007074A1 (en) * 1986-05-08 1987-11-19 American Telephone & Telegraph Company Transformer structure
EP0643403A3 (en) * 1989-08-18 1995-10-25 Mitsubishi Electric Corp Inductive structures for semiconductor integrated circuits.
EP0413348A2 (en) * 1989-08-18 1991-02-20 Mitsubishi Denki Kabushiki Kaisha Semiconductor integrated circuit
EP0413348A3 (en) * 1989-08-18 1993-03-24 Mitsubishi Denki Kabushiki Kaisha Inductive structures for semiconductor integrated circuits
EP0643403A2 (en) * 1989-08-18 1995-03-15 Mitsubishi Denki Kabushiki Kaisha Inductive structures for semiconductor integrated circuits
EP0643404A2 (en) * 1989-08-18 1995-03-15 Mitsubishi Denki Kabushiki Kaisha Inductive structures for semiconductor integrated circuits
EP0643404A3 (en) * 1989-08-18 1995-11-08 Mitsubishi Electric Corp Inductive structures for semiconductor integrated circuits.
EP0506362A2 (en) * 1991-03-25 1992-09-30 Satosen Co., Ltd. Coil
EP0506362A3 (en) * 1991-03-25 1994-05-18 Satosen Co Ltd Coil
US5402098A (en) * 1991-03-25 1995-03-28 Satosen Co., Ltd. Coil
GB2269057A (en) * 1992-05-27 1994-01-26 Fuji Electric Co Ltd Thin film transformer
US5420558A (en) * 1992-05-27 1995-05-30 Fuji Electric Co., Ltd. Thin film transformer
GB2269057B (en) * 1992-05-27 1996-05-01 Fuji Electric Co Ltd Thin film transformer
US5572179A (en) * 1992-05-27 1996-11-05 Fuji Electric Co., Ltd. Thin film transformer
EP0713229A1 (en) * 1994-11-17 1996-05-22 International Business Machines Corporation Planar transformer and method of manufacture
US5754088A (en) * 1994-11-17 1998-05-19 International Business Machines Corporation Planar transformer and method of manufacture
WO2001053748A1 (en) * 2000-01-24 2001-07-26 Ronald Kevin Fricker A lighting assembly
DE10100282A1 (en) * 2001-01-04 2002-07-18 Infineon Technologies Ag Transformer comprises a first coil and a second coil formed in displaced surfaces of a semiconductor device
DE10100282B4 (en) * 2001-01-04 2005-10-13 Infineon Technologies Ag Electric transformer
US6927662B2 (en) 2002-07-18 2005-08-09 Infineon Technologies Ag Integrated transformer configuration
DE10232642B4 (en) * 2002-07-18 2006-11-23 Infineon Technologies Ag Integrated transformer arrangement
US10419251B2 (en) 2002-09-18 2019-09-17 Infineon Technologies Digital signal transfer using integrated transformers with electrical isolation
US8736343B2 (en) 2003-04-30 2014-05-27 Analog Devices, Inc. Signal isolators using micro-transformers
US7683654B2 (en) 2003-04-30 2010-03-23 Analog Devices, Inc. Signal isolators using micro-transformers
US7692444B2 (en) 2003-04-30 2010-04-06 Analog Devices, Inc. Signal isolators using micro-transformers
US7920010B2 (en) 2003-04-30 2011-04-05 Analog Devices, Inc. Signal isolators using micro-transformers
US7302247B2 (en) 2004-06-03 2007-11-27 Silicon Laboratories Inc. Spread spectrum isolator
US7719305B2 (en) 2006-07-06 2010-05-18 Analog Devices, Inc. Signal isolator using micro-transformers
US8058960B2 (en) * 2007-03-27 2011-11-15 Alpha And Omega Semiconductor Incorporated Chip scale power converter package having an inductor substrate
US7971340B2 (en) 2008-06-30 2011-07-05 Alpha & Omega Semiconductor, Ltd Planar grooved power inductor structure and method
US9293997B2 (en) 2013-03-14 2016-03-22 Analog Devices Global Isolated error amplifier for isolated power supplies
US9660848B2 (en) 2014-09-15 2017-05-23 Analog Devices Global Methods and structures to generate on/off keyed carrier signals for signal isolators
US10270630B2 (en) 2014-09-15 2019-04-23 Analog Devices, Inc. Demodulation of on-off-key modulated signals in signal isolator systems
US10536309B2 (en) 2014-09-15 2020-01-14 Analog Devices, Inc. Demodulation of on-off-key modulated signals in signal isolator systems
US9998301B2 (en) 2014-11-03 2018-06-12 Analog Devices, Inc. Signal isolator system with protection for common mode transients
US10290608B2 (en) 2016-09-13 2019-05-14 Allegro Microsystems, Llc Signal isolator having bidirectional diagnostic signal exchange
US10651147B2 (en) 2016-09-13 2020-05-12 Allegro Microsystems, Llc Signal isolator having bidirectional communication between die
US11115244B2 (en) 2019-09-17 2021-09-07 Allegro Microsystems, Llc Signal isolator with three state data transmission

Also Published As

Publication number Publication date
GB8508332D0 (en) 1985-05-09
GB2173956B (en) 1989-01-05

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