GB2157622A - Ink jet printers - Google Patents
Ink jet printers Download PDFInfo
- Publication number
- GB2157622A GB2157622A GB08506303A GB8506303A GB2157622A GB 2157622 A GB2157622 A GB 2157622A GB 08506303 A GB08506303 A GB 08506303A GB 8506303 A GB8506303 A GB 8506303A GB 2157622 A GB2157622 A GB 2157622A
- Authority
- GB
- United Kingdom
- Prior art keywords
- ink
- jet recording
- recording head
- ink jet
- photosensitive resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011347 resin Substances 0.000 claims abstract description 54
- 229920005989 resin Polymers 0.000 claims abstract description 54
- 239000000758 substrate Substances 0.000 claims abstract description 19
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- 238000007599 discharging Methods 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 24
- 239000007788 liquid Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 6
- 239000000853 adhesive Substances 0.000 claims description 5
- 230000001070 adhesive effect Effects 0.000 claims description 5
- 239000000470 constituent Substances 0.000 claims description 5
- 239000011342 resin composition Substances 0.000 claims description 5
- 239000004925 Acrylic resin Substances 0.000 claims description 3
- 229920000178 Acrylic resin Polymers 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 239000003822 epoxy resin Substances 0.000 claims description 3
- 229920000647 polyepoxide Polymers 0.000 claims description 3
- 125000002348 vinylic group Chemical group 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 230000005855 radiation Effects 0.000 claims 1
- 238000001723 curing Methods 0.000 description 10
- 229920002120 photoresistant polymer Polymers 0.000 description 10
- 239000000203 mixture Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000013007 heat curing Methods 0.000 description 3
- 229920002554 vinyl polymer Polymers 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229940114081 cinnamate Drugs 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 description 2
- 238000003618 dip coating Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- WBYWAXJHAXSJNI-VOTSOKGWSA-M trans-cinnamate Chemical compound [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 2
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- WTQZSMDDRMKJRI-UHFFFAOYSA-N 4-diazoniophenolate Chemical compound [O-]C1=CC=C([N+]#N)C=C1 WTQZSMDDRMKJRI-UHFFFAOYSA-N 0.000 description 1
- GFZGZFCEMWUSAP-UHFFFAOYSA-N C(C1CO1)C1=C(C=CC=C1)C=CC(=O)C1=CC=CC=C1 Chemical compound C(C1CO1)C1=C(C=CC=C1)C=CC(=O)C1=CC=CC=C1 GFZGZFCEMWUSAP-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 208000036366 Sensation of pressure Diseases 0.000 description 1
- -1 Ta2Os Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 230000001588 bifunctional effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- BGTFCAQCKWKTRL-YDEUACAXSA-N chembl1095986 Chemical compound C1[C@@H](N)[C@@H](O)[C@H](C)O[C@H]1O[C@@H]([C@H]1C(N[C@H](C2=CC(O)=CC(O[C@@H]3[C@H]([C@@H](O)[C@H](O)[C@@H](CO)O3)O)=C2C=2C(O)=CC=C(C=2)[C@@H](NC(=O)[C@@H]2NC(=O)[C@@H]3C=4C=C(C(=C(O)C=4)C)OC=4C(O)=CC=C(C=4)[C@@H](N)C(=O)N[C@@H](C(=O)N3)[C@H](O)C=3C=CC(O4)=CC=3)C(=O)N1)C(O)=O)=O)C(C=C1)=CC=C1OC1=C(O[C@@H]3[C@H]([C@H](O)[C@@H](O)[C@H](CO[C@@H]5[C@H]([C@@H](O)[C@H](O)[C@@H](C)O5)O)O3)O[C@@H]3[C@H]([C@@H](O)[C@H](O)[C@@H](CO)O3)O[C@@H]3[C@H]([C@H](O)[C@@H](CO)O3)O)C4=CC2=C1 BGTFCAQCKWKTRL-YDEUACAXSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000000586 desensitisation Methods 0.000 description 1
- SOCTUWSJJQCPFX-UHFFFAOYSA-N dichromate(2-) Chemical compound [O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O SOCTUWSJJQCPFX-UHFFFAOYSA-N 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- QRWZCJXEAOZAAW-UHFFFAOYSA-N n,n,2-trimethylprop-2-enamide Chemical compound CN(C)C(=O)C(C)=C QRWZCJXEAOZAAW-UHFFFAOYSA-N 0.000 description 1
- UEGIWSXVFSRYKY-UHFFFAOYSA-N n-(2-benzoylphenyl)prop-2-enamide Chemical compound C=CC(=O)NC1=CC=CC=C1C(=O)C1=CC=CC=C1 UEGIWSXVFSRYKY-UHFFFAOYSA-N 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 239000003505 polymerization initiator Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 150000003673 urethanes Chemical class 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1604—Production of bubble jet print heads of the edge shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14379—Edge shooter
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
An ink jet recording head comprises a substrate 1, an ink passage 8 and a flat plate member 6 made of a desired electromagnetic wave-transmissible material and mounted on the head by a cured film of photosensitive resin 7, an ink discharge orifice communicated with the ink passage and an ink discharge energy generator 2 capable of generating an energy for discharging an ink from the ink discharge orifice, the volume of the film of photosensitive resin 7 being such that it does not flow into the ink passage during curing, e.g, not more than one-tenth of the volume of the ink passage. <IMAGE>
Description
SPECIFICATION
Ink jet recording head and method for making the same
Background of the invention
Field of the invention
This invention relates to an ink jet recording head and a method for making the same.
Description of the prior art
An ink jet recording head applicable to an ink jet recording system generally has five ink discharge orifices, ink passages and ink discharge energygenerating sections provided locally in the ink passage.
To form ink passages according to a so far known method for making such an ink jet recording head, five grooves are formed by machining or etching a glass or metal plate and then the grooved plates is bonded to another appropriate plate. However, the ink passages in the head thus made may have too rough inside wall surfaces in the case of the machined grooves or the head may have distortions in the ink passages due to a difference in etching ratio in the case of the etched grooves, and ink passages with a high precision is hard to obtain. That is, the ink discharge characteristics of the ink jet recording head thus made are liable to fluctuate. Furthermore, the plates are liable to be broken or cracked when machined, resulting in poor product yield. On the other hand, the etching requires many production steps, increasing the production cost.Furthermore, the common problem to the so far known methods is that, when a grooved plate, i.e. a plate with ink passage grooves, is bonded to a substrate having driving members, such as piezoelectric members as an electro-mechanical converters capable of generating an energy to act on the ink, heat-generating members as electro-thermal converters, etc., accurate alignment of the plate to the substrate is hard to obtain, making the mass production impossible.
To solve the problems, novel methods for making an ink jet recording head have been proposed, for example, as in Japanese Patent Application
Laid-Open No. 43876/1982, according to which an ink jet recording head is made by forming ink passage walls made from cured films of photosensitive resin on a substrate on which ink discharge pressure-generating members are provided, and then by providing a cover on the ink passage walls.
The ink jet recording head made by using the cured films of photosensitive resin as ink passage walls is distinguished in solving the respective problems of the so far known ink jet recording heads, such as poor precision of finished ink jet passages, complicated production steps, and poor product yield, but still has such other problems that, when a room temperature-curing type adhesive, a thermo-setting type adhesive, etc. are used to provide the cover on the ink passage walls, the adhesive may flow into the ink passages during the curing to clog the ink passages, considerably lowering the product yield.
To overcome said problem, Japanese Patent Application Laid-Open No. 22075411983 has proposed an ink jet recording head made by bonding a cover of photosensitive resin films laminated on both surfaces of a support made of an ultra-violet-transmissible material to a substrate with ink passages, and by curing the film by irradiation of ultra-violet rays. Usually, the ink passage walls are slightly not uniform in height, and the photosensitive resin film, which constitutes the cover, must be bonded even to lower parts of the walls while applying a pressure to the film.However, the pressure application conditions depend on the pressure distribution during the pressure application, the hardness of photosensitive resin film, shapes of ink passage walls, etc., and the photosensitive resin may flow into the ink passages or the cover may remain unbonded to the ink passage walls.Thus, there is a problem in making an ink jet recording head in which the cover is uniformly and completely bonded to the ink passage walls without impairing the ink passages.
Summary of the invention
In one aspect the present invention aims to provide a precise ink jet recording head with a high reliability and a method for making the same, where said problems have been overcome.
In another aspect the present invention aims to provide an ink jet recording head having precise ink passages and a structure faithfully and finely processed to a desired design and a method for making the same.
In a further aspect the present invention aims to provide an ink jet recording head having a good precision in throwing targets of ink droplets and a high response frequency and a method for making the same.
In yet another aspect the present invention aims to provide an ink jet recording head having less susceptibility to peeling of constituent members, deformation, dislocation, etc. and a good durability and a method for making the same.
In accordance with the present invention there is provided an ink jet recording head, which comprises a substrate, an ink passage comprising, as one of constituents, provided on the substrate and a flat plate member made of a desired electromagnetic wave-transmissible material and provided on the ink passage walls through a cured film of photosensitive resin, an ink discharge orifice communicated with the ink passage, and an ink discharge energy generator capable of generating an energy for discharging an ink from the ink discharge orifice, the volume of the cured film of photosensitive resin being not more than one-tenth of the volume of the ink passage.
In accordance with the present invention there is also provided a method for making an ink jet recording head comprising a substrate, ink passage walls provided on the substrate, and a flat plate member made of desired electro-magnetic wavetransmissible material and provided on the ink passage walls through a photosensitive resin film, which comprises providing the photosensitive resin film, whose volume is nct more than onetenth of the volume of the ink passage, on the ink passage walls
Brief description of the drawings
Figures 1 to 8 are schematic views illustrating steps of making the present ink jet recording head.
Description of the preferred embodiment
Embodiments of the present invention will be described in detail below, referring to drawings.
Figs. 1 to 8 schematically show a procedure for making the present ink jet recording head.
In the step of Fig. 1, desired numbers of ink discharge energy-generating members 2 such as head-generating members, piezoelectric members, etc. which are capable of generating an energy for discharging an ink from ink discharge orifices are provided on a substrate 1 of glass, ceramic, plastic or metal, and, if necessary, are covered with a film 3 of SiO2, Ta2Os, glass, etc. to provide an ink resistance and an electric insulation. The ink discharge energy-generating members 2 are connected to a signal input electrode, not shown in the drawing.
In the successive step of Fig. 2, the surface of film layer 3 on the substrate 1 obtained from the step of Fig. 1 is cleaned and dried, and then a dry film photo-resist 4 having a film thickness of about 25 m to about 100 Wm, heated at about 80"C to about 105on, is laminated onto the film layer 3 at a rate of 0.5 to 4 flmin. under a pressure of 1 to 3 kgi cm2, whereby the dry film photo-resist 4 is fusionbonded to the film layer 3. Then, as shown in Fig.
2, a photomask 5 having a desired pattern is placed on the dry film photoresist 4 on the substrate surface, followed by light exposure from the overhead of photomask 5. In that case, alignment of the positions of the ink discharge energy-generating members 2 to the position of the pattern must be made beforehand according to a well known procedure.
Fig. 3 schematically shows a step of removing unexposed parts of the exposed dry film photoresist 4 by a developing solution comprising a desired organic solvent such as trichloroethane, etc.
through dissolution. To improve the ink resistance of exposed parts 4P of dry film photoresist remaining on the substrate 1, heat curing (for example, by heating at 150cm to 2505C for 30 minutes to 6 hours) or ultraviolet irradiation (for example, by ultraviolet rays having an intensity of 50 to 200 mWI cm2 or more) is then carried out to thoroughly proceed with polymerization-curing reaction. It is also effective to conduct the heat curing and ultraviolet irradiation curing at the same time.
Fig. 4 schematically shows a case of thin lamination of a photosensitive resin film 7, for example, an ultraviolet curing-type resin film, on the surface of a flat plate member 6 made of an electromagnetic wave-transmissible material, for example, an ultraviolet-transmissible material, so that the volume of the resin film may be not more than onetenth of the total volume of the ink passages 8, to constitute a cover for the ink passages 8. The photosensitive composition for the photosensitive resin film can be laminated by any means, so long as a uniform film thickness can be obtained, for example, usually by spin coating, roll coating, dip coating, screen spraying, printing, etc.
Fig. 5 schematically shows a case of providing a cover for the ink passage 8 formed by a method of
Fig. 4 which comprises the flat plate member 6 and the ultraviolet curing type resin film 7 by bonding under a pressure. Since the volume of the ultraviolet curing type resin film 7 as a photosensitive composition film, which constitutes the cover, is not more than one-tenth of the total volume of the ink passages 8, a volume of the ultraviolet curing type resin which may flow into the ink passage even if a thorough pressure is applied thereto is at most one-tenth of the total volume of the ink passages, giving no substantial influences on discharge characteristics such as the response frequency, precision in throwing target, etc. of the ink jet recording head.Furthermore, thorough pressure can be applied to the cover, eliminating any unbonded contact between the cover and the dry film photoresists 4P, whereby a highly reliable ink jet recording head can be obtained.
Then, the dry film 7 laminated on the flat plate member 6 made of an ultraviolet-transmissible material is exposed to ultraviolet irradiation, for example, with an intensity of 50 to 200 mWicm2 or more in an oxygen-free atmosphere to thoroughly cure the dry film 7. It is also effective to further heat cure the dry film 7, for example, at 130 to 250 C for 30 minutes to 6 hours.
Fig. 6 is a schematic perspective view of the head appearance after the step of Fig. 5, where numeral 8-1 is an ink supply chamber, 8-2 ink narrow passages, and 9 perforations for connecting ink supply tubes, not shown in the drawing, to the ink supply chamber 8-1.
After the completion to bond the grooved substrate with the ink passage cover, the resulting assembly is cut off along the line C-C' in Fig. 6 to optimize between the distance between the ink discharge pressure-generating members 2 and the ink discharge orifices 8-3 in the ink narrow passages 82. The area to be cut off can be selected as desired. The cutting is carried out by dicing usually employed in the semi-conductor industry.
Fig. 7 is a vertical cross-sectional view along the line Z-Z' in Fig. 6.
Then, the cut-off surface is smoothed by polishing, and the ink supply tubes 10 are fixed to the perforations 9 to complete an ink jet recording head shown in Fig. 8.
In the foregoing illustrated embodiments, a dry film type, that is, solid, photosensitive resin (photoresist) is utilized for the ink passage cover, but photo-sensitive resin applicable to the present invention is not restricted only thereto. That is, it is needless to say that liquid photosensitive resin compositions can be utilized. Furthermore, the photosensitive resin is not restricted to the ultraviolet curing type, but any resin composition can be utilized, so long as it is sensitive to electromag
netic waves such as infrared rays, visible light, X
rays, electron beams, laser, etc.
The dry film type photoresist applicable to the present invention includes, for example, those commercially available under the trademarks of permanent photopolymer coatings, Riston, Soldermask 730S, 740S, 730FR, 740FR and 740 SM1 (made by DuPont, U.S.A.); Photec SR-1000, SR2000, SR-3000, etc. (made by Hitachi Kasei Kogyo
K.K., Japan). Furthermore, many photosensitive resin compositions used in the ordinary photolithographical field can be used in the present invention as the photosensitive resin.For example, photopolymerization type photopolymer of diazo resin, p-diazoquinone, or further containing, for example, vinyl monomer and a polymerization initiator, a dimertype photopolymer comprising polyvinyl cinna
mate, etc. and a sensitizer, a mixture of orthonaphthoquinodiazide and novolak type phenolic resin, a mixture of polyvinyl alcohol and diazo resin, a polyether type photopolymer of 4glycidylethylene oxide and benzophenone or glycidyl-chalcone as copolymerized, a copolymer of di
N,N-dimethyl-methacrylamide and, for example, acrylamidobenzophenone, unsaturated polyesterbased photosensitive resin (for example, APR (made by Asahi Kasei Kogyo K.K. Japan), Tevista (made by Teijin K.K.Japan), Sonne (made by Kansai Paint K.K., Japan), etc.), unsaturated urethane oligomer-based photosensitive resin, a photosensitive resin composition containing bifunctional urethane monomer and a photopolymerization initiator, bichromate-based photoresist, non-chromium-based, water-soluble photoresist, polyvinyl cinnamate-based photo resist, oxidized rubberazide-based photoresist, etc can be mentioned.
When a photosensitive dry film resist is used as material for forming the ink passage wall as described in the foregoing embodiment, it may be better to use a solution of the dry film resist in a solvent as a photosensitive composition for lamination on the flat plate member as the ink passage cover to make the wettability of ink passage wall and ink passage cover uniform.
Procedure for laminating the photosensitive resin film onto the flat plate member is nol restricted to the said pressure bonding, but any procedure can be used, so long as it can uniformly laminate the photosensitive resin film. For example, spin coating, dip coating, spraying, printing, roll coating, etc. can be used. In the foregoing embodiment, oxygen desensitization is utilized to leave a soft layer only on the surface of the photosensitive resin film, but it may be better to leave a soft layer only on the surface by making light exposure from the back side of the photosensitive resin film through the flat plate member made of an ultraviolet-transmissible material while controlling the light exposure intensity.The material for the flat plate member as a support for the fluid passage cover is not particularly restricted, so long as it is transmissible of electromagnetic waves having an effective wavelength for photopolymerization of the photosensitive resin for forming the ink passage cover, and is hardly susceptible to deformation due to the
shrinking stress of some photosensitive resin. In
view of the convenience and economy of produc
tion, glass, epoxy resin, acrylic resin, vinylic resin,
etc. are preferable.
The present invention, as described above, have the following effects.
1) When a substrate with ink passages is bonded
with an ink passage cover, the ink passages are
never clogged even by applying a thorough pres
sure to the cover, because a flat plate member
laminated with a photosensitive resin film is used
as the cover and the volume of the photosensitive
resin film is as small as not more than one-tenth of the total volume of the ink passages.
2) Since a photosensitive resin is used for bond
ing the cover, curing can be effected for a shorter time without heating and without flowing of the
photosensitive resin, and thus the photosensitive
resin can be prevented from depositing on the ink discharge energy-gnerating members. An ink jet recording head with a stable discharge performance can be readily obtained.
3) Since the photosensitive composition is lami
nated in a thin layer in bonding the cover, the shrinking stress is smaller when the photosensitive composition is photo-cured, and no stress remains within the head, causing no peeling of the constituent members or deformation or dislocation. The ink jet recording head thus made has a very good durability.
4) Since the flat plate member and the photosensitive resin film as constituents for the ink passage cover have a light transmission, the state of motion of ink droplets through the head are observable by eyes and maintenance and control of the head can be readily carried out.
Claims (22)
1. An ink jet recording head, which comprises a substrate, an ink passage comprising, as one of constituents, ink passage walls provided on the substrate and a flat plate member made of a desired electromagnetic wave-transmissible material and provided on the ink passage walls through a cured film of photosensitive resin, an ink discharge orifice communicated with the ink passage and an ink discharge energy generator capabe of generating an energy for discharging an ink from the ink discharge orifice, the volume of the cured film of photosensitive resin being not more than one-tenth of the volume of the ink passages.
2. An ink jet recording head according to Claim 1, wherein the cured film of photosensitive resin is a cured film of ultraviolet curing-type resin.
3. An ink jet recording head according to Claim 1, wherein the desired electromagnetic wave is at least an electromagnetic wave selected from ultraviolet rays, infrared rays, visible light, X-rays, and electron beams.
4. An ink jet recording head according to Claim 1, wherein the flat plate member is made of a material selected from glass, epoxy resin, acrylic resin, and vinylic resin.
5. An ink jet recording head according to Claim 1, where the ink discharge energy generator is an electro-thermal converter.
6. An ink jet recording head according to Claim 1, wherein the ink discharge energy generator is an electro-mechanical converter.
7. An ink jet recording head according to Claim 1 comprising two or more ink passages.
8. A method for making an ink jet recording head comprising a substrate, ink passage walls provided on the substrate, and a flat plate member made of a desired electromagnetic wave-transmissible material and provided on the ink passage walls through a photosensitive resin film, which comprises providing the photosensitive resin film, whose volume is not more than one-tenth of the volume of the ink passage, on the passage walls.
9. A method according to Claim 8, wherein the photosensitive resin is an ultraviolet curing type resin.
10. A method according to Claim 8, wherein the desired electromagnetic wave is at least an electromagnetic wave selected from ultraviolet rays, infrared rays, visible light, X-rays, and electron beams.
11. A method according to Claim 8, wherein the flat plate member is made of a material selected from glass, epoxy resin, acrylic resin and vinylic resin.
12. A method according to Claim 8, wherein the photosensitive resin is of a dry film type.
13. A method according to Claim 8, wherein the sensitive resin is a liquid photosensitive resin composition.
14. A method according to Claim 8, wherein the photosensitive resin is cured into a cured film by polymerization-curing reaction, using at least one of light and heat.
15. A method according to Claim 8, wherein the ink passage walls are made from cured films of photosensitive resin
16. A method according to Claim 8, wherein the ink jet recording head comprises two or more ink passages.
17. A liquid jet recording head in which a base is formed with recesses, and a plate attached to said base closes said recesses to define spaces in the head for accommodating a recording liquid supplied to the head, said plate being so attached by means of a light-cured film of adhesive material photosensitive to radiation which can pass through said plate, the thickness of said film formed uncured on said plate being small enough so as not to flow into said recess, during curing, to block liquid flow therein.
18. A liquid jet recording head in which a plate is attached to a recessed base to define a structure having internal spaces for accommodating recording liquid supplied to the head, the attachment being made by light-curing a film of photosensitive adhesive material formed on that surface of said plate which is applied to said base, the total volume of the material in said film being no more than one tenth of the total volume of the spaces.
19. An ink jet recording head substantially as hereinbefore described with reference to Figure 5 of the accompanying drawigs.
20. An ink jet recording head substantially as hereinbefore described with reference to Figures 6 to 8 of the accompanying drawings.
21. A method of making an ink jet recording head substantially as hereinbefore described with reference to Figures 1 to 5 of the accompanying drawings.
22. A method of making an ink jet recording head substantially as herein before described with reference to Figures 1 to 8 of the accompanying drawings.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4567584A JPS60190363A (en) | 1984-03-12 | 1984-03-12 | Manufacture of inkjet recording head |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| GB8506303D0 GB8506303D0 (en) | 1985-04-11 |
| GB2157622A true GB2157622A (en) | 1985-10-30 |
| GB2157622B GB2157622B (en) | 1988-05-25 |
Family
ID=12725964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB08506303A Expired GB2157622B (en) | 1984-03-12 | 1985-03-12 | Ink jet printers |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS60190363A (en) |
| DE (1) | DE3508764C2 (en) |
| GB (1) | GB2157622B (en) |
| HK (1) | HK39891A (en) |
| SG (1) | SG34591G (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006082762A1 (en) * | 2005-01-21 | 2006-08-10 | Tokyo Ohka Kogyo Co., Ltd. | Photosensitive laminate film for forming top plate portion of precision fine space and method of forming precision fine space |
| US8052828B2 (en) | 2005-01-21 | 2011-11-08 | Tokyo Okha Kogyo Co., Ltd. | Photosensitive laminate film for forming top plate portion of precision fine space and method of forming precision fine space |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3722923A1 (en) * | 1987-07-10 | 1989-01-19 | Siemens Ag | PHOTORESIST FILM AS ADHESIVE FOR CONNECTING TWO FLAT PARTS |
| JPH02208053A (en) * | 1989-02-07 | 1990-08-17 | Ricoh Co Ltd | Liquid jet recorder |
| KR101085811B1 (en) | 2006-06-21 | 2011-11-22 | 도오꾜오까고오교 가부시끼가이샤 | Method of forming precision microspace, process for manufacturing member with precision microspace, and photosensitive laminated film |
| JP4837451B2 (en) * | 2006-06-21 | 2011-12-14 | 東京応化工業株式会社 | Method for forming precision fine space, and method for manufacturing member having precision fine space |
| JP4842029B2 (en) * | 2006-06-21 | 2011-12-21 | 東京応化工業株式会社 | Method for forming precision fine space, and method for manufacturing member having precision fine space |
| CN115431376A (en) * | 2022-08-16 | 2022-12-06 | 华中科技大学 | High-strength large-scale complex ceramic biscuit and three-dimensional spray printing forming method and equipment thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2104451A (en) * | 1981-06-18 | 1983-03-09 | Canon Kk | Ink jet head |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1917294A1 (en) * | 1969-04-03 | 1970-10-15 | Hugo Brendel | Photographic relief images |
| US4417251A (en) * | 1980-03-06 | 1983-11-22 | Canon Kabushiki Kaisha | Ink jet head |
| JPS58220754A (en) * | 1982-06-18 | 1983-12-22 | Canon Inc | Ink jet recording head |
| JPS5919168A (en) * | 1982-07-26 | 1984-01-31 | Canon Inc | Ink jet recording head |
-
1984
- 1984-03-12 JP JP4567584A patent/JPS60190363A/en active Pending
-
1985
- 1985-03-12 DE DE19853508764 patent/DE3508764C2/en not_active Expired - Lifetime
- 1985-03-12 GB GB08506303A patent/GB2157622B/en not_active Expired
-
1991
- 1991-05-07 SG SG34591A patent/SG34591G/en unknown
- 1991-05-23 HK HK39891A patent/HK39891A/en not_active IP Right Cessation
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2104451A (en) * | 1981-06-18 | 1983-03-09 | Canon Kk | Ink jet head |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006082762A1 (en) * | 2005-01-21 | 2006-08-10 | Tokyo Ohka Kogyo Co., Ltd. | Photosensitive laminate film for forming top plate portion of precision fine space and method of forming precision fine space |
| CN101091138B (en) * | 2005-01-21 | 2011-06-01 | 东京应化工业株式会社 | Photosensitive laminate film for forming top plate portion of precision fine space and method of forming precision fine space |
| US8052828B2 (en) | 2005-01-21 | 2011-11-08 | Tokyo Okha Kogyo Co., Ltd. | Photosensitive laminate film for forming top plate portion of precision fine space and method of forming precision fine space |
Also Published As
| Publication number | Publication date |
|---|---|
| HK39891A (en) | 1991-05-31 |
| DE3508764C2 (en) | 1995-08-03 |
| GB8506303D0 (en) | 1985-04-11 |
| DE3508764A1 (en) | 1985-09-12 |
| JPS60190363A (en) | 1985-09-27 |
| SG34591G (en) | 1991-06-21 |
| GB2157622B (en) | 1988-05-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PE20 | Patent expired after termination of 20 years |
Effective date: 20050311 |