GB2157078B - Wafer alignment apparatus - Google Patents
Wafer alignment apparatusInfo
- Publication number
- GB2157078B GB2157078B GB08502075A GB8502075A GB2157078B GB 2157078 B GB2157078 B GB 2157078B GB 08502075 A GB08502075 A GB 08502075A GB 8502075 A GB8502075 A GB 8502075A GB 2157078 B GB2157078 B GB 2157078B
- Authority
- GB
- United Kingdom
- Prior art keywords
- alignment apparatus
- wafer alignment
- wafer
- alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US59518884A | 1984-03-30 | 1984-03-30 |
Publications (3)
Publication Number | Publication Date |
---|---|
GB8502075D0 GB8502075D0 (en) | 1985-02-27 |
GB2157078A GB2157078A (en) | 1985-10-16 |
GB2157078B true GB2157078B (en) | 1987-09-30 |
Family
ID=24382131
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB08502075A Expired GB2157078B (en) | 1984-03-30 | 1985-01-28 | Wafer alignment apparatus |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPS60218853A (en) |
DE (1) | DE3506782C2 (en) |
GB (1) | GB2157078B (en) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100309932B1 (en) * | 1986-04-28 | 2001-12-15 | 제임스 엠. 윌리암스 | Wafer transport apparatus and method |
IL86514A0 (en) * | 1988-05-26 | 1988-11-15 | ||
DE19510230C2 (en) * | 1995-03-24 | 1999-08-05 | Michael Geringer | Transfer device for electrical components, in particular chips |
DE69709924D1 (en) * | 1996-06-15 | 2002-02-28 | Unova Uk Ltd | FLEXIBLE CONNECTION OF A GRINDING MACHINE SPINDLE TO A PLATFORM |
GB2337111B (en) * | 1996-06-15 | 2000-03-15 | Unova Uk Ltd | Workpiece inspection |
US6162008A (en) * | 1999-06-08 | 2000-12-19 | Varian Semiconductor Equipment Associates, Inc. | Wafer orientation sensor |
DE19957758C2 (en) | 1999-12-01 | 2001-10-25 | Steag Rtp Systems Gmbh | Device and method for aligning disc-shaped substrates |
JP4942129B2 (en) | 2000-04-07 | 2012-05-30 | バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド | Wafer direction sensor for GaAs wafers |
DE102004025150B4 (en) | 2004-05-21 | 2019-05-09 | Mattson Technology, Inc. | Orientation of a semiconductor substrate on a rotating device |
US9377416B2 (en) * | 2014-05-17 | 2016-06-28 | Kla-Tencor Corp. | Wafer edge detection and inspection |
GB201721722D0 (en) | 2017-12-22 | 2018-02-07 | Pilkington Group Ltd | Switching device |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3604940A (en) * | 1969-08-04 | 1971-09-14 | Laser Systems Corp | Radiant energy inspection system for rotating objects |
US3826576A (en) * | 1972-12-20 | 1974-07-30 | Goodyear Aerospace Corp | Laser measuring or monitoring system |
US4425075A (en) * | 1981-04-20 | 1984-01-10 | The Perkin-Elmer Corporation | Wafer aligners |
JPS57198642A (en) * | 1981-05-30 | 1982-12-06 | Toshiba Corp | Wafer position detection device |
JPS5864043A (en) * | 1981-10-13 | 1983-04-16 | Nippon Telegr & Teleph Corp <Ntt> | Positioning device for disc-shaped plate |
-
1985
- 1985-01-28 GB GB08502075A patent/GB2157078B/en not_active Expired
- 1985-02-26 DE DE19853506782 patent/DE3506782C2/en not_active Revoked
- 1985-03-27 JP JP6105685A patent/JPS60218853A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0556653B2 (en) | 1993-08-20 |
GB2157078A (en) | 1985-10-16 |
DE3506782C2 (en) | 1994-10-27 |
DE3506782A1 (en) | 1985-10-10 |
JPS60218853A (en) | 1985-11-01 |
GB8502075D0 (en) | 1985-02-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
732 | Registration of transactions, instruments or events in the register (sect. 32/1977) | ||
PE20 | Patent expired after termination of 20 years |
Effective date: 20050127 |