JPS57198642A - Wafer position detection device - Google Patents
Wafer position detection deviceInfo
- Publication number
- JPS57198642A JPS57198642A JP8347281A JP8347281A JPS57198642A JP S57198642 A JPS57198642 A JP S57198642A JP 8347281 A JP8347281 A JP 8347281A JP 8347281 A JP8347281 A JP 8347281A JP S57198642 A JPS57198642 A JP S57198642A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- bit position
- maximum
- of5a
- command
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
Abstract
PURPOSE:To easily detect the orientation flat OF of a wafer without contact by using an optical method. CONSTITUTION:Pulse driving is applied to a board by a command from an information processing device 10. Irradiation light 6 is condensed 8 through a transparent adhesive sheet 4 and the image of the end finge 5a of a wafer is imaged on a photoelectric conversion element 7. A detection signal is processed 10 by binary code 9. The input signal to the device 10 is synchronized with the output signal (driving command). Now, the information from the element 7 is read to obtain a light and shade inversion bit position and observation is continued until a pulse motor run by one turn and the position of the end fringe 5b of the wafer is obtained. Next, the maximum value a and the minimum value b of average slope of each bit position are calculated and the maximum point c of the bit position is decided as OF5a and detected at the middle of the maximum and minimum values and the number of pulses of the motor 1 at the maximum point c is computed to know the position of the OF5a of the wafer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8347281A JPS57198642A (en) | 1981-05-30 | 1981-05-30 | Wafer position detection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8347281A JPS57198642A (en) | 1981-05-30 | 1981-05-30 | Wafer position detection device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57198642A true JPS57198642A (en) | 1982-12-06 |
Family
ID=13803400
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8347281A Pending JPS57198642A (en) | 1981-05-30 | 1981-05-30 | Wafer position detection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57198642A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6080241A (en) * | 1983-10-07 | 1985-05-08 | Hitachi Ltd | Alignment apparatus |
JPS60218853A (en) * | 1984-03-30 | 1985-11-01 | エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド | Wafer front aligning device |
JPS61254304A (en) * | 1985-05-02 | 1986-11-12 | 日東電工株式会社 | Method of positioning wafer |
JPS6245039A (en) * | 1985-08-23 | 1987-02-27 | Canon Inc | Angle positioning device of circular sheet element |
US4887904A (en) * | 1985-08-23 | 1989-12-19 | Canon Kabushiki Kaisha | Device for positioning a semi-conductor wafer |
EP0639855A1 (en) * | 1993-08-19 | 1995-02-22 | Tokyo Seimitsu Co.,Ltd. | Apparatus for recognizing the shape of a semiconductor wafer |
GB2395841A (en) * | 2002-10-24 | 2004-06-02 | Lintec Corp | Aligning thinned semiconductor wafers |
-
1981
- 1981-05-30 JP JP8347281A patent/JPS57198642A/en active Pending
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6080241A (en) * | 1983-10-07 | 1985-05-08 | Hitachi Ltd | Alignment apparatus |
JPS60218853A (en) * | 1984-03-30 | 1985-11-01 | エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド | Wafer front aligning device |
JPH0556653B2 (en) * | 1984-03-30 | 1993-08-20 | Esu Bui Jii Ritogurafuii Shisu | |
JPH054201B2 (en) * | 1985-05-02 | 1993-01-19 | Nitto Denko Corp | |
JPS61254304A (en) * | 1985-05-02 | 1986-11-12 | 日東電工株式会社 | Method of positioning wafer |
JPH0530304B2 (en) * | 1985-08-23 | 1993-05-07 | Canon Kk | |
US4887904A (en) * | 1985-08-23 | 1989-12-19 | Canon Kabushiki Kaisha | Device for positioning a semi-conductor wafer |
JPS6245039A (en) * | 1985-08-23 | 1987-02-27 | Canon Inc | Angle positioning device of circular sheet element |
EP0639855A1 (en) * | 1993-08-19 | 1995-02-22 | Tokyo Seimitsu Co.,Ltd. | Apparatus for recognizing the shape of a semiconductor wafer |
US6014965A (en) * | 1993-08-19 | 2000-01-18 | Tokyo Seimitsu Co., Ltd. | Apparatus for recognizing the shape of a semiconductor wafer |
GB2395841A (en) * | 2002-10-24 | 2004-06-02 | Lintec Corp | Aligning thinned semiconductor wafers |
GB2395841B (en) * | 2002-10-24 | 2006-01-04 | Lintec Corp | Alignment apparatus |
US7274452B2 (en) | 2002-10-24 | 2007-09-25 | Lintec Corporation | Alignment apparatus |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4528444A (en) | Optical reading apparatus with automatic gain control circuit | |
DE69710019D1 (en) | Presence sensor with multiple functions | |
DE69113299T2 (en) | Chemical luminescence detection apparatus. | |
JPS57198642A (en) | Wafer position detection device | |
CA2044951A1 (en) | Automatic Gain Control Circuit | |
EP0340393A3 (en) | Position detecting circuit | |
DE3382596D1 (en) | THREE DIMENSIONAL DISTANCE MEASURING DEVICE. | |
SU943798A1 (en) | Photoelectric displacement-to-code converter | |
JPS564834A (en) | Photo detection control system by light pen | |
JPS5511606A (en) | Photoelectric conversion device | |
JPS5650475A (en) | Optical character reader | |
JPS5541520A (en) | Punched hole detection method and its device | |
SU934217A1 (en) | Device for inspection of moving object shape | |
JPS5778266A (en) | Video information input deivce | |
JPS54161376A (en) | Speed detecting method and device | |
JPS5456390A (en) | Light detecting method | |
ATE106550T1 (en) | METHOD OF MONITORING THE OUTPUT SIGNALS OF A SENSOR DEVICE. | |
SU1029262A1 (en) | Protective device | |
JPS57182112A (en) | Range detector | |
JPH0682683A (en) | Range-finding method | |
JPS57162569A (en) | Original reader | |
JPS5535317A (en) | Focus detector of camera | |
JPS55134810A (en) | Method and device of focus matching | |
JPS5777946A (en) | Discriminating method for road surface condition | |
JPS5611307A (en) | Spin type solar sensor |