GB2154249B - Cathode sputtering - Google Patents

Cathode sputtering

Info

Publication number
GB2154249B
GB2154249B GB08502734A GB8502734A GB2154249B GB 2154249 B GB2154249 B GB 2154249B GB 08502734 A GB08502734 A GB 08502734A GB 8502734 A GB8502734 A GB 8502734A GB 2154249 B GB2154249 B GB 2154249B
Authority
GB
United Kingdom
Prior art keywords
cathode sputtering
sputtering
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08502734A
Other languages
English (en)
Other versions
GB8502734D0 (en
GB2154249A (en
Inventor
Klaus Goerke
Dr Erich Hodes
Michael Steeg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GLYCO METALL WERKE
Original Assignee
GLYCO METALL WERKE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GLYCO METALL WERKE filed Critical GLYCO METALL WERKE
Publication of GB8502734D0 publication Critical patent/GB8502734D0/en
Publication of GB2154249A publication Critical patent/GB2154249A/en
Application granted granted Critical
Publication of GB2154249B publication Critical patent/GB2154249B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
GB08502734A 1984-02-11 1985-02-04 Cathode sputtering Expired GB2154249B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19843404880 DE3404880A1 (de) 1984-02-11 1984-02-11 Verfahren zum herstellen von schichtwerkstoff oder schichtwerkstuecken

Publications (3)

Publication Number Publication Date
GB8502734D0 GB8502734D0 (en) 1985-03-06
GB2154249A GB2154249A (en) 1985-09-04
GB2154249B true GB2154249B (en) 1988-05-05

Family

ID=6227432

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08502734A Expired GB2154249B (en) 1984-02-11 1985-02-04 Cathode sputtering

Country Status (9)

Country Link
JP (1) JPS60184676A (pt)
AT (1) AT383145B (pt)
BR (1) BR8500587A (pt)
CH (1) CH663220A5 (pt)
DE (1) DE3404880A1 (pt)
ES (1) ES8605589A1 (pt)
FR (1) FR2559507A1 (pt)
GB (1) GB2154249B (pt)
IT (1) IT1184136B (pt)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11286552B2 (en) 2017-01-23 2022-03-29 Miba Gleitlager Austria Gmbh Method for producing a multi-layer plain bearing element

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4661233A (en) * 1985-07-05 1987-04-28 Westinghouse Electric Corp. Cathode/ground shield arrangement in a sputter coating apparatus
CH671239A5 (pt) * 1986-07-15 1989-08-15 Balzers Hochvakuum
DE3640767A1 (de) * 1986-10-30 1988-05-05 Kolbenschmidt Ag Lagerung
ES2035016T3 (es) * 1986-12-23 1993-04-16 Balzers Aktiengesellschaft Material compuesto con una capa de deslizamiento aportada mediante pulverizacion catodica.
ATE79589T1 (de) * 1987-04-30 1992-09-15 Balzers Hochvakuum Bauteil, insbesondere maschinenelement.
WO2010070845A1 (ja) * 2008-12-15 2010-06-24 株式会社アルバック スパッタリング装置及びスパッタリング方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6615807A (pt) * 1965-11-12 1967-05-16
US3723276A (en) * 1969-06-03 1973-03-27 Warner Lambert Co Article coating method
DE2039416A1 (de) * 1969-08-11 1971-02-25 Varian Associates Vakuumgalvanisiervorrichtung
GB1391842A (en) * 1971-08-04 1975-04-23 Elektromat Veb Apparatus for coating substrates by cathode sputtering and for cleaning by ion bombardment in the same vacuum vessel
US3784458A (en) * 1973-04-03 1974-01-08 Warner Lambert Co Method of coating a continuous strip of ribbon razor blade material
US3864239A (en) * 1974-04-22 1975-02-04 Nasa Multitarget sequential sputtering apparatus
US3981791A (en) * 1975-03-10 1976-09-21 Signetics Corporation Vacuum sputtering apparatus
DE2636293A1 (de) * 1976-08-12 1978-02-16 Leybold Heraeus Gmbh & Co Kg Katodenzerstaeubungsvorrichtung
GB1570380A (en) * 1978-05-30 1980-07-02 Standard Telephones Cables Ltd Electroless plating
US4410407A (en) * 1981-12-22 1983-10-18 Raytheon Company Sputtering apparatus and methods

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11286552B2 (en) 2017-01-23 2022-03-29 Miba Gleitlager Austria Gmbh Method for producing a multi-layer plain bearing element

Also Published As

Publication number Publication date
GB8502734D0 (en) 1985-03-06
AT383145B (de) 1987-05-25
ATA6285A (de) 1986-10-15
IT1184136B (it) 1987-10-22
ES540255A0 (es) 1986-03-16
CH663220A5 (de) 1987-11-30
IT8519200A0 (it) 1985-01-23
GB2154249A (en) 1985-09-04
ES8605589A1 (es) 1986-03-16
DE3404880A1 (de) 1985-08-14
BR8500587A (pt) 1985-09-24
JPS60184676A (ja) 1985-09-20
FR2559507A1 (fr) 1985-08-16

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee