GB2143193A - Belt conveyor systems for wafer leaves and deflectors therefor - Google Patents
Belt conveyor systems for wafer leaves and deflectors therefor Download PDFInfo
- Publication number
- GB2143193A GB2143193A GB08414886A GB8414886A GB2143193A GB 2143193 A GB2143193 A GB 2143193A GB 08414886 A GB08414886 A GB 08414886A GB 8414886 A GB8414886 A GB 8414886A GB 2143193 A GB2143193 A GB 2143193A
- Authority
- GB
- United Kingdom
- Prior art keywords
- belt conveyor
- wafer
- deflector
- conveyor
- transmitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67271—Sorting devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
- B65G47/525—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices using fluid jets
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B25/00—Apparatus characterised by the shape of record carrier employed but not specific to the method of recording or reproducing, e.g. dictating apparatus; Combinations of such apparatus
- G11B25/06—Apparatus characterised by the shape of record carrier employed but not specific to the method of recording or reproducing, e.g. dictating apparatus; Combinations of such apparatus using web-form record carriers, e.g. tape
- G11B25/063—Apparatus characterised by the shape of record carrier employed but not specific to the method of recording or reproducing, e.g. dictating apparatus; Combinations of such apparatus using web-form record carriers, e.g. tape using tape inside container
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B31/00—Arrangements for the associated working of recording or reproducing apparatus with related apparatus
- G11B31/003—Arrangements for the associated working of recording or reproducing apparatus with related apparatus with radio receiver
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/06—Receivers
- H04B1/08—Constructional details, e.g. cabinet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Signal Processing (AREA)
- Computer Networks & Wireless Communication (AREA)
- Multimedia (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
Abstract
In a deflector zone of a belt conveyor system for wafer leaves (5) there are arranged, in alignment with and at a distance from each other, a feeding belt conveyor (1) and a first transmitting belt conveyor (6). A second transmitting belt conveyor (9) extends obliquely downwardly from the feeding belt conveyor (1). Beneath and optionally also above the movement path of the wafer leaves (5) there are arranged, transversely to the transport direction, blowing tubes (10 and 12) provided with upwardly and downwardly directed nozzle orifices (11 and 13 respectively). Compressed air is alternatively applied to the blowing tubes (10 and 12) in order to guide the wafer leaves (5), in dependence on the specified deflector position, from the feeding belt conveyor (1) either onto the belt conveyor (6) or onto the belt conveyor (9). The deflector does not have any mechanically moved parts and is designed for high working speeds. <IMAGE>
Description
SPECIFICATION
Belt conveyor systems for wafer leaves and deflectors therefor
The invention relates to deflectors for use in belt conveyor systems for wafer leaves. Such a system may have a wafer leaf feeding belt conveyor, a first wafer leaf transmitting belt conveyor, which is arranged at a distance from and in alignment with the former, and a second wafer leaf transmitting belt conveyor, which extends obliquely downwardly from the feeding belt conveyor.
Such deflectors have hitherto been constructed with mechanically pivoted deflector elements, the operation of which was, for example, pneumatically effected. Like the feeding belt conveyor and the transmitting belt conveyors, each pivotable deflector element comprises several parallel endless belts, for example round-section belts. The known deflectors necessitate a relatively high constructional expenditure, and because of the relatively heavy weight that has to be moved when the deflectors are shifted, these deflectors can be used only to a limited degree for rapid shifting movements. Difficulties arose, in particular, when the distance between the transported wafer leaves was very short. The sensitive wafer leaves were then often damaged or destroyed.
According to this invention there is provided a deflector for a wafer leaf belt conveyor system comprising a feed belt conveyor, a first transmitting belt conveyor spaced from and in alignment with the feed conveyor, a second transmitting belt conveyor inclined downwardly with respect to the feed conveyor and on to which a leaf can be deflected downwards, and an upwardly directed nozzle for receiving gas under pressure between the feed conveyor and the first conveyor.
Also according to the invention there is provided a deflector for use in belt conveyor systems for wafer leaves provided with a wafer leaf feeding belt conveyor, a first wafer leaf transmitting belt conveyor, which is arranged at a distance from and in alignment with the feeding belt conveyor, and a second wafer leaf transmitting belt conveyor which extends obliquely downwardly from the feeding belt conveyor, at least one upwardly directed blowing nozzle, to which gas under pressure can be supplied, arranged between the feeding belt conveyor and the first transmitting belt conveyor, beneath the movement path of the wafer leaves, which second transmitting belt conveyor follows the feeding belt conveyor directly or at least at a short distance.
There may be a downwardly directed blowing nozzle, to which gas under pressure can be supplied, arranged between the feeding belt conveyor and the first transmitting belt conveyor and above the movement path of the wafer leaves.
There may be a sensor for detecting the fed wafer leaves connected to a control unit for the blowing nozzles.
At least the second transmitting belt conveyor may comprise a plurality of endless conveying belts which are arranged in parallel at a distance from one another, and the upwardly directed blowing nozzle is formed by a blowing tube which is provided with nozzle orifices and which is arranged beneath an upper strand of the second transmitting belt conveyor and extends transversely to the belt conveyors.
The downwardly directed blowing nozzle may be formed by a blowing tube which is provided with nozzle orifices and which extends transversely to the belt conveyors.
In one example conveying belts of the feeding belt conveyor and the second transmitting belt conveyor run around guide pulleys arranged on a common shaft.
The invention also comprises a belt conveyor system for wafer leaves comprising a wafer leaf feeding belt conveyor, a first wafer leaf transmitting belt conveyor spaced from and in alignment with the feed conveyor, a second transmitting belt conveyor inclined downwardly with respect to the feed conveyor and on to which a leaf can be deflected downwards, and an upwardly directed nozzle for receiving gas under pressure between the feed conveyor and the first conveyor.
The invention will hereinafter be explained in more detail with the aid of an exemplified embodiment which is shown in the drawing, in which:
Fig. 1 shows a considerably simplified lateral view of a deflector in a belt conveyor system for wafer leaves, and
Fig. 2 shows a top view of the deflector shown in Fig. 1.
A feeding belt conveyor 1, which is only partly shown in Fig. 1, comprises several parallel endless conveying belts 2 which are constructed as round-section (circular section) belts and are guided around guide pulleys 3 on a shaft 4. Wafer leaves 5 (indicated in dash-dotted lines in the Figures) in a flat position are conveyed on the belt conveyor 1.
A first transmitting belt conveyor 6, which also comprises several parallel endless conveying belts 7, is arranged at a horizontal distance from and in vertical alignment with the feeding belt conveyor 1.
In addition to the conveying belts 2, there are guided around the guide pulleys 3 of the feeding belt conveyor 1 several parallel endless conveying belts 8 which form an obliquely downwardly extending second transmitting belt conveyor 9. In the exemplified embodiment shown, the obliquely downwardly directed transmitting belt conveyor 9 directly adjoins the feeding belt conveyor 1. Instead, these two belt conveyors 1 and 9 may be provided with guide pulleys which are arranged on separate shafts so that there is a short distance between these two belt conveyors 1 and 9.
Beneath the upper strand 8a of the transmitting belt conveyor 8, there is arranged a blowing nozzle, to which compressed air can be applied and which is formed by a blowing tube 10 which extends transversely to the transport direction of flat wafer sheets 5 and has upwardly directed spaced nozzle orifices
11. Above the movement path of the wafer leaves 5, there is provided another blowing nozzle, to which compressed air can be applied and which is formed by a blowing tube
12 which extends transversely to the transport direction and has spaced downwardly directed nozzle orifices 13. The two blowing tubes 10 and 12 are connected to a compressed-air source 18 via compressed-air lines 14 and 15 and a switch-over valve 17 which is operable by a control unit 16.
A sensor 19, for example an infra-red sensor, a light barrier sensor or an ultrasonic sensor, which is arranged above the movement path of the wafer leaves 5, gives a signal to the control unit 16 indicating whether a wafer leaf 5 is located in the deflector zone between the conveyors 1, 6.
In dependence on a control signal giving the desired deflector position or direction of deflection, compressed air is alternatively applied to the lower blowing tube 10 or the upper blowing tube 12 as soon as a wafer leaf 5 is located in the deflector zone. An air flow emerging upwardly from the lower blowing tube 10 carries the wafer leaf 5 so that it passes from the feeding belt conveyor 1 on the first transmitting belt conveyor 6 which is aligned with the former. If, by contrast, compressed air is applied to the upper blowing tube 12, then the downwardly directed air flow presses the conveyed or front edge of the wafer leaf 5 downwardly so that the wafer leaf 5 tilts on the obliquely downwardly directed second transmitting belt conveyor 9.
If the wafer leaves 5 are short in relation to the distance between the two belt conveyors 1 and 6, the upper blowing tube 12 can be dispensed with, thus rendering the construction of the deflector even simpler.
The described deflector allows very rapid deflector shifts even if the wafer leaves follow one another at short intervals and are transported at high speeds and without the risk of damage to the wafer leaves.
The shifting of the deflector is effected without moving any mechanical parts only by means of the selective operation of the blowing nozzle, whose emerging compressed-gas flow, which preferably consists of compressed air, bridges the free space between the feeding belt conveyor and the first transmitting belt conveyor, which is aligned with the for
mer, when it is intended to guide the wafer
leaves on this first transmitting belt conveyor.
When no compressed gas is applied to the
blowing nozzle, the wafer leaves tilt from the
feeding belt conveyor on the second transmitt
ing belt conveyor. which is directed obliquely
downwardly.
The ratio of the wafer leaf length in the transport direction to the distance between the
feeding belt conveyor and the first transmitt
ing belt conveyor 6 determines the range of
use of this deflector. which is mainly suitable for wafer leaves of short and medium length.
If. for longer wafer leaves, there is a risk that these will not tilt quickly enough onto the
obliquely downwardly directed belt conveyor.
provision is for another downwardly directed blowing nozzle 13 to which a compressed gas can be applied, to be arranged between the feeding belt conveyor and the first transmitt
ing belt conveyor, which is aligned with the former, above the movement path of the wafer leaves. Depending on the desired deflector position, the compressed gas is then alternatively applied to these two blowing nozzles so that the conveyed wafer leaf is either carried by the upwardly directed compressed-gas flow or is tilted by the downwardly directed compressed-gas flow onto the obliquely downwardly directed belt conveyor.
It is particularly advantageous to provide the sensor which detects the fed wafer leaves and which is connected to a control unit for the blowing nozzles. The deflector can then be operated in such a way that the compressed gas is only applied to the blowing nozzles when a wafer leaf is located in the deflector zone. This causes the air requirement to be very low. Since only one valve has to be actuated, the deflector operates very rapidly.
Even if the wafer leaves follow one another at very short intervals and/or at a high speed, there do not arise any difficulties. The very light large-area wafer leaves are reliably and quickly grasped by the compressed-gas flow emerging from the blowing nozzles and are deflected, if required, so that any undesirable mechanical contact, and consequently the risk of damage occurring, is prevented.
Claims (10)
1. A deflector for a wafer leaf belt conveyor system comprising a feed belt conveyor a first transmitting belt conveyor spaced from and in alignment with the feed conveyor, a second transmitting belt conveyor inclined downwardly with respect to the feed conveyor and on to which a leaf can be deflected downwards, and an upwardly directed nozzle for receiving gas under pressure between the feed conveyor and the first conveyor.
2. A deflector for use in belt conveyor systems for wafer leaves provided with a wafer leaf feeding belt conveyor, a first wafer leaf transmitting belt conveyor, which is ar ranged at a distance from and in alignment with the feeding belt conveyor, and a second wafer leaf transmitting belt conveyor which extends obliquely downwardly from the feeding belt conveyor, at least one upwardly directed blowing nozzle, to which gas under pressure can be supplied, arranged between the feeding belt conveyor and the first transmitting belt conveyor beneath the movement path of the wafer leaves, which second transmitting belt conveyor follows the feeding belt conveyor directly or at least at a short distance.
3. A deflector as claimed in Claim 1 or
Claim 2, in which a downwardly directed blowing nozzle, to which gas under pressure can be supplied, is arranged between the feeding belt conveyor and the first transmitting belt conveyor and above the movement path of the wafer leaves.
4. A deflector as claimed in Claim 1 or
Claim 2 or Claim 3, in which a sensor for detecting the fed wafer leaves is connected to a control unit for the blowing nozzles.
5. A deflector as claimed in any preceding
Claim, in which at least the second transmitting belt conveyor comprises a plurality of endless conveying belts which are arranged in parallel at a distance from one another, and the upwardly directed blowing nozzle is formed by a blowing tube which is provided with nozzle orifices and which is arranged beneath an upper strand of the second transmitting belt conveyor and extends transversely to the belt conveyors.
6. A deflector as claimed in any preceding
Claim, in which the downwardly directed blowing nozzle is formed by a blowing tube which is provided with nozzle orifices and which extends transversely to the belt conveyors.
7. A deflector as claimed in any preceding
Claim, in which conveying belts of the feeding belt conveyor and the second transmitting belt conveyor run around guide pulleys arranged on a common shaft.
8. A deflector for use in a belt conveyor system of wafer leaves substantially as hereinbefore described with reference to and as shown in the accompanying drawings.
9. A belt conveyor system for wafer leaves including a deflector as claimed in any preceding claim.
10. A belt conveyor system for wafer leaves comprising a wafer leaf feeding belt conveyor, a first wafer leaf transmitting belt conveyor spaced from and in alignment with the feed conveyor, a second transmitting belt conveyor inclined downwardly with respect to the feed conveyor and on to which a leaf can be deflected downwards, and an upwardly directed nozzle for receiving gas under pressure between the feed conveyor and the first conveyor.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19833321365 DE3321365A1 (en) | 1983-06-14 | 1983-06-14 | Distributor on belt conveyor systems for waffle sheets |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| GB8414886D0 GB8414886D0 (en) | 1984-07-18 |
| GB2143193A true GB2143193A (en) | 1985-02-06 |
Family
ID=6201403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB08414886A Withdrawn GB2143193A (en) | 1983-06-14 | 1984-06-11 | Belt conveyor systems for wafer leaves and deflectors therefor |
Country Status (3)
| Country | Link |
|---|---|
| AT (1) | AT381625B (en) |
| DE (1) | DE3321365A1 (en) |
| GB (1) | GB2143193A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2259288A (en) * | 1991-09-04 | 1993-03-10 | Martin Frederick Cairncross | Sheet sampling machine |
| ITUD20090156A1 (en) * | 2009-09-03 | 2011-03-04 | Applied Materials Inc | SUBSTRATI PROCESSING DEVICE INCLUDING A DEVICE FOR THE MANIPULATION OF DAMAGED SUBSTRATES |
| CN102874729A (en) * | 2012-02-09 | 2013-01-16 | 上海华中药业有限公司 | Buffering platform |
| WO2018024707A1 (en) * | 2016-08-01 | 2018-02-08 | Asys Automatisierungssysteme Gmbh | Transporting system and processing system for substrates |
| WO2021175358A1 (en) * | 2020-03-04 | 2021-09-10 | Walterwerk Kiel Gmbh & Co. Kg | Installation for conveying and folding a wafer sheet |
| CH719986A1 (en) * | 2022-08-25 | 2024-03-15 | Ferag Ag | CONVEYOR SYSTEM. |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE8901375U1 (en) * | 1989-02-07 | 1990-06-07 | C. Keller GmbH u. Co KG, 4530 Ibbenbüren | Veneer (sheet) transport device with division into superimposed transport paths |
| DE10354671A1 (en) * | 2003-11-22 | 2005-06-16 | Bhs Corrugated Maschinen- Und Anlagenbau Gmbh | Switch for railways to be split into several sub-railways |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB300165A (en) * | 1927-11-07 | 1929-05-09 | Bates Valve Bag Corp | Improvements in or relating to apparatus for severing sheets of material, as for cutting bag tubes into bag lengths |
| GB897194A (en) * | 1957-12-20 | 1962-05-23 | Telefunken Gmbh | A conveyor device |
| GB1208969A (en) * | 1968-11-14 | 1970-10-14 | Plamag Plauener Druckmaschinen | Improvements in or relating to sheet conveying device in folding apparatus |
| GB1211051A (en) * | 1967-01-05 | 1970-11-04 | Steuler Industriewerke Gmbh | Apparatus for distributing flat articles |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB820731A (en) * | 1955-11-18 | 1959-09-23 | T & T Vicars Ltd | Improvements in or relating to conveyor systems |
| US3623722A (en) * | 1970-08-31 | 1971-11-30 | Bonnierfoeretagen Ab | Automatic switch for stream diverter |
| AT329479B (en) * | 1971-02-11 | 1976-05-10 | Haas Franz | DEVICE FOR MANUFACTURING LAYERED WAFFLE PLATES |
-
1983
- 1983-06-14 DE DE19833321365 patent/DE3321365A1/en not_active Withdrawn
-
1984
- 1984-05-18 AT AT0165284A patent/AT381625B/en not_active IP Right Cessation
- 1984-06-11 GB GB08414886A patent/GB2143193A/en not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB300165A (en) * | 1927-11-07 | 1929-05-09 | Bates Valve Bag Corp | Improvements in or relating to apparatus for severing sheets of material, as for cutting bag tubes into bag lengths |
| GB897194A (en) * | 1957-12-20 | 1962-05-23 | Telefunken Gmbh | A conveyor device |
| GB1211051A (en) * | 1967-01-05 | 1970-11-04 | Steuler Industriewerke Gmbh | Apparatus for distributing flat articles |
| GB1208969A (en) * | 1968-11-14 | 1970-10-14 | Plamag Plauener Druckmaschinen | Improvements in or relating to sheet conveying device in folding apparatus |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2259288A (en) * | 1991-09-04 | 1993-03-10 | Martin Frederick Cairncross | Sheet sampling machine |
| ITUD20090156A1 (en) * | 2009-09-03 | 2011-03-04 | Applied Materials Inc | SUBSTRATI PROCESSING DEVICE INCLUDING A DEVICE FOR THE MANIPULATION OF DAMAGED SUBSTRATES |
| CN102874729A (en) * | 2012-02-09 | 2013-01-16 | 上海华中药业有限公司 | Buffering platform |
| WO2018024707A1 (en) * | 2016-08-01 | 2018-02-08 | Asys Automatisierungssysteme Gmbh | Transporting system and processing system for substrates |
| CN109689541A (en) * | 2016-08-01 | 2019-04-26 | 亚席斯自动化系统有限公司 | Transmission system and system of processing for substrate |
| WO2021175358A1 (en) * | 2020-03-04 | 2021-09-10 | Walterwerk Kiel Gmbh & Co. Kg | Installation for conveying and folding a wafer sheet |
| CH719986A1 (en) * | 2022-08-25 | 2024-03-15 | Ferag Ag | CONVEYOR SYSTEM. |
Also Published As
| Publication number | Publication date |
|---|---|
| AT381625B (en) | 1986-11-10 |
| ATA165284A (en) | 1986-04-15 |
| DE3321365A1 (en) | 1984-12-20 |
| GB8414886D0 (en) | 1984-07-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |