GB2140460A - Insulated metal substrates - Google Patents
Insulated metal substrates Download PDFInfo
- Publication number
- GB2140460A GB2140460A GB08406368A GB8406368A GB2140460A GB 2140460 A GB2140460 A GB 2140460A GB 08406368 A GB08406368 A GB 08406368A GB 8406368 A GB8406368 A GB 8406368A GB 2140460 A GB2140460 A GB 2140460A
- Authority
- GB
- United Kingdom
- Prior art keywords
- thin
- layer
- substrate
- copper
- keying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/05—Insulated conductive substrates, e.g. insulated metal substrate
- H05K1/053—Insulated conductive substrates, e.g. insulated metal substrate the metal substrate being covered by an inorganic insulating layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Insulated Metal Substrates For Printed Circuits (AREA)
Abstract
An insulated copper substrate for use in the manufacture of electronic circuits and able to withstand high temperatures, e.g. 850 DEG C comprises a substrate of copper, a thin keying layer on a surface of the substrate, and a layer of SiO2 and/or Al2O3 on the thin keying layer. The thin keying layer is a metal or alloy having a coefficient of thermal expansion between that of copper and that of the ceramic material, e.g. steel or molybdenum.
Description
SPECIFICATION
Insulated metal substrates
This invention relates to insulated metal substrates.
Insulated metal substrates are frequently used in the manufacture of electronic circuits, and as inserts in headers and cans in the chip-packaging industry.
To use copper as the metal substrate would be advantageous because, having a high thermal conductivity, it could readily absorb and then dissipate the heat generated, in use, by the components of an electronic circuit.
One problem which arises from so using a copper substrate is that the insulating material, formed on the surface of the substrate, must be capable of transmitting high temperatures, say 850 C, to the copper without breaking down.
According to this invention, an insulated copper substrate comprises a base or substrate of copper, a thin keying layer on a surface of the substrate and a layer of ceramic material, chosen from SiO2 and/or Awl203, on the thin keying layer, the thin keying layer being a metal or alloy having a coefficient of thermal expansion between that of copper and that of the ceramic material.
The thin keying layer will have a thickness in the region of 1000 Angstrom units.
The layer of ceramic material may be between 2um and 3um thick.
The invention also provides a method of making such an insulated copper substrate which includes the steps of providing on the surface of the copper substrate a thin layer of the said keying material and then providing, on the thin layer of the keying material, a layer of the said ceramic material.
The copper surface may be polished before being provided with the thin keying layer.
The thin keying layer may, conveniently, be deposited on the copper substrate by a sputtering technique. It could, however, and by way of further example, be provided on the copper substrate by chemical vapour deposition.
The ceramic material may also be deposited on the thin keying layer by sputtering. Other deposition techniques could be used, e.g. chemical vapour deposition.
The thin keying material may, conveniently, be steel or molybdenum.
The term copper, as used herein, includes not only copper but also suitable copper-base alloys.
In one embodiment of the invention, which is given by way of example, a copper substrate was cleaned using an Arklone ultrasonic apparatus.
A layer of mild steel was then sputtered onto the substrate, such layer being 1 500 A thick.
A layer of SiO2 was then sputtered onto the mild steel, such layer being 3um thick.
The insulated copper substrate so produced had an insulation resistance of greater than 1000 megohms for an applied voltage of 100 volts.
On heating the copper substrate so produced up to 850 C, the insulated ceramic layer did not peel off and, after cooling to room temperature, still displayed the same insulation resistance.
Claims (9)
1. An insulated copper substrate comprising a base or substrate of copper, a thin keying layer on a surface of the base or substrate and, on the thin keying layer, a layer of ceramic material chosen from
SiO2 and/or Awl203, the thin keying layer being a metal or alloy having a coefficient of thermal expansion between that of copper and that of the ceramic material.
2. An insulated copper substrate as claimed in
Claim 1 in which the said surface is a polished surface.
3. An insulated copper substrate as claimed in either Claim 1 or Claim 2 in which the thin keying layer is of steel.
4. An insulated copper substrate as claimed in either Claim 1 or Claim 2 in which the thin keying layer is of molybdenum.
5. A method of making an insulated copper substrate as claimed in Claim 1, which method includes the steps of providing, on a surface of a base or substrate of copper, a thin keying layer of the said metal or alloy, and then providing, on that thin keying layer, a layer of said ceramic material.
6. A method as claimed in Claim 5 in which the thin keying layer is provided by a sputtering technique.
7. A method as claimed in Claim 5 in which the thin keying layer is provided by chemical vapour deposition.
8. A method as claimed in any one of Claims 5, 6 or 7, in which the ceramic layer is provided by a sputtering technique.
9. A method as claimed in any one of Claims 5 to 8 in which the surface of the copper substrate is polished priorto deposition of the thin keying layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB08406368A GB2140460B (en) | 1983-05-27 | 1984-03-12 | Insulated metal substrates |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB838314857A GB8314857D0 (en) | 1983-05-27 | 1983-05-27 | Insulated metal substrates |
GB08406368A GB2140460B (en) | 1983-05-27 | 1984-03-12 | Insulated metal substrates |
Publications (3)
Publication Number | Publication Date |
---|---|
GB8406368D0 GB8406368D0 (en) | 1984-04-18 |
GB2140460A true GB2140460A (en) | 1984-11-28 |
GB2140460B GB2140460B (en) | 1986-06-25 |
Family
ID=26286260
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB08406368A Expired GB2140460B (en) | 1983-05-27 | 1984-03-12 | Insulated metal substrates |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2140460B (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2164060A (en) * | 1984-07-17 | 1986-03-12 | Bbc Brown Boveri & Cie | Method of applying a protective layer to oxide dispersion hardened super alloys |
EP0186655A2 (en) * | 1984-12-27 | 1986-07-02 | VOEST-ALPINE Aktiengesellschaft | Process for making a composite circuit board |
US4767674A (en) * | 1984-01-27 | 1988-08-30 | Dainichi-Nippon Cables, Ltd. | Metal cored board and method for manufacturing same |
CH668660A5 (en) * | 1986-10-16 | 1989-01-13 | Optec Dai Chi Denko | ELECTRIC CONDUCTOR COATED WITH AN ADHERENT INSULATING LAYER RESISTANT TO HIGH TEMPERATURES. |
EP0416898A2 (en) * | 1989-09-05 | 1991-03-13 | Xerox Corporation | Thick film substrate with highly thermally conductive metal base |
WO2003002782A1 (en) * | 2001-06-28 | 2003-01-09 | Energenius, Inc. | Method of making a nickel-coated copper substrate and thin film composite containing the same |
US6649930B2 (en) | 2000-06-27 | 2003-11-18 | Energenius, Inc. | Thin film composite containing a nickel-coated copper substrate and energy storage device containing the same |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB978992A (en) * | 1960-12-16 | 1965-01-01 | Rca Corp | Insulation |
GB1118758A (en) * | 1965-12-20 | 1968-07-03 | Ibm | Improvements in or relating to the sputtering of conductive materials |
GB1262758A (en) * | 1968-06-28 | 1972-02-09 | Ibm | Method of plating semiconductor surface |
GB1342071A (en) * | 1970-04-17 | 1973-12-25 | Wilkinson Sword Ltd | Razor blades |
GB1358416A (en) * | 1970-09-24 | 1974-07-03 | Westinghouse Electric Corp | Apparatus for preparing an electronic component on a substrate by vapour deposition |
GB1527341A (en) * | 1976-02-17 | 1978-10-04 | Technovation | Process for manufacturing a ferroelectric device and devices manufactured thereby |
GB2083842A (en) * | 1980-09-09 | 1982-03-31 | Westinghouse Electric Corp | Transparent abrasive resistant sputtered films on metal substrates |
GB2109415A (en) * | 1981-10-01 | 1983-06-02 | Sumitomo Electric Industries | Wear resistant amorphous alumina coating for hard alloys |
-
1984
- 1984-03-12 GB GB08406368A patent/GB2140460B/en not_active Expired
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB978992A (en) * | 1960-12-16 | 1965-01-01 | Rca Corp | Insulation |
GB1118758A (en) * | 1965-12-20 | 1968-07-03 | Ibm | Improvements in or relating to the sputtering of conductive materials |
GB1262758A (en) * | 1968-06-28 | 1972-02-09 | Ibm | Method of plating semiconductor surface |
GB1342071A (en) * | 1970-04-17 | 1973-12-25 | Wilkinson Sword Ltd | Razor blades |
GB1358416A (en) * | 1970-09-24 | 1974-07-03 | Westinghouse Electric Corp | Apparatus for preparing an electronic component on a substrate by vapour deposition |
GB1527341A (en) * | 1976-02-17 | 1978-10-04 | Technovation | Process for manufacturing a ferroelectric device and devices manufactured thereby |
GB2083842A (en) * | 1980-09-09 | 1982-03-31 | Westinghouse Electric Corp | Transparent abrasive resistant sputtered films on metal substrates |
GB2109415A (en) * | 1981-10-01 | 1983-06-02 | Sumitomo Electric Industries | Wear resistant amorphous alumina coating for hard alloys |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4767674A (en) * | 1984-01-27 | 1988-08-30 | Dainichi-Nippon Cables, Ltd. | Metal cored board and method for manufacturing same |
GB2164060A (en) * | 1984-07-17 | 1986-03-12 | Bbc Brown Boveri & Cie | Method of applying a protective layer to oxide dispersion hardened super alloys |
EP0186655A2 (en) * | 1984-12-27 | 1986-07-02 | VOEST-ALPINE Aktiengesellschaft | Process for making a composite circuit board |
EP0186655A3 (en) * | 1984-12-27 | 1986-10-22 | VOEST-ALPINE Aktiengesellschaft | Process for making a composite circuit board |
CH668660A5 (en) * | 1986-10-16 | 1989-01-13 | Optec Dai Chi Denko | ELECTRIC CONDUCTOR COATED WITH AN ADHERENT INSULATING LAYER RESISTANT TO HIGH TEMPERATURES. |
EP0416898A2 (en) * | 1989-09-05 | 1991-03-13 | Xerox Corporation | Thick film substrate with highly thermally conductive metal base |
EP0416898A3 (en) * | 1989-09-05 | 1992-02-12 | Xerox Corporation | Thick film substrate with highly thermally conductive metal base |
US6649930B2 (en) | 2000-06-27 | 2003-11-18 | Energenius, Inc. | Thin film composite containing a nickel-coated copper substrate and energy storage device containing the same |
WO2003002782A1 (en) * | 2001-06-28 | 2003-01-09 | Energenius, Inc. | Method of making a nickel-coated copper substrate and thin film composite containing the same |
Also Published As
Publication number | Publication date |
---|---|
GB8406368D0 (en) | 1984-04-18 |
GB2140460B (en) | 1986-06-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0355998B1 (en) | Glass ceramic substrate having electrically conductive film | |
US3589965A (en) | Bonding an insulator to an insulator | |
US4180723A (en) | Electrical contacts for electrically conductive carbon glasses | |
US5276423A (en) | Circuit units, substrates therefor and method of making | |
GB2140460A (en) | Insulated metal substrates | |
US3914517A (en) | Method of forming a conductively coated crystalline glass article and product produced thereby | |
US2882377A (en) | Electrical resistor metal coatings on refractory materials | |
JPH0235475B2 (en) | ||
US4777060A (en) | Method for making a composite substrate for electronic semiconductor parts | |
JPH1041377A (en) | Electrostatic chuck | |
WO2001083847A3 (en) | Method of making dielectric films | |
WO1992017622A1 (en) | Thermally compatible sputter target and backing plate assembly | |
JPH0215631B2 (en) | ||
US4440828A (en) | Substrate for a microwave electronic circuit and a method for the making of said substrate | |
SE7609244L (en) | ELECTRICALLY INSULATED GENERATION | |
FR2305025A1 (en) | Mount and heat sink for semiconductor - has low thermal resistance and is sandwich of molybdenum, beryllium oxide, beryllium, and gold | |
JPS63124555A (en) | Substrate for semiconductor device | |
US5040292A (en) | Method of forming dielectric layer on a metal substrate having improved adhesion | |
JPH06293963A (en) | Backing plate for ito sputtering target | |
KR19990033885A (en) | A method of bonding a diamond substrate to at least one metal substrate | |
JP3282700B2 (en) | Coating film formation method | |
JPH029457B2 (en) | ||
JPS62198137A (en) | Insulating substrate for electric device | |
EP0230953A2 (en) | Process for manufacturing a semiconductor device having a protective layer | |
JPH02251192A (en) | Flame-sprayed substrate |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |