GB2108761B - Integrated circuits - Google Patents

Integrated circuits

Info

Publication number
GB2108761B
GB2108761B GB08231819A GB8231819A GB2108761B GB 2108761 B GB2108761 B GB 2108761B GB 08231819 A GB08231819 A GB 08231819A GB 8231819 A GB8231819 A GB 8231819A GB 2108761 B GB2108761 B GB 2108761B
Authority
GB
United Kingdom
Prior art keywords
integrated circuits
circuits
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08231819A
Other versions
GB2108761A (en
Inventor
Nigel Gordon Chew
Anthony George Cullis
Hugh Charles Webber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Defence
Original Assignee
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Defence filed Critical UK Secretary of State for Defence
Priority to GB08231819A priority Critical patent/GB2108761B/en
Publication of GB2108761A publication Critical patent/GB2108761A/en
Application granted granted Critical
Publication of GB2108761B publication Critical patent/GB2108761B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Recrystallisation Techniques (AREA)
  • Element Separation (AREA)
GB08231819A 1981-11-10 1982-11-08 Integrated circuits Expired GB2108761B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08231819A GB2108761B (en) 1981-11-10 1982-11-08 Integrated circuits

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8133926 1981-11-10
GB08231819A GB2108761B (en) 1981-11-10 1982-11-08 Integrated circuits

Publications (2)

Publication Number Publication Date
GB2108761A GB2108761A (en) 1983-05-18
GB2108761B true GB2108761B (en) 1985-09-04

Family

ID=26281226

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08231819A Expired GB2108761B (en) 1981-11-10 1982-11-08 Integrated circuits

Country Status (1)

Country Link
GB (1) GB2108761B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5098229B2 (en) * 2006-06-21 2012-12-12 ソニー株式会社 Surface modification method
US11322387B1 (en) * 2020-10-13 2022-05-03 Globalfoundries U.S. Inc. Bulk wafer switch isolation

Also Published As

Publication number Publication date
GB2108761A (en) 1983-05-18

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee