GB2097184A - Temperature regulating an electronic circuit module - Google Patents

Temperature regulating an electronic circuit module Download PDF

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Publication number
GB2097184A
GB2097184A GB8202783A GB8202783A GB2097184A GB 2097184 A GB2097184 A GB 2097184A GB 8202783 A GB8202783 A GB 8202783A GB 8202783 A GB8202783 A GB 8202783A GB 2097184 A GB2097184 A GB 2097184A
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GB
United Kingdom
Prior art keywords
circuit
temperature
module
electronic
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB8202783A
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GB2097184B (en
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Burr Brown Research Corp
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Burr Brown Research Corp
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Filing date
Publication date
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Publication of GB2097184A publication Critical patent/GB2097184A/en
Application granted granted Critical
Publication of GB2097184B publication Critical patent/GB2097184B/en
Expired legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/38Cooling arrangements using the Peltier effect
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/345Arrangements for heating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/4847Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
    • H01L2224/48472Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49171Fan-out arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3011Impedance

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)

Abstract

A combination of heating 10 and cooling 2 elements within an electronic circuit module provide constant temperature regulation, at above or below ambient temperature, in order to achieve maximal performance from semiconductor integrated circuitry 8, 20. The temperature regulation function may be achieved with relatively low current control circuitry operating the heating element, and may be electrically isolated from the integrated circuitry. Alternatively temperature regulation may be achieved by controlling the cooling element. The module is capable of performance over at least a 50 DEG C variation in ambient temperature. <IMAGE>

Description

SPECIFICATION A method of temperatures regulating an electronic circuit module and a temperatureregulated circuit module This invention relates to the field of temperature-regulated electronic circuitry and temperatureregulating methods.
In the development and evaluation of semiconductor devices and/or semiconductor chips containing multiple devices integrated together to provide a functional electronic circuit, it became very apparent that overheating of the semiconductor devices and/or semiconductor chips was very detrimental to device or circuit performance and, in many cases, lead to destruction of the device or circuit function. Thus, it became apparent that solutions or techniques were needed to prevent device or circuit overheating and thereby avoid the resulting deterioration or destruction of the device or circuit function. Various solutions or techniques to prevent device or circuit overheating were tried or implemented in attempts to solve this problem. One such solution or technique was to provide thermoelectric cooling or semiconductor circuit elements to prevent their destruction at igh temperatures.Another solution or technique was to operatee low-power semiconductor circuits at below ambient temperature to improve their performance with respect to noise and parasitic leakage currents. In the past, such below ambient temperature operation has ordinarily been effected by means of expensive temperature chambers utilizing cooling fluids and the like which are not well suited for compact or portable equipment. Accordingly, a need existed to provide an improved technique or method for cooling semiconductor devices or chips to reduce overheating of the semiconductor devices or chips.
In accordance therefore with this invention we provide an electronic circuit module, comprising, in combination: a temperature sensitive electronic integrated circuit; thermoelectric cooling means for said circuit; and temperature-regulating means coupled to said circuit and said cooling means for controlling the temperature of said circuit.
There is also provided a method for providing temperature-regulated electronic circuitry comprising the steps of: providing an electronic circuit; cooling said electronic circuit by thermoelectric cooling means; and temperature-regulating said electronic circuit for controlling the temperature of said circuit by providing temperature-regulating means coupled to said circuit and said thermoelectric cooling means.
In preferred embodiments of the present invention to be described in detail hereinafter, temperature sensitive electronic circuitry is cooled by thermoelectric means and heated by temperature regulating integrated circuit (IC) means to maintain constant temperature of the critical circuitry over a wide range of ambient temperature, which may be either above or below the regulated temperature. In one embodiment, the regulatory means and the critical circuitry are both separated from the cooling means by a thermal impedance; relatively little power must be controlled by the regulator. Alternatively, the cooling means may be directly regulated. In either case, the cooler power supply is substantially isolated from the critical circuit power supply. Other embodiments consistent with the following objects are within the scope of the invention.
In the accompanying drawings: Figure 1 is a cross-section of a preferred embodiment of the device of Fig. 2 taken along line 1-1 and showing the major elements thereof; Figure 2 is a top view illustrating interconnection of the various elements of the device.
Referring to Figs. 1 and 2, there is shown a cross-sectional side view and a top view, respectively, of a preferred embodiment of the invention. A substrate 1 serves as a support for the other elements or components of the electronic circuitry provided thereon and also provides for heat transfer to ambient. As shown in Fig. 2, the substrate 1 in this example is the metallic base of a TO-3 type header bearing multiple pins 17 (see Fig. 1) for external connection. On top of the substrate 1 is mounted a thermoelectric cooler or cooler module 2 (see Fig. 1) activated by leads 18 connected to two of the package pins 17. The thermoelectric cooler 2 comprises an active element (vertical lines) sandwiched between a horizontal hot face mounted on the substrate 1 and a horizontal cold face mounted on and located above the active element.
(If desired, connections can be made through the faces for electrically energizing the cooler.) In the embodiment shown, a thermal insulator 4 for example Kapton, is mounted on the cold face of the thermoelectric cooper 2 and supports an isothermal insulating substrate 6, for example, made of beryllia. The substrate 6 is attached to a temperature regulating heater 10 in integrated or hybrid circuit format.
The electronic circuit function to be temperature regulated comprises one or more semicon ductor or integrated circuit chips 8 (see Fig. 2 where two chips are shown) which may be mounted on a hybrid substrate 20 bearing thin and/or thick film passive components (such as resistors, capacitors, etc.) depending on the desired circuit function. A flexible insulator 1 4 (e.g.
Kapton) bearing a printed circuit pattern provides for interconnecting of all components by means of the wire bonds 16 being connected by means of the conductors of the printed circuit pattern to the package pins 17 and to the bonding lands or the other components. The other components include, for example, an output buffer or amplifying circuit 12 mounted directly on the primary substrate 1 in order to reduce dissipation in the cooled portion of the device. By mounting any thermally non-critical components away from the cooler 2 better temperature control is achieved, as well as elimination of thermal transients and thermal feedback which would degrade the performance of the regulated circuitry.
By way of specificity, the cooler 2 may be a MELCOR thermoelectric module FC 0.6-8-06 which can provide, for example, a 65 C differential between the hot and cold faces. This temperature differential decreases approximately linearly with increased pumped power, and falls to zero at a pumped power of about 0.55 W. This is achieved with a power input to the cooler of about 0.9 watts (1A, .9V).Based on such performance, temperature regulation of, for example, a Burr-Brown BB3528 FET amplifier at - 1 0'C, would result in an input bias current of only about 7.5 FA over an ambient temperature range of 68 C according to the following example in tubular form: DROP ACROSS DROP ACROSS POWER IN COOLER INSULATOR HEATER 8 TEMP OF CASE TEMP NOTE 1 NOTE 2 AMP FET AMP -25'C -27'C 40 C 318 mW -lOC NOTE 3 25 C -51'C 1 4 C 114mW 40 C -58.6'C 6.6 C 53 mW - 10 C 43 C -60 C 5 C 40mW - 10 C NOTE 4 NOTE 5 NOTES 1.From manufacturer's data for thermoelectric cooler: T ( C) = - 65 + 120 x pumped power (Watts) (at 1A input to cooler) 2. Chosen for 5 C at 40.mW = 1 25 C/W.
3. 106mAat30V 4. Maximum case temperature for circuit temperature regulation to - 1 0'C.
5. Quiescent power of circuit and heater at - 1 0'C.
From the table, it is seen that due to the increase in dissipation of the temperature regulating IC 12, the, for example, FET amplifier (comprising the chips 8 and the passive devices on the hybrid substrate 20) is regulated at a constant temperature above or below the ambient temperature.
Not only does the regulatory circuitry and method of cooling operation, as described above, reduce the leakage current in semiconductor electronic devices, but it also lowers noise and lower drift can be obtained due to the regulation of the temperature of the critical circuitry. It also provides integral thermal regulation of an electronic circuit module at a temperature below ambient whereby improved circuit performance is achieved and enables a compact, totally electronic module with temperature regulation at a temperature below ambient to be provided.
Also integral thermal regulation with minimal temporal errors can be attained in an electronic circuit module operating at temperatures below ambient, the integral thermal regulation being achieved with relatively low current temperature control circuitry. Other configurations will be obvious to those skilled in the art based on the foregoing detailed description of the preferred embodiments. In summary, the module depicted in the Figures has a cooling feature which permits cooling (by means of cooler 2) of the electronic circuit to a desired preferred low temperature range of operation to provide better and more efficient device and circuit operation while still permitting stabilization of device and circuit performance by providing a heating feature which permits heating (by means of the semiconductor device 10) of the electronic circuit to maintain the desired cooled temperature of the circuit within a very narrow temperature range thereby increasing performance.

Claims (11)

1. An electronic circuit module, comprising, in combination: a temperature sensitive electronic integrated circuit; thermoelectric cooling means for said circuit; and temperature-regulating means coupled to said circuit and said cooling means for controlling the temperature of said circuit.
2. The module of Claim 1 wherein said temperature-regulating means controls the temperature of said circuit at a value below the ambient temperature.
3. The module of Claim 1, wherein said temperature-regulating means controls the temperature of said circuit at a value within a range of ambient temperatures.
4. An electronic module including a temperature-sensitive integrated circuit comprising, in combination: thermoelectric cooling means for said circuit; heating means for said circuit; thermal impedance means interposed between said cooling means and both of said circuit and said heating means; and temperature-regulating means coupled to said circuit for electrically energizing said heating means to control the temperature of said circuit.
5. The module of Claim 4 wherein said temperature-regulating means controls the temperature of said circuit at a value below the ambient temperature.
6. The module of Claim 4 wherein said temperature-regulating means controls the temperature of said circuit at a value below or above the ambient temperature or at a value within a range of ambient temperatures.
7. The module of any of the preceding claims wherein said cooling means is electrically isolated from said circuit.
8. The module of any of the preceding claims further including output amplifying circuit means for said circuit, said amplifying means being thermally isolated from said circuit.
9. An electronic module including a temperature sensitive integrated circuit comprising in combination: heating means for said circuit; thermoelectric cooling means for reducing the temperature of both said circuit and said heating means; and temperature-regulating means energizing said heating means for simultaneously controlling the temperature of said circuit and said heating means.
10. A method for providing temperature-regulated electronic circuitry comprising the steps of: providing an electronic circuit; cooling said electronic circuit by thermoelectric cooling means; and temperature-regulating said electronic circuit for controlling the temperature of said circuit by providing temperature-regulating means coupled to said circuit and said thermoelectric cooling means.
11. The method of Claim 10 including the steps of heating said circuit and temperatureregulating by energizing the heating for controlling the temperature of said circuit.
GB8202783A 1981-04-20 1982-02-01 Temperature regulating an electronic circuit module Expired GB2097184B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US25577581A 1981-04-20 1981-04-20

Publications (2)

Publication Number Publication Date
GB2097184A true GB2097184A (en) 1982-10-27
GB2097184B GB2097184B (en) 1985-07-03

Family

ID=22969809

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8202783A Expired GB2097184B (en) 1981-04-20 1982-02-01 Temperature regulating an electronic circuit module

Country Status (4)

Country Link
JP (1) JPS57178349A (en)
DE (1) DE3214614A1 (en)
FR (1) FR2504293B1 (en)
GB (1) GB2097184B (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2131607A (en) * 1982-11-24 1984-06-20 Hitachi Ltd Semiconductor laser device
GB2163008A (en) * 1984-08-08 1986-02-12 Varian Associates Miniature, temperature controlled phase detector
US4691987A (en) * 1983-07-08 1987-09-08 Itek Graphix Corp. Optical fiber cable producer and method of bonding optical fibers to light emitting diodes
US5012325A (en) * 1990-04-24 1991-04-30 International Business Machines Corp. Thermoelectric cooling via electrical connections
US5032897A (en) * 1990-02-28 1991-07-16 International Business Machines Corp. Integrated thermoelectric cooling
FR2690571A1 (en) * 1992-04-23 1993-10-29 Peugeot Temp. control system for electronic circuit module, esp. laser diode - includes thermistor temp. sensors linked to control circuit for regulating two cooling elements
US5419780A (en) * 1994-04-29 1995-05-30 Ast Research, Inc. Method and apparatus for recovering power from semiconductor circuit using thermoelectric device
WO1997048881A1 (en) * 1996-06-21 1997-12-24 Pes, Inc. Integrated converter for extending the life span of electronic components
US5712448A (en) * 1996-02-07 1998-01-27 California Institute Of Technology Cooling device featuring thermoelectric and diamond materials for temperature control of heat-dissipating devices
GB2364439A (en) * 2000-02-04 2002-01-23 Ibm Thermal management of integrated circuits
GB2375431A (en) * 2001-05-10 2002-11-13 Bookham Technology Plc Device with integrated semiconductor temperature sensor and/or localised heater

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3326834A1 (en) * 1982-08-24 1984-03-01 General Electric Co., Schenectady, N.Y. Process for improving the manufacture of nuclear fuel products
DE3709201A1 (en) * 1987-03-20 1988-09-29 Bosch Gmbh Robert HEAT RADIATION SENSOR
DE4135853A1 (en) * 1991-10-31 1993-05-06 Alcatel Sel Aktiengesellschaft, 7000 Stuttgart, De Active semiconductor element coupled to controllable heat source - which may be external heating element with thermal bridge, or resistive layer monolithically integrated into semiconductor
DE4208857A1 (en) * 1992-03-19 1993-09-23 Sel Alcatel Ag OPTICAL MESSAGE TRANSMISSION SYSTEM WITH FIBER OPTICAL AMPLIFIERS AND REGULATION OF THE TRANSMITTER WAVELENGTH
DE4208858A1 (en) * 1992-03-19 1993-09-23 Sel Alcatel Ag FIBER OPTICAL AMPLIFIER WITH CONTROL OF THE PUMP LIGHT WAVELENGTH

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Publication number Priority date Publication date Assignee Title
GB908662A (en) * 1960-01-11 1962-10-24 Ass Elect Ind Cooling apparatus
FR1363163A (en) * 1963-02-06 1964-06-12 Thomson Houston Comp Francaise Improvements to ovens for electronic components
IL23606A (en) * 1964-07-09 1969-11-12 Charbonnier R Electronic component with individual thermal regulation
DE1245458B (en) * 1966-04-27 1967-07-27 Telefunken Patent Integrated circuit, the carrier plate of which has good thermal conductivity
US3602721A (en) * 1967-11-20 1971-08-31 Malsushita Electric Ind Co Ltd Photoelectric device with enhanced photoconductive sensitivity and storage effect of input radiation
DE2337436C2 (en) * 1973-07-24 1982-02-04 Deutsche Itt Industries Gmbh, 7800 Freiburg Arrangement for keeping the frequency of a piezo or ferroelectric oscillating crystal constant
JPS5370689A (en) * 1976-12-06 1978-06-23 Hitachi Ltd Semiconductor laser device
US4253515A (en) * 1978-09-29 1981-03-03 United States Of America As Represented By The Secretary Of The Navy Integrated circuit temperature gradient and moisture regulator
JPS55113390A (en) * 1980-01-25 1980-09-01 Hitachi Ltd Semiconductor laser device

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2131607A (en) * 1982-11-24 1984-06-20 Hitachi Ltd Semiconductor laser device
US4604753A (en) * 1982-11-24 1986-08-05 Hitachi, Ltd. Semiconductor laser module having an improved temperature control arrangement
US4691987A (en) * 1983-07-08 1987-09-08 Itek Graphix Corp. Optical fiber cable producer and method of bonding optical fibers to light emitting diodes
GB2163008A (en) * 1984-08-08 1986-02-12 Varian Associates Miniature, temperature controlled phase detector
US5032897A (en) * 1990-02-28 1991-07-16 International Business Machines Corp. Integrated thermoelectric cooling
US5012325A (en) * 1990-04-24 1991-04-30 International Business Machines Corp. Thermoelectric cooling via electrical connections
FR2690571A1 (en) * 1992-04-23 1993-10-29 Peugeot Temp. control system for electronic circuit module, esp. laser diode - includes thermistor temp. sensors linked to control circuit for regulating two cooling elements
WO1995030246A1 (en) * 1994-04-29 1995-11-09 Ast Research, Inc. Method and apparatus for recovering power from semiconductor circuit using thermoelectric device
US5419780A (en) * 1994-04-29 1995-05-30 Ast Research, Inc. Method and apparatus for recovering power from semiconductor circuit using thermoelectric device
US5720342A (en) * 1994-09-12 1998-02-24 Pes, Inc. Integrated converter for extending the life span of electronic components
US5712448A (en) * 1996-02-07 1998-01-27 California Institute Of Technology Cooling device featuring thermoelectric and diamond materials for temperature control of heat-dissipating devices
WO1997048881A1 (en) * 1996-06-21 1997-12-24 Pes, Inc. Integrated converter for extending the life span of electronic components
GB2364439A (en) * 2000-02-04 2002-01-23 Ibm Thermal management of integrated circuits
US6614109B2 (en) 2000-02-04 2003-09-02 International Business Machines Corporation Method and apparatus for thermal management of integrated circuits
GB2364439B (en) * 2000-02-04 2004-09-15 Ibm Method and apparatus for thermal management of integrated circuits
US6893902B2 (en) 2000-02-04 2005-05-17 International Business Machines Corporation Method and apparatus for thermal management of integrated circuits
GB2375431A (en) * 2001-05-10 2002-11-13 Bookham Technology Plc Device with integrated semiconductor temperature sensor and/or localised heater
GB2375431B (en) * 2001-05-10 2003-11-05 Bookham Technology Plc Method and device for balancing temperature

Also Published As

Publication number Publication date
FR2504293A1 (en) 1982-10-22
GB2097184B (en) 1985-07-03
JPS6322623B2 (en) 1988-05-12
JPS57178349A (en) 1982-11-02
FR2504293B1 (en) 1987-01-09
DE3214614A1 (en) 1982-11-04
DE3214614C2 (en) 1991-11-14

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PCNP Patent ceased through non-payment of renewal fee