GB2070848B - Electron microscope magnetic objective lens - Google Patents

Electron microscope magnetic objective lens

Info

Publication number
GB2070848B
GB2070848B GB8102713A GB8102713A GB2070848B GB 2070848 B GB2070848 B GB 2070848B GB 8102713 A GB8102713 A GB 8102713A GB 8102713 A GB8102713 A GB 8102713A GB 2070848 B GB2070848 B GB 2070848B
Authority
GB
United Kingdom
Prior art keywords
objective lens
electron microscope
magnetic objective
microscope magnetic
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8102713A
Other languages
English (en)
Other versions
GB2070848A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INTERNATIONAL PRECISION Inc
Original Assignee
INTERNATIONAL PRECISION Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INTERNATIONAL PRECISION Inc filed Critical INTERNATIONAL PRECISION Inc
Publication of GB2070848A publication Critical patent/GB2070848A/en
Application granted granted Critical
Publication of GB2070848B publication Critical patent/GB2070848B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Beam Exposure (AREA)
GB8102713A 1980-01-30 1981-01-29 Electron microscope magnetic objective lens Expired GB2070848B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP872280A JPS56107459A (en) 1980-01-30 1980-01-30 Objective lens for electron microscope

Publications (2)

Publication Number Publication Date
GB2070848A GB2070848A (en) 1981-09-09
GB2070848B true GB2070848B (en) 1984-08-22

Family

ID=11700835

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8102713A Expired GB2070848B (en) 1980-01-30 1981-01-29 Electron microscope magnetic objective lens

Country Status (3)

Country Link
US (1) US4383176A (enrdf_load_stackoverflow)
JP (1) JPS56107459A (enrdf_load_stackoverflow)
GB (1) GB2070848B (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5708274A (en) * 1996-12-18 1998-01-13 International Business Machines Corporation Curvilinear variable axis lens correction with crossed coils
JP6177817B2 (ja) 2015-01-30 2017-08-09 松定プレシジョン株式会社 荷電粒子線装置及び走査電子顕微鏡

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1238889A (enrdf_load_stackoverflow) 1968-11-26 1971-07-14
US3585546A (en) * 1969-10-21 1971-06-15 Jeol Ltd Objective lens pole pieces

Also Published As

Publication number Publication date
JPS623542B2 (enrdf_load_stackoverflow) 1987-01-26
GB2070848A (en) 1981-09-09
JPS56107459A (en) 1981-08-26
US4383176A (en) 1983-05-10

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19950129