GB202018501D0 - Drag pumping mechanism for a turbomolecular pump - Google Patents

Drag pumping mechanism for a turbomolecular pump

Info

Publication number
GB202018501D0
GB202018501D0 GBGB2018501.3A GB202018501A GB202018501D0 GB 202018501 D0 GB202018501 D0 GB 202018501D0 GB 202018501 A GB202018501 A GB 202018501A GB 202018501 D0 GB202018501 D0 GB 202018501D0
Authority
GB
United Kingdom
Prior art keywords
pumping mechanism
turbomolecular pump
drag pumping
drag
turbomolecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB2018501.3A
Other versions
GB2601313A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB2018501.3A priority Critical patent/GB2601313A/en
Publication of GB202018501D0 publication Critical patent/GB202018501D0/en
Priority to PCT/GB2021/053016 priority patent/WO2022112745A1/en
Priority to EP21819551.9A priority patent/EP4251887A1/en
Publication of GB2601313A publication Critical patent/GB2601313A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
GB2018501.3A 2020-11-25 2020-11-25 Drag pumping mechanism for a turbomolecular pump Pending GB2601313A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB2018501.3A GB2601313A (en) 2020-11-25 2020-11-25 Drag pumping mechanism for a turbomolecular pump
PCT/GB2021/053016 WO2022112745A1 (en) 2020-11-25 2021-11-22 Drag pumping mechanism for a turbomolecular pump
EP21819551.9A EP4251887A1 (en) 2020-11-25 2021-11-22 Drag pumping mechanism for a turbomolecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2018501.3A GB2601313A (en) 2020-11-25 2020-11-25 Drag pumping mechanism for a turbomolecular pump

Publications (2)

Publication Number Publication Date
GB202018501D0 true GB202018501D0 (en) 2021-01-06
GB2601313A GB2601313A (en) 2022-06-01

Family

ID=74046901

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2018501.3A Pending GB2601313A (en) 2020-11-25 2020-11-25 Drag pumping mechanism for a turbomolecular pump

Country Status (3)

Country Link
EP (1) EP4251887A1 (en)
GB (1) GB2601313A (en)
WO (1) WO2022112745A1 (en)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8602052A (en) * 1986-08-12 1988-03-01 Ultra Centrifuge Nederland Nv HIGH VACUUM PUMP.
ES2069713T3 (en) * 1990-07-06 1995-05-16 Cit Alcatel MECHANICAL SET OF PUMPING FOR SECONDARY VACUUM AND INSTALLATION FOR LEAK DETECTION USING A SET OF THIS TYPE.
JP3486000B2 (en) * 1995-03-31 2004-01-13 日本原子力研究所 Screw groove vacuum pump
GB0229355D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
JP5878876B2 (en) * 2010-12-10 2016-03-08 エドワーズ株式会社 Vacuum pump
DE102013213815A1 (en) * 2013-07-15 2015-01-15 Pfeiffer Vacuum Gmbh vacuum pump
JP6386737B2 (en) * 2014-02-04 2018-09-05 エドワーズ株式会社 Vacuum pump
EP3657021B1 (en) * 2018-11-21 2020-11-11 Pfeiffer Vacuum Gmbh Vacuum pump
EP3670924B1 (en) * 2019-11-19 2021-11-17 Pfeiffer Vacuum Gmbh Vacuum pump and method for producing same

Also Published As

Publication number Publication date
EP4251887A1 (en) 2023-10-04
WO2022112745A1 (en) 2022-06-02
GB2601313A (en) 2022-06-01

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