GB201917143D0 - Molecular drag vacuum pump - Google Patents

Molecular drag vacuum pump

Info

Publication number
GB201917143D0
GB201917143D0 GBGB1917143.8A GB201917143A GB201917143D0 GB 201917143 D0 GB201917143 D0 GB 201917143D0 GB 201917143 A GB201917143 A GB 201917143A GB 201917143 D0 GB201917143 D0 GB 201917143D0
Authority
GB
United Kingdom
Prior art keywords
vacuum pump
molecular drag
drag vacuum
molecular
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB1917143.8A
Other versions
GB2589151A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1917143.8A priority Critical patent/GB2589151A/en
Publication of GB201917143D0 publication Critical patent/GB201917143D0/en
Priority to PCT/GB2020/052983 priority patent/WO2021105656A1/en
Publication of GB2589151A publication Critical patent/GB2589151A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/18—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GB1917143.8A 2019-11-25 2019-11-25 Molecular drag vacuum pump Pending GB2589151A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB1917143.8A GB2589151A (en) 2019-11-25 2019-11-25 Molecular drag vacuum pump
PCT/GB2020/052983 WO2021105656A1 (en) 2019-11-25 2020-11-24 Pumping stage of a vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1917143.8A GB2589151A (en) 2019-11-25 2019-11-25 Molecular drag vacuum pump

Publications (2)

Publication Number Publication Date
GB201917143D0 true GB201917143D0 (en) 2020-01-08
GB2589151A GB2589151A (en) 2021-05-26

Family

ID=69137316

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1917143.8A Pending GB2589151A (en) 2019-11-25 2019-11-25 Molecular drag vacuum pump

Country Status (2)

Country Link
GB (1) GB2589151A (en)
WO (1) WO2021105656A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022122860A1 (en) 2022-09-08 2022-11-03 Agilent Technologies, Inc. - A Delaware Corporation - Molecular pump stage for turbomolecular pump with channel discontinuity

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3919529C2 (en) * 1988-07-13 1994-09-29 Osaka Vacuum Ltd Vacuum pump
JPH07117067B2 (en) * 1988-12-30 1995-12-18 株式会社島津製作所 Molecular pump
DE4314418A1 (en) * 1993-05-03 1994-11-10 Leybold Ag Friction vacuum pump with differently designed pump sections
JP3092063B2 (en) * 1998-06-17 2000-09-25 セイコー精機株式会社 Turbo molecular pump
US6450772B1 (en) * 1999-10-18 2002-09-17 Sarcos, Lc Compact molecular drag vacuum pump
RU2490519C1 (en) * 2012-05-05 2013-08-20 Общество с ограниченной ответственностью "Научно-производственная фирма "Прогресс" (ООО "НПФ "Прогресс") Turbomolecular pump with single-flow turbomolecular flow part
JP6616560B2 (en) * 2013-11-28 2019-12-04 エドワーズ株式会社 Vacuum pump parts and composite vacuum pump
EP3051141B1 (en) * 2015-01-30 2020-01-01 Pfeiffer Vacuum Gmbh Rotor bearing

Also Published As

Publication number Publication date
WO2021105656A1 (en) 2021-06-03
GB2589151A (en) 2021-05-26

Similar Documents

Publication Publication Date Title
EP3779202A4 (en) Vacuum pump
EP3777911A4 (en) Breast pump
EP3751141A4 (en) Pump
EP3379086A4 (en) Vacuum pump
EP3580460A4 (en) Epitrochoidal vacuum pump
EP4056855A4 (en) Vacuum pump
EP3431423A4 (en) Vacuum gripper unit comprising vacuum pump
GB2561899B (en) Vacuum pumping system
EP3804778A4 (en) Breast pump
CA188020S (en) Vacuum pump
GB2578899B (en) Vacuum pump
EP3749387A4 (en) Flex-stroke infusion pump
EP4043734A4 (en) Vacuum pump
GB201917143D0 (en) Molecular drag vacuum pump
GB201818600D0 (en) Molecular drag stage
EP3760869A4 (en) Rocket-engine turbo pump
CA188489S (en) Vacuum pump
EP3910200A4 (en) Vacuum pump
EP3910201A4 (en) Vacuum pump
EP3290899A4 (en) Suction pump
EP4056209A4 (en) Infusion pump
GB201801435D0 (en) Scroll vacuum pump
GB201910772D0 (en) Molecular vacuum pump
GB201910771D0 (en) Molecular vacuum pump
EP3662163A4 (en) Vacuum operated pumps