GB201505221D0 - Tuneable resonator - Google Patents

Tuneable resonator

Info

Publication number
GB201505221D0
GB201505221D0 GBGB1505221.0A GB201505221A GB201505221D0 GB 201505221 D0 GB201505221 D0 GB 201505221D0 GB 201505221 A GB201505221 A GB 201505221A GB 201505221 D0 GB201505221 D0 GB 201505221D0
Authority
GB
United Kingdom
Prior art keywords
tuneable resonator
tuneable
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB1505221.0A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oxford University Innovation Ltd
Original Assignee
Oxford University Innovation Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oxford University Innovation Ltd filed Critical Oxford University Innovation Ltd
Priority to GBGB1505221.0A priority Critical patent/GB201505221D0/en
Publication of GB201505221D0 publication Critical patent/GB201505221D0/en
Priority to PCT/GB2016/050802 priority patent/WO2016151317A1/en
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B81B3/0045—Improve properties related to angular swinging, e.g. control resonance frequency
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0271—Resonators; ultrasonic resonators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
GBGB1505221.0A 2015-03-26 2015-03-26 Tuneable resonator Ceased GB201505221D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GBGB1505221.0A GB201505221D0 (en) 2015-03-26 2015-03-26 Tuneable resonator
PCT/GB2016/050802 WO2016151317A1 (en) 2015-03-26 2016-03-22 Tuneable resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB1505221.0A GB201505221D0 (en) 2015-03-26 2015-03-26 Tuneable resonator

Publications (1)

Publication Number Publication Date
GB201505221D0 true GB201505221D0 (en) 2015-05-13

Family

ID=53178174

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB1505221.0A Ceased GB201505221D0 (en) 2015-03-26 2015-03-26 Tuneable resonator

Country Status (2)

Country Link
GB (1) GB201505221D0 (en)
WO (1) WO2016151317A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9584092B2 (en) * 2015-04-14 2017-02-28 International Business Machines Corporation Mechanical resonator with a spring-mass system comprising a phase-change material
CN109799014A (en) * 2019-03-01 2019-05-24 西安交通大学 A kind of flexible pressure-sensitive sensor and preparation method thereof
US11187889B2 (en) 2019-04-29 2021-11-30 International Business Machines Corporation Phase-change spatial light modulator
CN116955898B (en) * 2023-05-05 2024-05-17 重庆邮电大学空间通信研究院 Constant coefficient adjustable all-optical differential equation solver based on micro-disk resonator

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101634305B1 (en) * 2010-05-11 2016-06-29 삼성전자주식회사 Resonator using carbon based nano material and fabrication method thereof
US20130062104A1 (en) * 2011-09-08 2013-03-14 Cornell University - Cornell Center For Technology Enterprise & Commercialization (Cctec) Resonant material layer apparatus, method and applications

Also Published As

Publication number Publication date
WO2016151317A1 (en) 2016-09-29

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)