GB1585017A - Glow discharge heating apparatus - Google Patents
Glow discharge heating apparatus Download PDFInfo
- Publication number
- GB1585017A GB1585017A GB12106/78A GB1210678A GB1585017A GB 1585017 A GB1585017 A GB 1585017A GB 12106/78 A GB12106/78 A GB 12106/78A GB 1210678 A GB1210678 A GB 1210678A GB 1585017 A GB1585017 A GB 1585017A
- Authority
- GB
- United Kingdom
- Prior art keywords
- discharge
- glow discharge
- electrodes
- electrode
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 165
- 239000007788 liquid Substances 0.000 claims abstract description 104
- 239000007789 gas Substances 0.000 claims description 40
- 239000001257 hydrogen Substances 0.000 claims description 36
- 229910052739 hydrogen Inorganic materials 0.000 claims description 36
- 230000015556 catabolic process Effects 0.000 claims description 31
- 238000004804 winding Methods 0.000 claims description 31
- 239000001307 helium Substances 0.000 claims description 30
- 229910052734 helium Inorganic materials 0.000 claims description 30
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 29
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 29
- 239000000203 mixture Substances 0.000 claims description 19
- 230000007797 corrosion Effects 0.000 claims description 18
- 238000005260 corrosion Methods 0.000 claims description 18
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- 230000002829 reductive effect Effects 0.000 claims description 11
- 230000002457 bidirectional effect Effects 0.000 claims description 10
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- 239000008246 gaseous mixture Substances 0.000 claims description 9
- 239000010949 copper Substances 0.000 claims description 8
- 230000000694 effects Effects 0.000 claims description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 230000000630 rising effect Effects 0.000 claims description 7
- 230000027311 M phase Effects 0.000 claims description 6
- 239000011810 insulating material Substances 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 5
- 230000001939 inductive effect Effects 0.000 claims 4
- 238000001514 detection method Methods 0.000 claims 1
- 230000006698 induction Effects 0.000 claims 1
- 230000004048 modification Effects 0.000 description 40
- 238000012986 modification Methods 0.000 description 40
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 34
- 238000010891 electric arc Methods 0.000 description 33
- 230000008859 change Effects 0.000 description 27
- 150000002500 ions Chemical class 0.000 description 21
- 238000010586 diagram Methods 0.000 description 12
- 239000012530 fluid Substances 0.000 description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 11
- 230000013011 mating Effects 0.000 description 11
- 239000003990 capacitor Substances 0.000 description 10
- 239000012777 electrically insulating material Substances 0.000 description 10
- 230000002459 sustained effect Effects 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 230000002159 abnormal effect Effects 0.000 description 8
- 230000009471 action Effects 0.000 description 8
- 230000007423 decrease Effects 0.000 description 8
- 230000003247 decreasing effect Effects 0.000 description 7
- 230000014509 gene expression Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 229910001220 stainless steel Inorganic materials 0.000 description 7
- 239000010935 stainless steel Substances 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 229910052754 neon Inorganic materials 0.000 description 6
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 6
- 229910052720 vanadium Inorganic materials 0.000 description 6
- 239000010406 cathode material Substances 0.000 description 5
- 239000007772 electrode material Substances 0.000 description 5
- 230000004907 flux Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 239000003381 stabilizer Substances 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 230000033228 biological regulation Effects 0.000 description 4
- 238000010276 construction Methods 0.000 description 4
- 230000001419 dependent effect Effects 0.000 description 4
- 150000002431 hydrogen Chemical class 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 229910052770 Uranium Inorganic materials 0.000 description 3
- 238000005162 X-ray Laue diffraction Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- 230000001934 delay Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 230000018109 developmental process Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 230000000087 stabilizing effect Effects 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- -1 helium ions Chemical class 0.000 description 2
- 230000000977 initiatory effect Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910000833 kovar Inorganic materials 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 230000036961 partial effect Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000012260 resinous material Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 206010012335 Dependence Diseases 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000013213 extrapolation Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- 239000008236 heating water Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000000819 phase cycle Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/101—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium using electric energy supply
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B7/00—Heating by electric discharge
- H05B7/005—Electrical diagrams
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B7/00—Heating by electric discharge
- H05B7/16—Heating by glow discharge
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Thermal Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Discharge Heating (AREA)
- Plasma Technology (AREA)
- Lasers (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3489277A JPS53119445A (en) | 1977-03-28 | 1977-03-28 | Ac glow discharge heater |
| JP9127177A JPS5425547A (en) | 1977-07-29 | 1977-07-29 | Electric shock-proof device for glow discharge heating device |
| JP12668277U JPS5640160Y2 (de) | 1977-09-20 | 1977-09-20 | |
| JP448878A JPS5497842A (en) | 1978-01-18 | 1978-01-18 | Glow dischatge heater |
| JP1309078A JPS54105342A (en) | 1978-02-07 | 1978-02-07 | Glow-discharge heating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1585017A true GB1585017A (en) | 1981-02-18 |
Family
ID=27518496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB12106/78A Expired GB1585017A (en) | 1977-03-28 | 1978-03-28 | Glow discharge heating apparatus |
Country Status (5)
| Country | Link |
|---|---|
| CA (1) | CA1117609A (de) |
| DE (1) | DE2813385C2 (de) |
| FR (1) | FR2386227A1 (de) |
| GB (1) | GB1585017A (de) |
| SE (2) | SE441562B (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1441577A1 (de) * | 2002-02-20 | 2004-07-28 | Matsushita Electric Works, Ltd. | Plasmaverarbeitungseinrichtung und plasmaverarbeitungsverfahren |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2932139A1 (de) * | 1979-08-08 | 1981-02-26 | Norbert Stauder | Heizvorrichtung mit einem ein aufzuheizendes medium aufnehmenden heizkoerper |
| EP0066635A1 (de) * | 1981-06-05 | 1982-12-15 | THERMAG Anlagenbau AG | Elektrische Heizeinrichtung und Verfahren zum Betrieb derselben |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE734793C (de) * | 1937-08-27 | 1943-04-24 | Bernhard Berghaus | Elektrisch mittels Glimmentladung beheizter Fluessigkeitserhitzer |
| BE555721A (de) * | 1956-03-12 | |||
| DE1135112B (de) * | 1956-04-10 | 1962-08-23 | Hoerder Huettenunion Ag | Glimmentladungsgefaess mit Wechselstrom-speisung fuer stromstarke Entladungen zur Behandlung von in das Gefaess eingebrachten Koerpern |
| DE1036601B (de) * | 1956-06-05 | 1958-08-14 | Hoerder Huettenunion Ag | Einrichtung zur selbsttaetigen Regelung der Glimmentladung in Entladungsgefaessen fuer technische Prozesse, beispielsweise zur Oberflaechenbehandlung von Werkstuecken |
| CH404010A (de) * | 1961-03-30 | 1965-12-15 | Berghaus Elektrophysik Anst | Verfahren und Vorrichtung zur Durchführung technischer Prozesse unter Einwirkung einer elektrischen Glimmentladung |
| JPS51106252A (ja) * | 1975-03-14 | 1976-09-21 | Mitsubishi Electric Corp | Guroohodenkanetsusochi |
| JPS51142138A (en) * | 1975-06-02 | 1976-12-07 | Mitsubishi Electric Corp | Driver for glow discharge |
| JPS5226039A (en) * | 1975-08-22 | 1977-02-26 | Mitsubishi Electric Corp | Glow dicharge heater |
| JPS5297443A (en) * | 1976-02-12 | 1977-08-16 | Mitsubishi Electric Corp | Glow discharge heating apparatus |
-
1978
- 1978-03-22 SE SE7803339A patent/SE441562B/sv not_active IP Right Cessation
- 1978-03-28 FR FR7808975A patent/FR2386227A1/fr active Granted
- 1978-03-28 CA CA000299801A patent/CA1117609A/en not_active Expired
- 1978-03-28 DE DE2813385A patent/DE2813385C2/de not_active Expired
- 1978-03-28 GB GB12106/78A patent/GB1585017A/en not_active Expired
-
1981
- 1981-11-20 SE SE8106920A patent/SE445163B/sv not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1441577A1 (de) * | 2002-02-20 | 2004-07-28 | Matsushita Electric Works, Ltd. | Plasmaverarbeitungseinrichtung und plasmaverarbeitungsverfahren |
| EP1441577A4 (de) * | 2002-02-20 | 2008-08-20 | Matsushita Electric Works Ltd | Plasmaverarbeitungseinrichtung und plasmaverarbeitungsverfahren |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2386227A1 (fr) | 1978-10-27 |
| DE2813385A1 (de) | 1978-11-02 |
| SE8106920L (sv) | 1981-11-20 |
| SE445163B (sv) | 1986-06-02 |
| FR2386227B1 (de) | 1984-01-13 |
| DE2813385C2 (de) | 1982-12-16 |
| SE441562B (sv) | 1985-10-14 |
| SE7803339L (sv) | 1978-09-29 |
| CA1117609A (en) | 1982-02-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |