GB1582521A - Electron spectrometer diaphragms - Google Patents

Electron spectrometer diaphragms Download PDF

Info

Publication number
GB1582521A
GB1582521A GB1343178A GB1343178A GB1582521A GB 1582521 A GB1582521 A GB 1582521A GB 1343178 A GB1343178 A GB 1343178A GB 1343178 A GB1343178 A GB 1343178A GB 1582521 A GB1582521 A GB 1582521A
Authority
GB
United Kingdom
Prior art keywords
diaphragms
diaphragm
spectrometer
support
reflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1343178A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of GB1582521A publication Critical patent/GB1582521A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)
GB1343178A 1977-04-07 1978-04-06 Electron spectrometer diaphragms Expired GB1582521A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19772715809 DE2715809C3 (de) 1977-04-07 1977-04-07 Blendenanordnung für einen elektrostatischen zylindrischen Spiegel und Verwendung hiervon

Publications (1)

Publication Number Publication Date
GB1582521A true GB1582521A (en) 1981-01-07

Family

ID=6005960

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1343178A Expired GB1582521A (en) 1977-04-07 1978-04-06 Electron spectrometer diaphragms

Country Status (4)

Country Link
JP (1) JPS53125757A (de)
DE (1) DE2715809C3 (de)
GB (1) GB1582521A (de)
NL (1) NL7803687A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3138927A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Abbildendes spektrometer fuer die elektronenstrahl-messtechnik und elektronenstrahl-messgeraet

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3138927A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Abbildendes spektrometer fuer die elektronenstrahl-messtechnik und elektronenstrahl-messgeraet

Also Published As

Publication number Publication date
NL7803687A (nl) 1978-10-10
DE2715809A1 (de) 1978-10-12
DE2715809C3 (de) 1980-11-27
JPS53125757A (en) 1978-11-02
DE2715809B2 (de) 1980-03-27

Similar Documents

Publication Publication Date Title
USRE33275E (en) Electron Spectrometer
US2097760A (en) Testing method and apparatus
US3517191A (en) Scanning ion microscope with magnetic sector lens to purify the primary ion beam
US3641339A (en) Gas chromatography- mass spectrometry
CA2143669C (en) Reducing interferences in plasma source mass spectrometers
US4680467A (en) Electron spectroscopy system for chemical analysis of electrically isolated specimens
GB2176649A (en) Mass spectrometer
EP0490626B1 (de) Massenspektrometer mit elektrostatischem Energiefilter
US4563769A (en) X-Ray generator device
EP3788346B1 (de) Funkenemissionsspektrometer mit abtrennbarer funkenkammer
DE1489658A1 (de) Vorrichtung zur Beschiessung eines Gegenstandes mit einem Elektronenstrahlenbuendel und Verfahren fuer diese Beschiessung zum Zwecke der Emission von Roentgenstrahlen durch diesen Gegenstand
US4205226A (en) Auger electron spectroscopy
US3280326A (en) Mass filter with sheet electrodes on each side of the analyzer rod that intersect on the ion beam axis
US5091645A (en) Selectable-resolution charged-particle beam analyzers
US4017757A (en) Multi-target X-ray tube
Mahjoub et al. New method for the determination of the correction function of a hemisperical electron analyser based on elastic electron images
GB1582521A (en) Electron spectrometer diaphragms
US4296323A (en) Secondary emission mass spectrometer mechanism to be used with other instrumentation
EP0431233B1 (de) Partialdruckmesszelle mit Kaltkathodenionenquelle für die Lecksuche in Vakuumsystemen
WO2008147247A2 (ru) Электронный магнитный спектрометр
US3239662A (en) Mass spectrometer having a concentric cylindrical electrode structure
JP2002195963A (ja) Ｘ線分光装置およびｘ線分析装置
US2468261A (en) Gas analyzer
Bernardi et al. Measurement of doubly differential electron distributions induced by atomic collisions: Apparatus and related instrumental effects
US3745343A (en) Ion lens system for mass spectrometers and method of operation

Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee