JPS53125757A - Device for shooting electrostatic cylindrical mirror - Google Patents

Device for shooting electrostatic cylindrical mirror

Info

Publication number
JPS53125757A
JPS53125757A JP4016578A JP4016578A JPS53125757A JP S53125757 A JPS53125757 A JP S53125757A JP 4016578 A JP4016578 A JP 4016578A JP 4016578 A JP4016578 A JP 4016578A JP S53125757 A JPS53125757 A JP S53125757A
Authority
JP
Japan
Prior art keywords
shooting
cylindrical mirror
electrostatic cylindrical
electrostatic
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4016578A
Other languages
English (en)
Inventor
Kurausu Warutaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JPS53125757A publication Critical patent/JPS53125757A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP4016578A 1977-04-07 1978-04-05 Device for shooting electrostatic cylindrical mirror Pending JPS53125757A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19772715809 DE2715809C3 (de) 1977-04-07 1977-04-07 Blendenanordnung für einen elektrostatischen zylindrischen Spiegel und Verwendung hiervon

Publications (1)

Publication Number Publication Date
JPS53125757A true JPS53125757A (en) 1978-11-02

Family

ID=6005960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4016578A Pending JPS53125757A (en) 1977-04-07 1978-04-05 Device for shooting electrostatic cylindrical mirror

Country Status (4)

Country Link
JP (1) JPS53125757A (ja)
DE (1) DE2715809C3 (ja)
GB (1) GB1582521A (ja)
NL (1) NL7803687A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3138927A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Abbildendes spektrometer fuer die elektronenstrahl-messtechnik und elektronenstrahl-messgeraet

Also Published As

Publication number Publication date
GB1582521A (en) 1981-01-07
DE2715809B2 (de) 1980-03-27
NL7803687A (nl) 1978-10-10
DE2715809C3 (de) 1980-11-27
DE2715809A1 (de) 1978-10-12

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