GB1580229A - Method and means for determining the immersed surface area of an electrode of an electrochemical bath - Google Patents
Method and means for determining the immersed surface area of an electrode of an electrochemical bath Download PDFInfo
- Publication number
- GB1580229A GB1580229A GB53357/77A GB5335777A GB1580229A GB 1580229 A GB1580229 A GB 1580229A GB 53357/77 A GB53357/77 A GB 53357/77A GB 5335777 A GB5335777 A GB 5335777A GB 1580229 A GB1580229 A GB 1580229A
- Authority
- GB
- United Kingdom
- Prior art keywords
- pulse
- potential
- surface area
- current
- electrolyte
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title claims description 15
- 239000003792 electrolyte Substances 0.000 claims description 31
- 230000008859 change Effects 0.000 claims description 16
- 239000000126 substance Substances 0.000 claims description 15
- 238000005259 measurement Methods 0.000 claims description 14
- 239000000523 sample Substances 0.000 claims description 13
- 238000009434 installation Methods 0.000 claims description 7
- 230000001360 synchronised effect Effects 0.000 claims description 2
- 241001137862 IDIR agent Species 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 238000007654 immersion Methods 0.000 claims 1
- 230000000977 initiatory effect Effects 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 238000011084 recovery Methods 0.000 description 6
- 238000009713 electroplating Methods 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000036278 prepulse Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000003869 coulometry Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/32—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring areas
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electroplating Methods And Accessories (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Fuel Cell (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1629776A CH617508A5 (en:Method) | 1976-12-24 | 1976-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1580229A true GB1580229A (en) | 1980-11-26 |
Family
ID=4416093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB53357/77A Expired GB1580229A (en) | 1976-12-24 | 1977-12-21 | Method and means for determining the immersed surface area of an electrode of an electrochemical bath |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4129480A (en:Method) |
| JP (1) | JPS5387940A (en:Method) |
| CH (1) | CH617508A5 (en:Method) |
| DE (1) | DE2757687C2 (en:Method) |
| FR (1) | FR2375576A1 (en:Method) |
| GB (1) | GB1580229A (en:Method) |
| PL (1) | PL108301B1 (en:Method) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8201558A (nl) * | 1982-04-14 | 1983-11-01 | Philips Nv | Inrichting voor het continu meten van de capaciteit van folie voor elektrolytkondensatoren. |
| CH660080A5 (de) * | 1983-03-11 | 1987-03-13 | Jean Claude Puippe Dr | Verfahren zum genauen bestimmen der oberflaeche eines elektrisch leitenden gegenstandes. |
| JPS59170708A (ja) * | 1983-03-18 | 1984-09-27 | Toshiba Corp | 表面積測定法 |
| US4545876A (en) * | 1984-05-02 | 1985-10-08 | United Technologies Corporation | Method and apparatus for surface treating |
| US4980631A (en) * | 1989-01-23 | 1990-12-25 | Aisaburo Yagashita | Method for measuring the surface area of bodies |
| US6913680B1 (en) | 2000-05-02 | 2005-07-05 | Applied Materials, Inc. | Method of application of electrical biasing to enhance metal deposition |
| JP2004513221A (ja) | 2000-05-23 | 2004-04-30 | アプライド マテリアルズ インコーポレイテッド | 銅シード層の異常を克服し表面形状サイズ及びアスペクト比を調整する方法と装置 |
| CN100469948C (zh) * | 2000-10-03 | 2009-03-18 | 应用材料有限公司 | 一旦进入金属沉积用来倾斜基片的方法和相关设备 |
| US20040020780A1 (en) * | 2001-01-18 | 2004-02-05 | Hey H. Peter W. | Immersion bias for use in electro-chemical plating system |
| US6911136B2 (en) * | 2002-04-29 | 2005-06-28 | Applied Materials, Inc. | Method for regulating the electrical power applied to a substrate during an immersion process |
| DE10322321B4 (de) * | 2003-03-21 | 2007-03-08 | Degudent Gmbh | Anordnung und Verfahren zur Herstellung von Formteilen |
| US20040206628A1 (en) * | 2003-04-18 | 2004-10-21 | Applied Materials, Inc. | Electrical bias during wafer exit from electrolyte bath |
| CN101942691B (zh) * | 2010-09-29 | 2012-01-11 | 成都飞机工业（集团）有限责任公司 | 一种控制电解电流密度的方法及装置 |
| CN110699725A (zh) * | 2019-11-21 | 2020-01-17 | 上海江南轧辊有限公司 | 一种液中放电沉积系统及其使用方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3347770A (en) * | 1964-09-03 | 1967-10-17 | Gen Dynamics Corp | Area measurement and current density control device |
| DE1939477A1 (de) * | 1969-08-02 | 1970-11-19 | Zachariae Oelsch Meier | Vorrichtung zur Anzeige der Oberflaeche von in elektrolytischen Baedern zu bearbeitendem Gut |
| DE1964354A1 (de) * | 1969-12-23 | 1971-07-01 | Zachariae Oelsch Meier | Verfahren zur Bestimmung der Groesse der Oberflaeche von Werkstuecken |
| US3731189A (en) * | 1970-05-15 | 1973-05-01 | Anderson Power Products | Pulse sampling resistance metering method and means |
| DE2303717A1 (de) * | 1973-01-26 | 1974-08-01 | Schiess Ag | Verfahren und vorrichtung zum messen der groesse der oberflaeche oder eines oberflaechenteiles eines unregelmaessig geformten koerpers und verfahren und vorrichtung zur bestimmung und einstellung der optimalen impuls-stromstaerke, insbesondere beim funkenerosiven senken |
| CH599554A5 (en:Method) * | 1976-03-09 | 1978-05-31 | Eric Robert |
-
1976
- 1976-12-24 CH CH1629776A patent/CH617508A5/fr not_active IP Right Cessation
-
1977
- 1977-12-15 FR FR7737852A patent/FR2375576A1/fr active Granted
- 1977-12-20 US US05/862,399 patent/US4129480A/en not_active Expired - Lifetime
- 1977-12-21 GB GB53357/77A patent/GB1580229A/en not_active Expired
- 1977-12-21 DE DE2757687A patent/DE2757687C2/de not_active Expired
- 1977-12-23 PL PL1977203305A patent/PL108301B1/pl unknown
- 1977-12-24 JP JP15633577A patent/JPS5387940A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| CH617508A5 (en:Method) | 1980-05-30 |
| JPS5387940A (en) | 1978-08-02 |
| JPS6252241B2 (en:Method) | 1987-11-04 |
| US4129480A (en) | 1978-12-12 |
| PL203305A1 (pl) | 1978-07-17 |
| PL108301B1 (en) | 1980-04-30 |
| DE2757687A1 (de) | 1978-06-29 |
| DE2757687C2 (de) | 1986-05-22 |
| FR2375576A1 (fr) | 1978-07-21 |
| FR2375576B1 (en:Method) | 1984-09-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19921221 |