GB1550767A - Method of depositing a hafnium layer - Google Patents

Method of depositing a hafnium layer

Info

Publication number
GB1550767A
GB1550767A GB31367/77A GB3136777A GB1550767A GB 1550767 A GB1550767 A GB 1550767A GB 31367/77 A GB31367/77 A GB 31367/77A GB 3136777 A GB3136777 A GB 3136777A GB 1550767 A GB1550767 A GB 1550767A
Authority
GB
United Kingdom
Prior art keywords
depositing
hafnium layer
hafnium
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB31367/77A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Publication of GB1550767A publication Critical patent/GB1550767A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB31367/77A 1976-09-20 1977-07-26 Method of depositing a hafnium layer Expired GB1550767A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/724,550 US4056457A (en) 1976-09-20 1976-09-20 Method of depositing low stress hafnium thin films

Publications (1)

Publication Number Publication Date
GB1550767A true GB1550767A (en) 1979-08-22

Family

ID=24910873

Family Applications (1)

Application Number Title Priority Date Filing Date
GB31367/77A Expired GB1550767A (en) 1976-09-20 1977-07-26 Method of depositing a hafnium layer

Country Status (4)

Country Link
US (1) US4056457A (enExample)
JP (1) JPS5339226A (enExample)
DE (1) DE2736006A1 (enExample)
GB (1) GB1550767A (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4370739A (en) * 1980-06-09 1983-01-25 Rca Corporation Spinel video disc playback stylus
US4608243A (en) * 1983-04-04 1986-08-26 Borg-Warner Corporation High hardness hafnium nitride
US5244849A (en) * 1987-05-06 1993-09-14 Coors Porcelain Company Method for producing transparent polycrystalline body with high ultraviolet transmittance
US4930731A (en) * 1987-05-06 1990-06-05 Coors Porcelain Company Dome and window for missiles and launch tubes with high ultraviolet transmittance
US4983555A (en) * 1987-05-06 1991-01-08 Coors Porcelain Company Application of transparent polycrystalline body with high ultraviolet transmittance
US5082739A (en) * 1988-04-22 1992-01-21 Coors Porcelain Company Metallized spinel with high transmittance and process for producing
US5308688A (en) * 1992-12-28 1994-05-03 Hughes Missile Systems Company Oxidation resistant diamond composite and method of forming the same
JPH0667249U (ja) * 1993-03-04 1994-09-22 東洋運搬機株式会社 可撓性長尺物の運搬車
US5419787A (en) * 1994-06-24 1995-05-30 The United States Of America As Represented By The Secretary Of The Air Force Stress reduced insulator
US7238251B1 (en) * 2003-11-07 2007-07-03 Insituform (Netherlands) B.V. Method of preparing cured in place liner using resin impregnation tower

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3647662A (en) * 1968-02-26 1972-03-07 Bell Telephone Labor Inc Technique for the fabrication of hafnium nitride resistor

Also Published As

Publication number Publication date
JPS5339226A (en) 1978-04-11
DE2736006A1 (de) 1978-03-23
US4056457A (en) 1977-11-01
JPS5545634B2 (enExample) 1980-11-19

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee