GB1538660A - Field emission electron source - Google Patents

Field emission electron source

Info

Publication number
GB1538660A
GB1538660A GB22486/77A GB2248677A GB1538660A GB 1538660 A GB1538660 A GB 1538660A GB 22486/77 A GB22486/77 A GB 22486/77A GB 2248677 A GB2248677 A GB 2248677A GB 1538660 A GB1538660 A GB 1538660A
Authority
GB
United Kingdom
Prior art keywords
field emission
electron source
emission electron
source
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB22486/77A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of GB1538660A publication Critical patent/GB1538660A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30457—Diamond
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
GB22486/77A 1976-05-31 1977-05-27 Field emission electron source Expired GB1538660A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7605820A NL7605820A (nl) 1976-05-31 1976-05-31 Elektronenstraalbuis met veldemissieelektronen- bron, veldemissieelektronenbron voor een der- gelijke elektronenstraalbuis en werkwijze voor de vervaardiging van een dergelijke veldemis- sieelektronenbron.

Publications (1)

Publication Number Publication Date
GB1538660A true GB1538660A (en) 1979-01-24

Family

ID=19826288

Family Applications (1)

Application Number Title Priority Date Filing Date
GB22486/77A Expired GB1538660A (en) 1976-05-31 1977-05-27 Field emission electron source

Country Status (9)

Country Link
JP (1) JPS52146545A (de)
AU (1) AU2558877A (de)
DE (1) DE2722497A1 (de)
ES (2) ES459255A1 (de)
FR (1) FR2353948A1 (de)
GB (1) GB1538660A (de)
IT (1) IT1078861B (de)
NL (1) NL7605820A (de)
SE (1) SE7706095L (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5578901A (en) * 1994-02-14 1996-11-26 E. I. Du Pont De Nemours And Company Diamond fiber field emitters
JPH08212952A (ja) * 1995-02-06 1996-08-20 Natl Res Inst For Metals レーザー照射型電子銃
DE69604930T2 (de) * 1995-11-15 2000-05-18 Du Pont Feldmitters aus geglühtem kohlenstoffruss und daraus hergestellte feldemissionskathoden
WO2022196499A1 (ja) * 2021-03-19 2022-09-22 デンカ株式会社 エミッター及びこれを備える装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3631291A (en) * 1969-04-30 1971-12-28 Gen Electric Field emission cathode with metallic boride coating
GB1394055A (en) * 1971-07-09 1975-05-14 Nat Res Dev Electron emitters
NL7501932A (nl) * 1975-02-19 1976-08-23 Philips Nv Veldemissiebron.
JPS524162A (en) * 1975-06-27 1977-01-13 Hitachi Ltd Electric field radiation cathode and its manufacturing method
US4143292A (en) * 1975-06-27 1979-03-06 Hitachi, Ltd. Field emission cathode of glassy carbon and method of preparation

Also Published As

Publication number Publication date
AU2558877A (en) 1978-11-30
FR2353948A1 (fr) 1977-12-30
FR2353948B1 (de) 1981-05-29
DE2722497A1 (de) 1977-12-22
NL7605820A (nl) 1977-12-02
IT1078861B (it) 1985-05-08
SE7706095L (sv) 1977-12-01
ES462612A1 (es) 1978-06-16
JPS52146545A (en) 1977-12-06
ES459255A1 (es) 1978-03-16

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee