FR2353948A1 - Tube a rayons cathodiques comportant une source d'electrons par emission de champs, et procede de fabrication - Google Patents

Tube a rayons cathodiques comportant une source d'electrons par emission de champs, et procede de fabrication

Info

Publication number
FR2353948A1
FR2353948A1 FR7716484A FR7716484A FR2353948A1 FR 2353948 A1 FR2353948 A1 FR 2353948A1 FR 7716484 A FR7716484 A FR 7716484A FR 7716484 A FR7716484 A FR 7716484A FR 2353948 A1 FR2353948 A1 FR 2353948A1
Authority
FR
France
Prior art keywords
electrons
emission
fields
manufacturing
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7716484A
Other languages
English (en)
Other versions
FR2353948B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2353948A1 publication Critical patent/FR2353948A1/fr
Application granted granted Critical
Publication of FR2353948B1 publication Critical patent/FR2353948B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30457—Diamond
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
FR7716484A 1976-05-31 1977-05-31 Tube a rayons cathodiques comportant une source d'electrons par emission de champs, et procede de fabrication Granted FR2353948A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7605820A NL7605820A (nl) 1976-05-31 1976-05-31 Elektronenstraalbuis met veldemissieelektronen- bron, veldemissieelektronenbron voor een der- gelijke elektronenstraalbuis en werkwijze voor de vervaardiging van een dergelijke veldemis- sieelektronenbron.

Publications (2)

Publication Number Publication Date
FR2353948A1 true FR2353948A1 (fr) 1977-12-30
FR2353948B1 FR2353948B1 (fr) 1981-05-29

Family

ID=19826288

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7716484A Granted FR2353948A1 (fr) 1976-05-31 1977-05-31 Tube a rayons cathodiques comportant une source d'electrons par emission de champs, et procede de fabrication

Country Status (9)

Country Link
JP (1) JPS52146545A (fr)
AU (1) AU2558877A (fr)
DE (1) DE2722497A1 (fr)
ES (2) ES459255A1 (fr)
FR (1) FR2353948A1 (fr)
GB (1) GB1538660A (fr)
IT (1) IT1078861B (fr)
NL (1) NL7605820A (fr)
SE (1) SE7706095L (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995022169A1 (fr) * 1994-02-14 1995-08-17 E.I. Du Pont De Nemours And Company Emetteurs de champ en fibres de diamant
NL1002246C2 (nl) * 1995-02-06 1998-07-13 Nat Res Inst Metals Door een laser bestraald electronenkanon.

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU1051497A (en) * 1995-11-15 1997-06-05 E.I. Du Pont De Nemours And Company Annealed carbon soot field emitters and field emitter cathodes made therefrom
JP7523668B2 (ja) * 2021-03-19 2024-07-26 デンカ株式会社 エミッター及びこれを備える装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3631291A (en) * 1969-04-30 1971-12-28 Gen Electric Field emission cathode with metallic boride coating
US3866077A (en) * 1971-07-09 1975-02-11 Nat Res Dev Electron emitters
FR2301918A1 (fr) * 1975-02-19 1976-09-17 Philips Nv Tube cathodique muni d'une source emettant des electrons sous l'action d'un champ electrique
FR2319967A1 (fr) * 1975-06-27 1977-02-25 Hitachi Ltd Cathode a emission de champ et son procede de realisation

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS524162A (en) * 1975-06-27 1977-01-13 Hitachi Ltd Electric field radiation cathode and its manufacturing method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3631291A (en) * 1969-04-30 1971-12-28 Gen Electric Field emission cathode with metallic boride coating
US3866077A (en) * 1971-07-09 1975-02-11 Nat Res Dev Electron emitters
FR2301918A1 (fr) * 1975-02-19 1976-09-17 Philips Nv Tube cathodique muni d'une source emettant des electrons sous l'action d'un champ electrique
FR2319967A1 (fr) * 1975-06-27 1977-02-25 Hitachi Ltd Cathode a emission de champ et son procede de realisation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995022169A1 (fr) * 1994-02-14 1995-08-17 E.I. Du Pont De Nemours And Company Emetteurs de champ en fibres de diamant
NL1002246C2 (nl) * 1995-02-06 1998-07-13 Nat Res Inst Metals Door een laser bestraald electronenkanon.

Also Published As

Publication number Publication date
NL7605820A (nl) 1977-12-02
JPS52146545A (en) 1977-12-06
FR2353948B1 (fr) 1981-05-29
ES459255A1 (es) 1978-03-16
ES462612A1 (es) 1978-06-16
IT1078861B (it) 1985-05-08
SE7706095L (sv) 1977-12-01
GB1538660A (en) 1979-01-24
DE2722497A1 (de) 1977-12-22
AU2558877A (en) 1978-11-30

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Legal Events

Date Code Title Description
ST Notification of lapse