ES459255A1 - Perfeccionamientos introducidos en un tubo de haz de elec- trones. - Google Patents

Perfeccionamientos introducidos en un tubo de haz de elec- trones.

Info

Publication number
ES459255A1
ES459255A1 ES459255A ES459255A ES459255A1 ES 459255 A1 ES459255 A1 ES 459255A1 ES 459255 A ES459255 A ES 459255A ES 459255 A ES459255 A ES 459255A ES 459255 A1 ES459255 A1 ES 459255A1
Authority
ES
Spain
Prior art keywords
field emission
electron source
emission electron
carbon
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES459255A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of ES459255A1 publication Critical patent/ES459255A1/es
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30457—Diamond
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)

Abstract

Perfeccionamientos introducidos en un tubo de haz de electrones que tiene una fuente de electrones de emisión de campo que comprende un emisor de campo filamentario que consiste en carbono, caracterizados porque el emisor de carbono filamentario consiste en carbono cristalino, *** Ver imagen
ES459255A 1976-05-31 1977-05-28 Perfeccionamientos introducidos en un tubo de haz de elec- trones. Expired ES459255A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7605820A NL7605820A (nl) 1976-05-31 1976-05-31 Elektronenstraalbuis met veldemissieelektronen- bron, veldemissieelektronenbron voor een der- gelijke elektronenstraalbuis en werkwijze voor de vervaardiging van een dergelijke veldemis- sieelektronenbron.

Publications (1)

Publication Number Publication Date
ES459255A1 true ES459255A1 (es) 1978-03-16

Family

ID=19826288

Family Applications (2)

Application Number Title Priority Date Filing Date
ES459255A Expired ES459255A1 (es) 1976-05-31 1977-05-28 Perfeccionamientos introducidos en un tubo de haz de elec- trones.
ES462612A Expired ES462612A1 (es) 1976-05-31 1977-09-24 Un metodo de fabricar una fuente de electrones de emision decampo para un tubo de rayos catodicos.

Family Applications After (1)

Application Number Title Priority Date Filing Date
ES462612A Expired ES462612A1 (es) 1976-05-31 1977-09-24 Un metodo de fabricar una fuente de electrones de emision decampo para un tubo de rayos catodicos.

Country Status (9)

Country Link
JP (1) JPS52146545A (es)
AU (1) AU2558877A (es)
DE (1) DE2722497A1 (es)
ES (2) ES459255A1 (es)
FR (1) FR2353948A1 (es)
GB (1) GB1538660A (es)
IT (1) IT1078861B (es)
NL (1) NL7605820A (es)
SE (1) SE7706095L (es)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5578901A (en) * 1994-02-14 1996-11-26 E. I. Du Pont De Nemours And Company Diamond fiber field emitters
JPH08212952A (ja) * 1995-02-06 1996-08-20 Natl Res Inst For Metals レーザー照射型電子銃
DE69604930T2 (de) * 1995-11-15 2000-05-18 E.I. Du Pont De Nemours And Co., Wilmington Feldmitters aus geglühtem kohlenstoffruss und daraus hergestellte feldemissionskathoden
WO2022196499A1 (ja) 2021-03-19 2022-09-22 デンカ株式会社 エミッター及びこれを備える装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3631291A (en) * 1969-04-30 1971-12-28 Gen Electric Field emission cathode with metallic boride coating
GB1394055A (en) * 1971-07-09 1975-05-14 Nat Res Dev Electron emitters
NL7501932A (nl) * 1975-02-19 1976-08-23 Philips Nv Veldemissiebron.
DE2628584C3 (de) * 1975-06-27 1981-04-16 Hitachi, Ltd., Tokyo Feldemissionskathode und Verfahren zur Herstellung einer nadelförmigen Kathodenspitze dafür
JPS524162A (en) * 1975-06-27 1977-01-13 Hitachi Ltd Electric field radiation cathode and its manufacturing method

Also Published As

Publication number Publication date
SE7706095L (sv) 1977-12-01
NL7605820A (nl) 1977-12-02
ES462612A1 (es) 1978-06-16
JPS52146545A (en) 1977-12-06
FR2353948A1 (fr) 1977-12-30
FR2353948B1 (es) 1981-05-29
DE2722497A1 (de) 1977-12-22
GB1538660A (en) 1979-01-24
AU2558877A (en) 1978-11-30
IT1078861B (it) 1985-05-08

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