AU2558877A - Electron beam tube - Google Patents

Electron beam tube

Info

Publication number
AU2558877A
AU2558877A AU25588/77A AU2558877A AU2558877A AU 2558877 A AU2558877 A AU 2558877A AU 25588/77 A AU25588/77 A AU 25588/77A AU 2558877 A AU2558877 A AU 2558877A AU 2558877 A AU2558877 A AU 2558877A
Authority
AU
Australia
Prior art keywords
electron beam
beam tube
tube
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU25588/77A
Other languages
English (en)
Inventor
Hendrik Bouke Haanstra
Gerardus Gegorius Petru Gorkom
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of AU2558877A publication Critical patent/AU2558877A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • H01J1/304Field-emissive cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/073Electron guns using field emission, photo emission, or secondary emission electron sources
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/022Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/304Field emission cathodes
    • H01J2201/30446Field emission cathodes characterised by the emitter material
    • H01J2201/30453Carbon types
    • H01J2201/30457Diamond
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06Sources
    • H01J2237/063Electron sources
    • H01J2237/06308Thermionic sources
    • H01J2237/06316Schottky emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
AU25588/77A 1976-05-31 1977-05-27 Electron beam tube Expired AU2558877A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7605820A NL7605820A (nl) 1976-05-31 1976-05-31 Elektronenstraalbuis met veldemissieelektronen- bron, veldemissieelektronenbron voor een der- gelijke elektronenstraalbuis en werkwijze voor de vervaardiging van een dergelijke veldemis- sieelektronenbron.

Publications (1)

Publication Number Publication Date
AU2558877A true AU2558877A (en) 1978-11-30

Family

ID=19826288

Family Applications (1)

Application Number Title Priority Date Filing Date
AU25588/77A Expired AU2558877A (en) 1976-05-31 1977-05-27 Electron beam tube

Country Status (9)

Country Link
JP (1) JPS52146545A (es)
AU (1) AU2558877A (es)
DE (1) DE2722497A1 (es)
ES (2) ES459255A1 (es)
FR (1) FR2353948A1 (es)
GB (1) GB1538660A (es)
IT (1) IT1078861B (es)
NL (1) NL7605820A (es)
SE (1) SE7706095L (es)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5578901A (en) * 1994-02-14 1996-11-26 E. I. Du Pont De Nemours And Company Diamond fiber field emitters
JPH08212952A (ja) * 1995-02-06 1996-08-20 Natl Res Inst For Metals レーザー照射型電子銃
EP0861498B1 (en) * 1995-11-15 1999-10-27 E.I. Du Pont De Nemours And Company Annealed carbon soot field emitters and field emitter cathodes made therefrom
CN116325061A (zh) * 2021-03-19 2023-06-23 电化株式会社 发射器及具备其的装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3631291A (en) * 1969-04-30 1971-12-28 Gen Electric Field emission cathode with metallic boride coating
GB1394055A (en) * 1971-07-09 1975-05-14 Nat Res Dev Electron emitters
NL7501932A (nl) * 1975-02-19 1976-08-23 Philips Nv Veldemissiebron.
DE2628584C3 (de) * 1975-06-27 1981-04-16 Hitachi, Ltd., Tokyo Feldemissionskathode und Verfahren zur Herstellung einer nadelförmigen Kathodenspitze dafür
JPS524162A (en) * 1975-06-27 1977-01-13 Hitachi Ltd Electric field radiation cathode and its manufacturing method

Also Published As

Publication number Publication date
JPS52146545A (en) 1977-12-06
NL7605820A (nl) 1977-12-02
ES459255A1 (es) 1978-03-16
SE7706095L (sv) 1977-12-01
FR2353948A1 (fr) 1977-12-30
ES462612A1 (es) 1978-06-16
FR2353948B1 (es) 1981-05-29
IT1078861B (it) 1985-05-08
GB1538660A (en) 1979-01-24
DE2722497A1 (de) 1977-12-22

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