GB1515696A - Sheet positioning apparatus - Google Patents

Sheet positioning apparatus

Info

Publication number
GB1515696A
GB1515696A GB2326075A GB2326075A GB1515696A GB 1515696 A GB1515696 A GB 1515696A GB 2326075 A GB2326075 A GB 2326075A GB 2326075 A GB2326075 A GB 2326075A GB 1515696 A GB1515696 A GB 1515696A
Authority
GB
United Kingdom
Prior art keywords
carrier
contact
raised
balls
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2326075A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP49059922A external-priority patent/JPS50152670A/ja
Priority claimed from JP5992374A external-priority patent/JPS571889B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of GB1515696A publication Critical patent/GB1515696A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
GB2326075A 1974-05-28 1975-05-28 Sheet positioning apparatus Expired GB1515696A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP49059922A JPS50152670A (nl) 1974-05-28 1974-05-28
JP5992374A JPS571889B2 (nl) 1974-05-28 1974-05-28

Publications (1)

Publication Number Publication Date
GB1515696A true GB1515696A (en) 1978-06-28

Family

ID=26400988

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2326075A Expired GB1515696A (en) 1974-05-28 1975-05-28 Sheet positioning apparatus

Country Status (3)

Country Link
DE (1) DE2523790C2 (nl)
GB (1) GB1515696A (nl)
NL (1) NL7506294A (nl)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2449298A1 (fr) * 1979-02-14 1980-09-12 Dainippon Screen Mfg Procede et machine pour positionner des films sur des feuilles de base
FR2454645A1 (fr) * 1979-04-16 1980-11-14 Dainippon Screen Mfg Procede et dispositif de positionnement de films de selection de couleur pour l'imprimerie

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2449298A1 (fr) * 1979-02-14 1980-09-12 Dainippon Screen Mfg Procede et machine pour positionner des films sur des feuilles de base
FR2454645A1 (fr) * 1979-04-16 1980-11-14 Dainippon Screen Mfg Procede et dispositif de positionnement de films de selection de couleur pour l'imprimerie

Also Published As

Publication number Publication date
DE2523790A1 (de) 1975-12-11
DE2523790C2 (de) 1981-09-17
NL7506294A (nl) 1975-12-02

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Legal Events

Date Code Title Description
PS Patent sealed
PE20 Patent expired after termination of 20 years

Effective date: 19950527