GB1500691A - Apparatus for synthesizing materials by chemical reaction - Google Patents

Apparatus for synthesizing materials by chemical reaction

Info

Publication number
GB1500691A
GB1500691A GB5799173A GB5799173A GB1500691A GB 1500691 A GB1500691 A GB 1500691A GB 5799173 A GB5799173 A GB 5799173A GB 5799173 A GB5799173 A GB 5799173A GB 1500691 A GB1500691 A GB 1500691A
Authority
GB
United Kingdom
Prior art keywords
furnace
temperature
furnaces
conductors
dec
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5799173A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to GB5799173A priority Critical patent/GB1500691A/en
Publication of GB1500691A publication Critical patent/GB1500691A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45561—Gas plumbing upstream of the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/08—Reaction chambers; Selection of materials therefor
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/16—Controlling or regulating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

1500691 Feed and temperature control D H POMMERRENIG 16 Dec 1974 [14 Dec 1973] 57991/73 Heading B1X [Also in Division F4] A gas distribution system in association with a plurality of chemical reactor furnaces is arranged so as to be capable of feeding a plurality of reagent and/or ambient gases selectively into any one of the reaction furnaces. In particular, in the synthesizing of materials such as conductors, semi-conductors and insulators in the production of electronic components and circuits, a plurality of two-zone reactor furnaces (RF1-RF4, Fig. 1) are supplied e.g. from supply cylinders and via mixing chambers (MC) and flow meters (FM) with the requisite gases under the control of valves (T) actuated by a switching arrangement (Fig. 2 or 3 and 4) adapted to permit the selection of the temperature profile required for the furnace. Only the selected furnace is activated while the others remain deactivated. The arrangement is such that any of a variety of temperature profiles can be selected and switched from furnace to furnace without having to alter the temperature controller settings.
GB5799173A 1974-12-16 1974-12-16 Apparatus for synthesizing materials by chemical reaction Expired GB1500691A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB5799173A GB1500691A (en) 1974-12-16 1974-12-16 Apparatus for synthesizing materials by chemical reaction

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5799173A GB1500691A (en) 1974-12-16 1974-12-16 Apparatus for synthesizing materials by chemical reaction

Publications (1)

Publication Number Publication Date
GB1500691A true GB1500691A (en) 1978-02-08

Family

ID=10480538

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5799173A Expired GB1500691A (en) 1974-12-16 1974-12-16 Apparatus for synthesizing materials by chemical reaction

Country Status (1)

Country Link
GB (1) GB1500691A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1342811A1 (en) * 2002-03-05 2003-09-10 Fujitsu Limited Method of forming a film

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1342811A1 (en) * 2002-03-05 2003-09-10 Fujitsu Limited Method of forming a film
US6841489B2 (en) 2002-03-05 2005-01-11 Fujitsu Limited Method of manufacturing a semiconductor device and method of forming a film
EP2341163A1 (en) * 2002-03-05 2011-07-06 Fujitsu Limited Method of forming a film

Similar Documents

Publication Publication Date Title
GB1219322A (en) Process and apparatus for the treatment of material which yields oxidisable volatile matter under heat
ES319941A1 (en) Improvements in the procedure and devices for producing black carbon of a regulable module. (Machine-translation by Google Translate, not legally binding)
ES421314A1 (en) Calcination of pulverous material
ES425836A1 (en) Process for producing carbon disulfide
ES478842A1 (en) Method and apparatus for the control of the carbon level of a gas mixture reacting in a furnace chamber
GB1213045A (en) Multiple zone apparatus for the processing of fluids having interzone fluid mixing and redistribution features
GB1500691A (en) Apparatus for synthesizing materials by chemical reaction
GB1484174A (en) Method for the calcination of granular and/or lumpy material particularly for burning lime stone dolomite or magnesite and shaft kiln for carrying out the method
ES419950A1 (en) Process for converting sewage sludge into compost
JPS5676241A (en) Control of temperature of reactor
US3469947A (en) Atmosphere generator
GB1225690A (en)
ES338700A1 (en) Method of controlling surface area of carbon black
ES442478A1 (en) Method for generating hydrogen
GB1504320A (en) Control of vertical heat treatment vessels
ES295904A1 (en) Production of metals from pulverulent materials by flash smelting in an electrically heated furnace
ES402837A1 (en) Central shaft feeding for rotary hearth furnace
ES330183A1 (en) A method of controlling the operation of an oven for black smoke. (Machine-translation by Google Translate, not legally binding)
ES8703820A1 (en) Process and apparatus for thermal treatment of fine grained material, particularly for burning raw cement powder.
SU827944A1 (en) Automated complex for control of rotating furnace operation
ES443884A1 (en) Reacting solid carbonaceous particles in fluidizing bed processes while avoiding agglomeration
GB1405488A (en) Method and apparatus for treating fine grained material
SU475865A1 (en) Endo-exo-thermic gas generator
GB978755A (en) Process for making acetylene
FR2242901A5 (en) Laboratory thermal reaction control appts. - monitors temperature, exposure time and atmospheric composition

Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee