GB1497212A - Capacitive sensor - Google Patents

Capacitive sensor

Info

Publication number
GB1497212A
GB1497212A GB1349875A GB1349875A GB1497212A GB 1497212 A GB1497212 A GB 1497212A GB 1349875 A GB1349875 A GB 1349875A GB 1349875 A GB1349875 A GB 1349875A GB 1497212 A GB1497212 A GB 1497212A
Authority
GB
United Kingdom
Prior art keywords
diaphragm
april
housing
supporting
cup
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1349875A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosemount Inc
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Publication of GB1497212A publication Critical patent/GB1497212A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
GB1349875A 1974-04-04 1975-04-02 Capacitive sensor Expired GB1497212A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US45769774A 1974-04-04 1974-04-04
US45769874A 1974-04-04 1974-04-04

Publications (1)

Publication Number Publication Date
GB1497212A true GB1497212A (en) 1978-01-05

Family

ID=27038707

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1349875A Expired GB1497212A (en) 1974-04-04 1975-04-02 Capacitive sensor

Country Status (5)

Country Link
JP (1) JPS5814610B2 (enrdf_load_stackoverflow)
DE (1) DE2514511C2 (enrdf_load_stackoverflow)
FR (1) FR2266878B1 (enrdf_load_stackoverflow)
GB (1) GB1497212A (enrdf_load_stackoverflow)
SE (1) SE412956B (enrdf_load_stackoverflow)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2240397A (en) * 1990-01-27 1991-07-31 Dobson Park Ind Capacitive transducer
EP0849576A1 (de) * 1996-12-20 1998-06-24 Siemens Aktiengesellschaft Kapazitiver Kraftsensor
WO1998059228A3 (en) * 1997-06-20 1999-03-18 Mks Instr Inc Capacitive pressure transducer with improved electrode support
US6993973B2 (en) 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
US7284439B2 (en) 1997-12-22 2007-10-23 Mks Instruments, Inc. Method for producing a pressure sensor for detecting small pressure differences and low pressures

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3975719A (en) * 1975-01-20 1976-08-17 Rosemount Inc. Transducer for converting a varying reactance signal to a DC current signal
US4320667A (en) * 1978-10-17 1982-03-23 Lucas Industries Limited Load transducer
US4295376A (en) * 1978-12-01 1981-10-20 Besco Industries, Inc. Force responsive transducer
GB2101331A (en) * 1981-06-29 1983-01-12 Bendix Corp Capacitive differential pressure transducer
JPS59145940A (ja) * 1983-02-08 1984-08-21 Yokogawa Hokushin Electric Corp 差圧・圧力伝送器
JPH0666478B2 (ja) * 1984-02-09 1994-08-24 横河電機株式会社 圧力センサ
US4555952A (en) * 1984-06-08 1985-12-03 Borg-Warner Corporation Differential pressure sensor
JPH0750685Y2 (ja) * 1987-11-19 1995-11-15 株式会社トーキン 静電容量式荷重センサー
JPH0718986Y2 (ja) * 1988-07-19 1995-05-01 株式会社トーキン 高感度静電容量式荷重検出装置
JPH0718987Y2 (ja) * 1988-08-17 1995-05-01 株式会社トーキン 静電容量式荷重センサ
DE3908544A1 (de) * 1989-03-16 1990-09-20 Vdo Schindling Lastsensor fuer ein kraftfahrzeug
US5542300A (en) * 1994-01-24 1996-08-06 Setra Systems, Inc. Low cost, center-mounted capacitive pressure sensor
DE10101973B4 (de) * 2001-01-17 2007-10-04 Pacifica Group Technologies Pty Ltd Kraftsensor zur Messung einer Kraft im Kraftfluss
US7353713B2 (en) 2003-04-09 2008-04-08 Loadstar Sensors, Inc. Flexible apparatus and method to enhance capacitive force sensing
US7570065B2 (en) 2006-03-01 2009-08-04 Loadstar Sensors Inc Cylindrical capacitive force sensing device and method
US7343814B2 (en) 2006-04-03 2008-03-18 Loadstar Sensors, Inc. Multi-zone capacitive force sensing device and methods
US20200254985A1 (en) * 2019-02-12 2020-08-13 The Goodyear Tire & Rubber Company Brake pressure sensor for determination of braking efficiency

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3691842A (en) * 1970-09-08 1972-09-19 Beckman Instruments Inc Differential pressure transducer

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2240397A (en) * 1990-01-27 1991-07-31 Dobson Park Ind Capacitive transducer
EP0849576A1 (de) * 1996-12-20 1998-06-24 Siemens Aktiengesellschaft Kapazitiver Kraftsensor
US5969270A (en) * 1996-12-20 1999-10-19 Siemens Aktiengesellschaft Force sensor
WO1998059228A3 (en) * 1997-06-20 1999-03-18 Mks Instr Inc Capacitive pressure transducer with improved electrode support
US5911162A (en) * 1997-06-20 1999-06-08 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
JP2002505749A (ja) * 1997-06-20 2002-02-19 エムケイエス・インストゥルメンツ・インコーポレーテッド 改良された電極支持体を備える容量型圧力変換器
US7284439B2 (en) 1997-12-22 2007-10-23 Mks Instruments, Inc. Method for producing a pressure sensor for detecting small pressure differences and low pressures
US7389697B2 (en) 1997-12-22 2008-06-24 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6993973B2 (en) 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7624643B2 (en) 2004-10-07 2009-12-01 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor

Also Published As

Publication number Publication date
JPS5814610B2 (ja) 1983-03-19
FR2266878A1 (enrdf_load_stackoverflow) 1975-10-31
FR2266878B1 (enrdf_load_stackoverflow) 1981-09-25
DE2514511A1 (de) 1975-10-30
SE7503078L (sv) 1975-10-06
SE412956B (sv) 1980-03-24
DE2514511C2 (de) 1986-01-23
JPS50142081A (enrdf_load_stackoverflow) 1975-11-15

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Legal Events

Date Code Title Description
PS Patent sealed
429A Application made for amendment of specification (sect. 29/1949)
429H Application (made) for amendment of specification now open to opposition (sect. 29/1949)
429D Case decided by the comptroller ** specification amended (sect. 29/1949)
SPA Amended specification published
PE20 Patent expired after termination of 20 years

Effective date: 19950401