JPS50142081A - - Google Patents

Info

Publication number
JPS50142081A
JPS50142081A JP4110475A JP4110475A JPS50142081A JP S50142081 A JPS50142081 A JP S50142081A JP 4110475 A JP4110475 A JP 4110475A JP 4110475 A JP4110475 A JP 4110475A JP S50142081 A JPS50142081 A JP S50142081A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4110475A
Other languages
Japanese (ja)
Other versions
JPS5814610B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS50142081A publication Critical patent/JPS50142081A/ja
Publication of JPS5814610B2 publication Critical patent/JPS5814610B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
JP4110475A 1974-04-04 1975-04-04 コンデンサ型感知装置 Expired JPS5814610B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US45769774A 1974-04-04 1974-04-04
US45769874A 1974-04-04 1974-04-04
US457698 1974-04-04
US457697 1995-06-01

Publications (2)

Publication Number Publication Date
JPS50142081A true JPS50142081A (enrdf_load_stackoverflow) 1975-11-15
JPS5814610B2 JPS5814610B2 (ja) 1983-03-19

Family

ID=27038707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4110475A Expired JPS5814610B2 (ja) 1974-04-04 1975-04-04 コンデンサ型感知装置

Country Status (5)

Country Link
JP (1) JPS5814610B2 (enrdf_load_stackoverflow)
DE (1) DE2514511C2 (enrdf_load_stackoverflow)
FR (1) FR2266878B1 (enrdf_load_stackoverflow)
GB (1) GB1497212A (enrdf_load_stackoverflow)
SE (1) SE412956B (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59145940A (ja) * 1983-02-08 1984-08-21 Yokogawa Hokushin Electric Corp 差圧・圧力伝送器
JPS60167383A (ja) * 1984-02-09 1985-08-30 Yokogawa Hokushin Electric Corp 圧力センサ
JPH0181545U (enrdf_load_stackoverflow) * 1987-11-19 1989-05-31
JPH0224348U (enrdf_load_stackoverflow) * 1988-07-19 1990-02-19
JPH0230033U (enrdf_load_stackoverflow) * 1988-08-17 1990-02-26

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3975719A (en) * 1975-01-20 1976-08-17 Rosemount Inc. Transducer for converting a varying reactance signal to a DC current signal
US4320667A (en) * 1978-10-17 1982-03-23 Lucas Industries Limited Load transducer
US4295376A (en) * 1978-12-01 1981-10-20 Besco Industries, Inc. Force responsive transducer
GB2101331A (en) * 1981-06-29 1983-01-12 Bendix Corp Capacitive differential pressure transducer
US4555952A (en) * 1984-06-08 1985-12-03 Borg-Warner Corporation Differential pressure sensor
DE3908544A1 (de) * 1989-03-16 1990-09-20 Vdo Schindling Lastsensor fuer ein kraftfahrzeug
GB2240397A (en) * 1990-01-27 1991-07-31 Dobson Park Ind Capacitive transducer
US5542300A (en) * 1994-01-24 1996-08-06 Setra Systems, Inc. Low cost, center-mounted capacitive pressure sensor
DE19653427A1 (de) * 1996-12-20 1998-07-02 Siemens Ag Kraftsensor
US5911162A (en) * 1997-06-20 1999-06-08 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
US20040099061A1 (en) 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
DE10101973B4 (de) * 2001-01-17 2007-10-04 Pacifica Group Technologies Pty Ltd Kraftsensor zur Messung einer Kraft im Kraftfluss
US7353713B2 (en) 2003-04-09 2008-04-08 Loadstar Sensors, Inc. Flexible apparatus and method to enhance capacitive force sensing
US7570065B2 (en) 2006-03-01 2009-08-04 Loadstar Sensors Inc Cylindrical capacitive force sensing device and method
US6993973B2 (en) 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
US7343814B2 (en) 2006-04-03 2008-03-18 Loadstar Sensors, Inc. Multi-zone capacitive force sensing device and methods
US20200254985A1 (en) * 2019-02-12 2020-08-13 The Goodyear Tire & Rubber Company Brake pressure sensor for determination of braking efficiency

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3691842A (en) * 1970-09-08 1972-09-19 Beckman Instruments Inc Differential pressure transducer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59145940A (ja) * 1983-02-08 1984-08-21 Yokogawa Hokushin Electric Corp 差圧・圧力伝送器
JPS60167383A (ja) * 1984-02-09 1985-08-30 Yokogawa Hokushin Electric Corp 圧力センサ
JPH0181545U (enrdf_load_stackoverflow) * 1987-11-19 1989-05-31
JPH0224348U (enrdf_load_stackoverflow) * 1988-07-19 1990-02-19
JPH0230033U (enrdf_load_stackoverflow) * 1988-08-17 1990-02-26

Also Published As

Publication number Publication date
SE412956B (sv) 1980-03-24
FR2266878A1 (enrdf_load_stackoverflow) 1975-10-31
JPS5814610B2 (ja) 1983-03-19
FR2266878B1 (enrdf_load_stackoverflow) 1981-09-25
GB1497212A (en) 1978-01-05
SE7503078L (sv) 1975-10-06
DE2514511A1 (de) 1975-10-30
DE2514511C2 (de) 1986-01-23

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