GB1495307A - Etching processes - Google Patents

Etching processes

Info

Publication number
GB1495307A
GB1495307A GB4069475A GB4069475A GB1495307A GB 1495307 A GB1495307 A GB 1495307A GB 4069475 A GB4069475 A GB 4069475A GB 4069475 A GB4069475 A GB 4069475A GB 1495307 A GB1495307 A GB 1495307A
Authority
GB
United Kingdom
Prior art keywords
added
acid
metal oxide
etchant
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4069475A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BAE Systems Electronics Ltd
Original Assignee
Marconi Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marconi Co Ltd filed Critical Marconi Co Ltd
Priority to GB4069475A priority Critical patent/GB1495307A/en
Publication of GB1495307A publication Critical patent/GB1495307A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/20—Acidic compositions for etching aluminium or alloys thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Surface Treatment Of Glass (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

1495307 Etching process MARCONI CO Ltd 30 July 1976 [4 Oct 1975] 40694/75 Heading B6J An aluminium, cadmium or zinc layer, provided as an overlay upon a substrate (such as glass) bearing a conductive pattern of metal oxide (such as tin or indium oxides), is etched with an acid etchant to which an oxidizing agent has been added to suppress the etchant effect upon said metal oxide of nascent hydrogen released during the etching of the metal. Preferably solutions of sulphuric acid are used to which chromic acid, potassium permanganate or ceric sulphate have been added.
GB4069475A 1976-07-30 1976-07-30 Etching processes Expired GB1495307A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB4069475A GB1495307A (en) 1976-07-30 1976-07-30 Etching processes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4069475A GB1495307A (en) 1976-07-30 1976-07-30 Etching processes

Publications (1)

Publication Number Publication Date
GB1495307A true GB1495307A (en) 1977-12-14

Family

ID=10416157

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4069475A Expired GB1495307A (en) 1976-07-30 1976-07-30 Etching processes

Country Status (1)

Country Link
GB (1) GB1495307A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113755840A (en) * 2021-08-16 2021-12-07 合肥本源量子计算科技有限责任公司 Etching liquid and etching method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113755840A (en) * 2021-08-16 2021-12-07 合肥本源量子计算科技有限责任公司 Etching liquid and etching method

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee