GB1494790A - Apparatus for the surface treatment of a sample - Google Patents

Apparatus for the surface treatment of a sample

Info

Publication number
GB1494790A
GB1494790A GB1931075A GB1931075A GB1494790A GB 1494790 A GB1494790 A GB 1494790A GB 1931075 A GB1931075 A GB 1931075A GB 1931075 A GB1931075 A GB 1931075A GB 1494790 A GB1494790 A GB 1494790A
Authority
GB
United Kingdom
Prior art keywords
sample
etched
holder
housing
sleeve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1931075A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gesellschaft fuer Kernforschung mbH
Original Assignee
Gesellschaft fuer Kernforschung mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gesellschaft fuer Kernforschung mbH filed Critical Gesellschaft fuer Kernforschung mbH
Publication of GB1494790A publication Critical patent/GB1494790A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/32Polishing; Etching

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • ing And Chemical Polishing (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

1494790 Sputter etching KERNFORSCHUNG mbH GES FUER 8 May 1975 [12 July 1974] 19310/75 Heading B3V [Also in Divisions B6 and C7] An apparatus for gas or cathodic ion etching a metallographic sample 26 and for coating a workpiece 61 by sputtering of the sample 26 comprises a housing 1, a holder 29 for holding the sample 26 to be etched, a focusing means 42 for the ionized or sputtered particles to or from the sample surface adjustably positioned within an electrically insulating sleeve 46 between the holder 29 and an electrode 11 and a holder for the workpiece 61 to be coated between the focusing means 42 and the electrode 11. The housing 1 is made of glass and is connected to vacuum pumps (7, 14), (Fig. 1, not shown). The holder 29 comprises a plate 30 which is mounted on a water cooled pipe 31 and which mounts a spring 41 for pressing the sample 26 to be etched, e.g. gold and also comprising the source of coating material against an inwardly directed flange 57 on a sleeve 35. The temperature of the sample 26 is monitored by thermocouples. When the sample 26 is to be cathodically etched, the housing 1 is filled through an inlet 15 with argon, xenon and/or krypton. When the sample 26 is to be gas etched, the housing 1 is filled with oxygen, carbon dioxide and/or nitrogen and the sample 26 is anodically connected so that negative gas ions accumulate on, and thereby etch, the sample surface. The ions are focused on to the sample 26 by an apertured disc 42 adjustably mounted in the sleeve 46. The upper part 49 of the sleeve 46 houses samples 61 to be coated which are held between clamping elements 51, 52.
GB1931075A 1974-07-12 1975-05-08 Apparatus for the surface treatment of a sample Expired GB1494790A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742433690 DE2433690C2 (en) 1974-07-12 1974-07-12 Device for the surface treatment of a metallographic sample

Publications (1)

Publication Number Publication Date
GB1494790A true GB1494790A (en) 1977-12-14

Family

ID=5920455

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1931075A Expired GB1494790A (en) 1974-07-12 1975-05-08 Apparatus for the surface treatment of a sample

Country Status (3)

Country Link
CH (1) CH589850A5 (en)
DE (1) DE2433690C2 (en)
GB (1) GB1494790A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE420243B (en) * 1980-01-16 1981-09-21 Massab Maskin Och Smide Ab MAKE A MEDIUM DEFINITELY PROCESSING IN A METAL PIECE OF ASTADCOMMA A SURFACE FOR SPECTRAL ANALYSIS
DE19719903A1 (en) * 1997-05-12 1998-11-19 Deutsch Zentr Luft & Raumfahrt Measuring device and method for cleaning contamination areas of a measuring device
CN110907258A (en) * 2019-12-30 2020-03-24 昆山全亚冠环保科技有限公司 Gold metallographic electrolytic corrosion method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1448020A1 (en) * 1960-11-09 1968-10-24 Nuclear Materials & Equipment Device for cathodic etching of metals
DE2130605C3 (en) * 1971-06-21 1974-02-07 Leitz Ernst Gmbh Contrasting method for objects to be examined microscopically

Also Published As

Publication number Publication date
DE2433690A1 (en) 1976-01-29
CH589850A5 (en) 1977-07-15
DE2433690C2 (en) 1984-04-26

Similar Documents

Publication Publication Date Title
GB1499857A (en) Glow discharge etching
EP0121019A3 (en) Rapid rate reactive sputtering of a group ivb metal
US3711398A (en) Sputtering apparatus
US4622122A (en) Planar magnetron cathode target assembly
KR910008162A (en) Apparatus and method for coating synthetic resin substrates, in particular polymethyl methacrylate substrates, with aluminum
US3294669A (en) Apparatus for sputtering in a highly purified gas atmosphere
US3830721A (en) Hollow cathode sputtering device
US3330752A (en) Method and apparatus for cathode sputtering including suppressing temperature rise adjacent the anode using a localized magnetic field
GB1494790A (en) Apparatus for the surface treatment of a sample
US4049533A (en) Device for producing coatings by means of ion sputtering
GB939275A (en) Device for producing thin metal layers by ion neutralization
US3391071A (en) Method of sputtering highly pure refractory metals in an anodically biased chamber
US2463906A (en) Apparatus and method for making optical devices
US3210263A (en) Electric discharge apparatus for etching
Allen et al. Conversion of vacuum coating units for sputter coating
JPS5713177A (en) Etching method
JP3099153B2 (en) Film processing equipment
FR2351426A2 (en) Liq. crystal cell with vertically mounter components - has substrate, electrode in form of coating with surface micromachined by ion beam permitting homogeneous tilted positioning
Imlah The etching of plutonium and its alloys by cathodic bombardment
EP0032709A3 (en) Apparatus and method for the (patterned) coating of a substrate by cathodic sputtering and use thereof
GB1115937A (en) Method and apparatus for sputtering thin film resistance elements
TW347645B (en) Electromagnetic insulating film by vacuum method
JPH0542608Y2 (en)
GB1462928A (en) Process for the surface treatment of a metallographic sample by means of cathodic ion and gas etching
SU1029786A1 (en) Ionic source of mass spectrometer

Legal Events

Date Code Title Description
PS Patent sealed
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee