GB1478594A - Electronic storage tube target having a radiation insensitive layer - Google Patents
Electronic storage tube target having a radiation insensitive layerInfo
- Publication number
- GB1478594A GB1478594A GB2000174A GB2000174A GB1478594A GB 1478594 A GB1478594 A GB 1478594A GB 2000174 A GB2000174 A GB 2000174A GB 2000174 A GB2000174 A GB 2000174A GB 1478594 A GB1478594 A GB 1478594A
- Authority
- GB
- United Kingdom
- Prior art keywords
- layer
- insulating
- areas
- radiation
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003860 storage Methods 0.000 title abstract 3
- 230000005855 radiation Effects 0.000 title 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000011810 insulating material Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 238000005234 chemical deposition Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 230000005865 ionizing radiation Effects 0.000 abstract 1
- 230000014759 maintenance of location Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
- H01J29/36—Photoelectric screens; Charge-storage screens
- H01J29/39—Charge-storage screens
Landscapes
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
- Semiconductor Memories (AREA)
- Apparatus For Radiation Diagnosis (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US43025774A | 1974-01-02 | 1974-01-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1478594A true GB1478594A (en) | 1977-07-06 |
Family
ID=23706754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB2000174A Expired GB1478594A (en) | 1974-01-02 | 1974-06-07 | Electronic storage tube target having a radiation insensitive layer |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5530656B2 (enExample) |
| CA (1) | CA1044744A (enExample) |
| DE (1) | DE2420789C3 (enExample) |
| FR (1) | FR2256529B1 (enExample) |
| GB (1) | GB1478594A (enExample) |
| IT (1) | IT1021128B (enExample) |
| NL (1) | NL7407172A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6831784B2 (ja) * | 2014-12-01 | 2021-02-17 | エーエスエムエル ネザーランズ ビー．ブイ． | リソグラフィ製造プロセスに関する診断情報を取得するための方法および装置、診断装置を含むリソグラフィックプロセシングシステム |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4849378A (enExample) * | 1971-10-22 | 1973-07-12 | ||
| JPS49118366A (enExample) * | 1973-03-10 | 1974-11-12 |
-
1974
- 1974-04-08 CA CA197,028A patent/CA1044744A/en not_active Expired
- 1974-04-29 DE DE19742420789 patent/DE2420789C3/de not_active Expired
- 1974-05-09 JP JP5169574A patent/JPS5530656B2/ja not_active Expired
- 1974-05-15 FR FR7416924A patent/FR2256529B1/fr not_active Expired
- 1974-05-29 NL NL7407172A patent/NL7407172A/xx not_active Application Discontinuation
- 1974-06-07 GB GB2000174A patent/GB1478594A/en not_active Expired
- 1974-09-06 IT IT2700074A patent/IT1021128B/it active
Also Published As
| Publication number | Publication date |
|---|---|
| CA1044744A (en) | 1978-12-19 |
| NL7407172A (nl) | 1975-07-04 |
| JPS5099677A (enExample) | 1975-08-07 |
| DE2420789A1 (de) | 1975-07-10 |
| DE2420789C3 (de) | 1980-08-21 |
| FR2256529A1 (enExample) | 1975-07-25 |
| DE2420789B2 (de) | 1979-12-06 |
| FR2256529B1 (enExample) | 1979-01-26 |
| JPS5530656B2 (enExample) | 1980-08-12 |
| IT1021128B (it) | 1978-01-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PCNP | Patent ceased through non-payment of renewal fee |