GB1429684A - Ion milling machine and method of operation - Google Patents

Ion milling machine and method of operation

Info

Publication number
GB1429684A
GB1429684A GB2379173A GB2379173A GB1429684A GB 1429684 A GB1429684 A GB 1429684A GB 2379173 A GB2379173 A GB 2379173A GB 2379173 A GB2379173 A GB 2379173A GB 1429684 A GB1429684 A GB 1429684A
Authority
GB
United Kingdom
Prior art keywords
ion
sample
machine
milling
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2379173A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commonwealth Scientific Corp
Original Assignee
Commonwealth Scientific Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commonwealth Scientific Corp filed Critical Commonwealth Scientific Corp
Publication of GB1429684A publication Critical patent/GB1429684A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3005—Observing the objects or the point of impact on the object
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

1429684 Ion beam apparatus COMMONWEALTH SCIENTIFIC CORP 18 May 1973 [5 July 1972] 23791/73 Heading H1D An ion beam milling machine has means for detecting radiation (which may be the ions used for milling or other radiation) from the sample and for producing an electrical signal indicative of the thickness of the sample to check the progress of the milling operation. An automatic system Fig. 5 (not shown) can be arranged to check the thickness periodically and when the operation is complete can disable the machine, e.g. by stopping the flow of argon to the ion guns. In a two beam machine the detectors can be mounted on leaves which can each intercept one beam path when a solenoid is energized and measure ions passing through the sample from the other ion gun. Alternatively one ion gun can be turned off and used as a detector of ions from the opposite gun.
GB2379173A 1972-07-05 1973-05-18 Ion milling machine and method of operation Expired GB1429684A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00269024A US3840721A (en) 1972-07-05 1972-07-05 Automatic control for ion milling machine

Publications (1)

Publication Number Publication Date
GB1429684A true GB1429684A (en) 1976-03-24

Family

ID=23025506

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2379173A Expired GB1429684A (en) 1972-07-05 1973-05-18 Ion milling machine and method of operation

Country Status (2)

Country Link
US (1) US3840721A (en)
GB (1) GB1429684A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3988564A (en) * 1972-07-17 1976-10-26 Hughes Aircraft Company Ion beam micromachining method
US4663511A (en) * 1986-05-02 1987-05-05 The United States Of America As Represented By The United States Department Of Energy Stereoscopic optical viewing system
US4999495A (en) * 1988-08-31 1991-03-12 Seiko Instruments Inc. Scanning tunneling microscope
JP3221797B2 (en) * 1994-06-14 2001-10-22 株式会社日立製作所 Sample preparation method and apparatus
US7670956B2 (en) * 2005-04-08 2010-03-02 Fei Company Beam-induced etching
EP2887379A1 (en) * 2013-12-23 2015-06-24 Proton Laser Applications, S.L. Intra-operatory carbon ion radiation therapy system

Also Published As

Publication number Publication date
US3840721A (en) 1974-10-08

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee