GB1426865A - Carousel - Google Patents

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Info

Publication number
GB1426865A
GB1426865A GB697672A GB697672A GB1426865A GB 1426865 A GB1426865 A GB 1426865A GB 697672 A GB697672 A GB 697672A GB 697672 A GB697672 A GB 697672A GB 1426865 A GB1426865 A GB 1426865A
Authority
GB
United Kingdom
Prior art keywords
plate
chambers
pump
vacuum
doors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB697672A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC International Ltd filed Critical BOC International Ltd
Priority to GB697672A priority Critical patent/GB1426865A/en
Priority to DE19732306827 priority patent/DE2306827A1/de
Priority to FR7305173A priority patent/FR2172216B3/fr
Priority to IT2042273A priority patent/IT979134B/it
Priority to JP1882673A priority patent/JPS4892246A/ja
Priority to AU61035/73A priority patent/AU6103573A/en
Publication of GB1426865A publication Critical patent/GB1426865A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
GB697672A 1972-02-15 1972-02-15 Carousel Expired GB1426865A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB697672A GB1426865A (en) 1972-02-15 1972-02-15 Carousel
DE19732306827 DE2306827A1 (de) 1972-02-15 1973-02-12 Drehtisch fuer eine elektronenstrahlbearbeitungsmaschine
FR7305173A FR2172216B3 (enExample) 1972-02-15 1973-02-14
IT2042273A IT979134B (it) 1972-02-15 1973-02-15 Portapezzi rotante graduabile utilizzabile in particolare con saldatrici a raggi elettronici
JP1882673A JPS4892246A (enExample) 1972-02-15 1973-02-15
AU61035/73A AU6103573A (en) 1972-02-15 1973-10-04 Electron-beam welding

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB697672A GB1426865A (en) 1972-02-15 1972-02-15 Carousel

Publications (1)

Publication Number Publication Date
GB1426865A true GB1426865A (en) 1976-03-03

Family

ID=9824282

Family Applications (1)

Application Number Title Priority Date Filing Date
GB697672A Expired GB1426865A (en) 1972-02-15 1972-02-15 Carousel

Country Status (6)

Country Link
JP (1) JPS4892246A (enExample)
AU (1) AU6103573A (enExample)
DE (1) DE2306827A1 (enExample)
FR (1) FR2172216B3 (enExample)
GB (1) GB1426865A (enExample)
IT (1) IT979134B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4044266A (en) * 1975-07-09 1977-08-23 Danfysik A/S Apparatus for ion-implantation in elements, especially discs of semi-conducting material

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008061245B3 (de) * 2008-12-10 2010-01-28 Wega-Konstruktion GbR (vertretungsberechtigte Gesellschafter: Matthias Seuß und Steffen Hänsel, 09125 Chemnitz) Rundtaktmaschine für die Elektronenstrahlbearbeitung von Werkstücken und Verfahren zu deren Betreiben
DE102011120157B4 (de) * 2011-12-06 2017-08-31 Evobeam GmbH Vakuumbearbeitungsvorrichtung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4044266A (en) * 1975-07-09 1977-08-23 Danfysik A/S Apparatus for ion-implantation in elements, especially discs of semi-conducting material

Also Published As

Publication number Publication date
JPS4892246A (enExample) 1973-11-30
AU6103573A (en) 1975-04-10
IT979134B (it) 1974-09-30
FR2172216B3 (enExample) 1976-02-13
DE2306827A1 (de) 1973-08-23
FR2172216A1 (enExample) 1973-09-28

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee